公开(公告)号：US20250149290A1

公开(公告)日：2025-05-08

申请号：US19009276

申请日：2025-01-03

Applicant: NuFlare Technology, Inc.

Inventor： Koichi ISHII ,  Munehiro OGASAWARA ,  Yosuke ITO ,  Atsushi ANDO

IPC: H01J37/317 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244

Abstract: A multiple-beam image acquisition apparatus includes a stage to mount thereon a target object, a mark member, arranged on the stage, to include a base body having at least a surface made from the first material, plural isolated patterns, formed on the base body, having the same positional relationship as plural irradiation positions, flush in height with the surface of the target object, of plural beams having been determined previously in multiple primary electron beams, and being made from a material different from the first material, and an alignment mark, an electron optical system to irradiate the mark member with the multiple primary electron beams in the state where alignment of the multiple primary electron beams has been performed using the alignment mark, and a multi-detector to detect multiple secondary electron beams emitted from the mark member because the mark member is irradiated with the multiple primary electron beams.