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1.发明授权公开(公告)号：US11064299B2
公开(公告)日：2021-07-13
申请号：US16315965
申请日：2017-02-21
Applicant: OMRON Corporation
Inventor： Ayumu Murakami , Tadashi Inoue , Yasuhiro Horimoto
Abstract: A MEMS structure that includes: a substrate having an opening; a diaphragm arranged opposite the opening in the substrate; a plurality of anchors securing the diaphragm to the substrate or to another component; and a fixed membrane surrounding the diaphragm over a slit. The outline of the diaphragm protrudes toward the anchors and includes a predetermined intersecting structure that when viewed from the normal to the diaphragm, the diaphragm protrudes toward the anchors in at least one location on the diaphragm between two intersection points of the outline of the diaphragm and the outline of the opening in the substrate. The intersecting structure is configured such that the distance between the two intersection points is greater than the width of the diaphragm at a location closest to an anchor.
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公开(公告)号：US20150230027A1
公开(公告)日：2015-08-13
申请号：US14426895
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
IPC: H04R19/00
CPC classification number: H04R19/00 , B81B3/001 , B81B2201/0257 , B81B2203/0127 , H04R7/26 , H04R19/005 , H04R31/003 , H04R2207/021
Abstract: An acoustic transducer has a substrate having an opening in an upper surface thereof, a vibration electrode plate disposed above the substrate, and having an outer edge thereof facing the upper surface of the substrate with a gap therebetween, a fixed electrode plate facing the vibration electrode plate, and a plurality of projections protruding on a lower surface of the outer edge of the vibration electrode plate. The vibration electrode plate covers an upper side of the opening. The plurality of projections are disposed so as to not be positioned along a straight line or a curved line parallel to an edge of the opening in at least a part of one or at least two arrays formed on the lower surface of the outer edge.
Abstract translation: 声换能器具有在其上表面具有开口的基板，设置在基板上方的振动电极板，并且其外边缘面向基板的上表面，其间具有间隙，面向振动电极的固定电极板 板，以及在振动电极板的外缘的下表面上突出的多个突起。 振动电极板覆盖开口的上侧。 多个突起被设置成不沿着形成在外边缘的下表面上的一个或至少两个阵列的至少一部分中的平行于开口的边缘的直线或曲线定位。
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公开(公告)号：US10375482B2
公开(公告)日：2019-08-06
申请号：US15509221
申请日：2016-03-10
Applicant: OMRON Corporation
Inventor： Tadashi Inoue
Abstract: A capacitance type transducer has a substrate with an opening on a surface thereof, a back plate arranged to oppose the opening of the substrate, and a vibrating electrode film arranged to oppose the back plate across a gap between the vibrating electrode film and the back plate. The capacitance type transducer converts a displacement of the vibrating electrode film into a change in capacitance between the vibrating electrode film and the back plate. The capacitance type transducer has a pressure releasing flow channel which is an air flow channel formed by a gap between a part of the vibrating electrode film and a protruding portion integrally provided on the back plate.
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公开(公告)号：US20190116427A1
公开(公告)日：2019-04-18
申请号：US16125017
申请日：2018-09-07
Applicant: OMRON Corporation
Inventor： Tadashi Inoue
CPC classification number: H04R19/005 , B81B3/0072 , B81B2201/0264 , B81B2203/0127 , H04R1/02 , H04R7/04 , H04R31/003 , H04R2201/003
Abstract: A transducer includes: a substrate having a hole; a backplate facing an opening of the hole; and a diaphragm facing the backplate with an air gap therebetween. The backplate includes a backplate body, a backplate support secured to the substrate, and through-holes perforating the backplate body; the backplate body includes a center region and three or more peripheral regions partially or completely surrounding the center region; the through-holes defines a percentage open area in each of the center region and the three or more peripheral regions, and the percentage open areas are mutually different; the percentage open area in the center region is larger than the percentage open area in each of the three or more peripheral regions; and the percentage open area in the outermost peripheral region of the backplate body is smaller than the percentage open area in the peripheral region near the center region.
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公开(公告)号：US10555089B2
公开(公告)日：2020-02-04
申请号：US16125017
申请日：2018-09-07
Applicant: OMRON Corporation
Inventor： Tadashi Inoue
Abstract: A transducer includes: a substrate having a hole; a backplate facing an opening of the hole; and a diaphragm facing the backplate with an air gap therebetween. The backplate includes a backplate body, a backplate support secured to the substrate, and through-holes perforating the backplate body; the backplate body includes a center region and three or more peripheral regions partially or completely surrounding the center region; the through-holes defines a percentage open area in each of the center region and the three or more peripheral regions, and the percentage open areas are mutually different; the percentage open area in the center region is larger than the percentage open area in each of the three or more peripheral regions; and the percentage open area in the outermost peripheral region of the backplate body is smaller than the percentage open area in the peripheral region near the center region.
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Patent Agency Ranking
公开(公告)号：US09958315B2
公开(公告)日：2018-05-01
申请号：US14842871
申请日：2015-09-02
Applicant: OMRON Corporation
Inventor： Tadashi Inoue
CPC classification number: G01H11/06 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R19/04 , H01L2924/00014
Abstract: A chamber that penetrates vertically is formed in a silicon substrate. A diaphragm is arranged on the upper surface of the silicon substrate so as to cover the upper opening of the chamber. Leg pieces are provided in corner portions of the diaphragm, within the diaphragm. The diaphragm and the leg pieces are separated by slits, and the leg pieces extend in the diagonal directions of the diaphragm. The leg pieces are connected to the diaphragm at the ends on the outer peripheral side of the diaphragm, and the ends on the central side of the diaphragm are supported by anchors provided on the upper surface of the silicon substrate. A back plate is provided above the silicon substrate so as to cover the diaphragm, and a fixed electrode plate is provided on the lower surface of the back plate so as to oppose the diaphragm.
