公开(公告)号：US06704091B2

公开(公告)日：2004-03-09

申请号：US10012547

申请日：2001-12-12

Applicant: Norio Moriyama

Inventor： Norio Moriyama

IPC: G03B2742

CPC classification number: G03F7/70483 ,  G03B27/42

Abstract: An exposure apparatus and an exposure method that minimize the range over which exposing light becomes defocused even when a non-level portion is present within each shot are provided. One shot is selected from a plurality of shots (exposure unit areas) set on a wafer (S 50). 49 measurement points are set in the selected shot and the three-dimensional coordinates of each measurement point are determined (S 70). Next, an arithmetic operation is performed using the 49 sets of three-dimensional coordinate data to ascertain an “in-shot focus plane” (S 90). This arithmetic operation may be performed through, for instance, the method of least squares. The extents of positional deviation between the surface of the selected shot and the in-shot focus plane is ascertained and the extents of deviation are stored in memory as “adjustment values” (S 110). An exposure shot to undergo exposure processing is selected and the surface level variation manifesting at the exposure shot is measured. The adjustment values are subtracted from the results of the measurement and exposing light is irradiated on the exposure shot while moving the wafer along the vertical direction in conformance to the result of the subtraction (S 130).

Abstract translation: 提供了即使在每个镜头内存在非水平部分的情况下，曝光装置和曝光方法也使露出光变得散焦的范围最小化。 从设置在晶片上的多个照片（曝光单元区域）中选择一个镜头（S50）。 在所选择的拍摄中设置49个测量点，并且确定每个测量点的三维坐标（S70）。 接下来，使用49组三维坐标数据进行算术运算，以确定“投影对焦平面”（S90）。 该算术运算可以通过例如最小二乘法来进行。 确定所选择的镜头的表面与入射焦点平面之间的位置偏差的程度，并将偏差的范围作为“调整值”存储在存储器中（S110）。 选择进行曝光处理的曝光，并且测量在曝光拍摄时显示的表面水平变化。 从测量结果中减去调整值，并根据减法结果沿着垂直方向移动晶片，曝光光照射在曝光镜头上（S130）。

公开(公告)号：US5496777A

公开(公告)日：1996-03-05

申请号：US293148

申请日：1994-08-19

Applicant: Norio Moriyama

Inventor： Norio Moriyama

IPC: G03F9/00 ,  H01L21/027 ,  H01L21/301 ,  H01L21/68 ,  H01L23/544 ,  H01L21/461

CPC classification number: G03F9/7084 ,  G03F9/7076 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L24/45 ,  H01L24/48 ,  H01L2924/00014 ,  H01L2924/01039 ,  H01L2924/01079 ,  Y10S148/102 ,  Y10S438/975

Abstract: Alignment marks used in different processes are arranged on scribing lines. The scribing lines are used for cutting off individual semiconductor devices formed on a wafer, and the alignment marks have widths which are larger than widths of the scribing lines. The width of areas corresponding to position where alignment marks are formed area enlarged so as to accommodate the alignment marks within the areas. A part of the area a used alignment mark is covered with a new film so that the area is permitted to have a scribing line having a desired width every time a used alignment is generated. A new alignment mark is arranged within other areas where an alignment mark is not formed. In such an arrangement of the alignment marks, the center line of the scribing line is made clear and the area where the semiconductor devices are formed can be made large.

Abstract translation: 在不同工艺中使用的对准标记布置在划线上。 划线用于切割形成在晶片上的各个半导体器件，并且对准标记的宽度大于划线的宽度。 对应于形成对准标记的位置的区域的宽度被扩大，以便容纳区域内的对准标记。 该区域的一部分被使用的对准标记被新的膜覆盖，使得该区域被允许在每次生成使用的对准时具有期望宽度的划线。 在未形成对准标记的其他区域内布置新的对准标记。 在对准标记的这种布置中，划线的中心线变得清晰，并且可以使形成半导体器件的区域变大。

公开(公告)号：US20080112749A1

公开(公告)日：2008-05-15

申请号：US11793004

申请日：2005-12-27

Applicant: Toshihiro Ono ,  Masahiro Kogure ,  Norio Moriyama

Inventor： Toshihiro Ono ,  Masahiro Kogure ,  Norio Moriyama

IPC: B43K29/00 ,  B43K23/02

CPC classification number: B43K25/02 ,  Y10T24/1324 ,  Y10T24/135

Abstract: A writing implement provided with a strong clip is simple in construction and is provided with a coil spring restrained from easily falling off. The writing implement (1, 11, 21) includes a tubular body (2), a clip (3), a pillar (7) formed on the outer surface of the tubular body, a Connecting Structure® connecting the clip and the pillar, a coil spring (4) extended between the inner surface of the clip and the tubular body and capable of loading the clip such that a front end part (3aa) of the inner surface of the clip is pressed elastically against the outer surface of the tubular body, and a projection (5) formed on the outer surface of the tubular body so as to project toward the clip and fitted in the coil spring. Preferably, the clip is provided with a back wall (10) projecting from a back part (3ab) of the inner surface (3a) of the clip and the coil spring is disposed on the front side of the back wall. the projection (5) has a height not smaller than half the length of th coil spring