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公开(公告)号：US20150230011A1
公开(公告)日：2015-08-13
申请号：US14425641
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
IPC: H04R1/00
CPC classification number: H04R1/00 , H04R19/005 , H04R2201/003
Abstract: An acoustic transducer has a substrate having a cavity that is open at a top of the substrate, a vibration electrode film provided above the substrate so as to cover the cavity, and a fixed electrode film provided a distance above the vibration electrode film. A gap is formed between an upper surface of the substrate and a lower surface of the vibration electrode film around the cavity. In the gap across which the upper surface of the substrate and the lower surface of the vibration electrode film face each other, a narrow portion of the gap that is narrower than another portion of the gap is disposed. The narrow portion of the gap extends linearly.
Abstract translation: 声换能器具有基板，该基板在基板的顶部开口，在该基板上设置以覆盖该空腔的振动电极膜，以及设置在振动电极膜上方的距离的固定电极膜。 在基板的上表面和周围的振动电极膜的下表面之间形成间隙。 在基板的上表面和振动电极膜的下表面彼此面对的间隙中，设置比间隙的另一部分窄的间隙的狭窄部分。 间隙的狭窄部分线性延伸。
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公开(公告)号：US20170289702A1
公开(公告)日：2017-10-05
申请号：US15509221
申请日：2016-03-10
Applicant: OMRON Corporation
Inventor： Tadashi Inoue
CPC classification number: H04R19/04 , B81B7/0029 , B81B7/0061 , B81B2201/0257 , B81B2203/0127 , B81C1/00309 , H04R7/12 , H04R19/005 , H04R31/00
Abstract: A capacitance type transducer has a substrate with an opening on a surface thereof, a back plate arranged to oppose the opening of the substrate, and a vibrating electrode film arranged to oppose the back plate across a gap between the vibrating electrode film and the back plate. The capacitance type transducer converts a displacement of the vibrating electrode film into a change in capacitance between the vibrating electrode film and the back plate. The capacitance type transducer has a pressure releasing flow channel which is an air flow channel formed by a gap between a part of the vibrating electrode film and a protruding portion integrally provided on the back plate.
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公开(公告)号：US09521491B2
公开(公告)日：2016-12-13
申请号：US14773451
申请日：2013-09-09
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai , Yuki Uchida
CPC classification number: H04R7/18 , B81B7/0006 , B81B2201/0257 , B81B2203/0127 , B81B2203/0307 , B81B2207/07 , H01L2224/48091 , H01L2224/48137 , H01L2924/15151 , H01L2924/16152 , H04R19/005 , H04R19/04 , H04R2410/03 , H01L2924/00014
Abstract: A diaphragm is arranged on the upper surface of a silicon substrate so as to cover a chamber in the silicon substrate. Multiple anchors are provided on the upper surface of the silicon substrate, and the lower surfaces of corner portions of the diaphragm are supported by the anchors. Also, a fixed electrode plate is provided above the diaphragm with an air gap therebetween. In a view from a direction perpendicular to the upper surface of the silicon substrate, the entire length of the outer edge of the diaphragm located between adjacent anchors is located outward of a line segment that circumscribes the edges of the adjacent anchors on the side distant from the center of the diaphragm. Also, one or two or more through-holes are formed in the diaphragm in the vicinity of the anchors.
Abstract translation: 在硅衬底的上表面上设置隔膜以覆盖硅衬底中的室。 在硅基板的上表面上设置有多个锚，并且隔膜的角部的下表面被锚固件支撑。 此外，固定电极板设置在隔膜的上方，其间具有气隙。 在从垂直于硅衬底的上表面的方向看来，位于相邻锚固件之间的隔膜的外边缘的整个长度位于一个线段的外侧，该线段在相邻的锚的边缘远离 隔膜的中心。 此外，在隔膜附近形成有一个或两个以上的通孔。
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公开(公告)号：US09420380B2
公开(公告)日：2016-08-16
申请号：US14426895
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
CPC classification number: H04R19/00 , B81B3/001 , B81B2201/0257 , B81B2203/0127 , H04R7/26 , H04R19/005 , H04R31/003 , H04R2207/021
Abstract: An acoustic transducer has a substrate having an opening in an upper surface thereof, a vibration electrode plate disposed above the substrate, and having an outer edge thereof facing the upper surface of the substrate with a gap therebetween, a fixed electrode plate facing the vibration electrode plate, and a plurality of projections protruding on a lower surface of the outer edge of the vibration electrode plate. The vibration electrode plate covers an upper side of the opening. The plurality of projections are disposed so as to not be positioned along a straight line or a curved line parallel to an edge of the opening in at least a part of one or at least two arrays formed on the lower surface of the outer edge.
Abstract translation: 声换能器具有在其上表面具有开口的基板，设置在基板上方的振动电极板，并且其外边缘面向基板的上表面，其间具有间隙，面向振动电极的固定电极板 板，以及在振动电极板的外缘的下表面上突出的多个突起。 振动电极板覆盖开口的上侧。 多个突起被设置成不沿着形成在外边缘的下表面上的一个或至少两个阵列的至少一部分中的平行于开口的边缘的直线或曲线定位。
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