Abstract translation: 具有坚固夹子的书写工具结构简单，并且具有能够容易脱落的螺旋弹簧。 书写工具（1,11,21）包括管状体（2），夹子（3），形成在管状体的外表面上的柱（7），将夹子和 支柱，螺旋弹簧（4），其在夹子的内表面和管状体之间延伸并且能够装载夹子，使得夹子的内表面的前端部（3aa）弹性地压靠在外表面 以及形成在所述管状体的外表面上以朝向所述夹子突出并安装在所述螺旋弹簧中的突起（5）。 优选地，夹具设置有从夹子的内表面（3a）的后部（3b）突出的后壁（10），并且螺旋弹簧设置在后壁的前侧。 突起（5）的高度不小于螺旋弹簧长度的一半

公开(公告)号：US5915872A

公开(公告)日：1999-06-29

申请号：US981258

申请日：1998-03-02

Applicant: Minoru Machida ,  Norio Moriyama ,  Michiaki Kuramoto

Inventor： Minoru Machida ,  Norio Moriyama ,  Michiaki Kuramoto

IPC: B05C17/005 ,  B43K5/18 ,  B43K7/02 ,  B43K7/10 ,  B43K23/12 ,  B43L19/00 ,  B43M11/08 ,  B43K5/00 ,  B43K7/08

CPC classification number: B43K23/12 ,  B43K5/1881 ,  B43K7/02 ,  B43K7/10 ,  B43L19/0018 ,  B43M11/085

Abstract: A correction pen has a joining mechanism for joining together a front end portion (11) of a barrel (1), and a coupling portion (22) of a head member (2). The joining mechanism is constructed so that an inner cylindrical portion (22b) is pressed in a first coupling section (11a), an annular bead (2a) formed on an outer cylindrical portion (22a) squeezes a second coupling section (11b), and a bead (2c) formed on a step (22c) is pressed against the front end surface (1a) of the first coupling section when an annular ridge (1b) formed on the second coupling section (11b) is fitted in an annular groove (2b) formed in the outer cylindrical portion (22a). A ball holding tube (7) is provided with a ball housing bore (7b) and a connecting bore (7d) formed so that a low step is formed between the ball housing bore and the connecting bore. The edge of the tip of the ball holding tube is rounded. A head member is provided with a spring support portion (2f) for supporting a coil spring (8), provided with slots (2g). A cap releasing member (9) for releasing a cap (5) put on a head portion(222) of a barrel assembly (E) has operating portions disposed on the side surface of the cap so as to be in contact with an inclined portion (2h) of the head member.

Abstract translation: PCT No.PCT / JP97 / 00758 Sec。 371日期1998年3月2日 102（e）1998年3月2日PCT 1997年3月11日PCT公布。 WO97 / 39901 PCT公开号 日期1997年10月30日修正笔具有用于将筒体（1）的前端部分（11）和头部构件（2）的联接部分（22）接合在一起的接合机构。 接合机构被构造成在第一联接部分（11a）中挤压内圆柱形部分（22b），形成在外圆柱形部分（22a）上的环形凸缘（2a）挤压第二联接部分（11b），并且 当形成在第二联接部分（11b）上的环形脊（1b）装配在环形槽中时，形成在台阶（22c）上的胎圈（2c）被压靠在第一联接部分的前端表面（1a） 2b）形成在外筒部（22a）中。 球保持管（7）设置有球容纳孔（7b）和形成为使得在球壳体孔和连接孔之间形成低台阶的连接孔（7d）。 球保持管的尖端的边缘是圆形的。 头部件设置有用于支撑具有槽（2g）的螺旋弹簧（8）的弹簧支撑部分（2f）。 用于释放放置在筒组件（E）的头部（222）上的盖（5）的盖释放构件（9）具有设置在盖的侧表面上的操作部分，以与倾斜部分 （2h）。

公开(公告)号：US5876140A

公开(公告)日：1999-03-02

申请号：US793260

申请日：1997-02-21

Applicant: Michiaki Kuramoto ,  Minoru Machida ,  Norio Moriyama

Inventor： Michiaki Kuramoto ,  Minoru Machida ,  Norio Moriyama

IPC: B43K23/08 ,  A45D34/04 ,  A45D40/00 ,  B05C17/00 ,  B43K23/12 ,  B43L19/00 ,  B65D41/18 ,  B65D41/46 ,  B65D43/26

CPC classification number: B65D41/18 ,  A45D34/042 ,  A45D40/00 ,  B43K23/12 ,  B65D41/46

Abstract: A cap is fitted onto an engagement portion of a main body such as that of a writing implement, paint applicator, make-up applicator, or container. An inner wall of the cap is provided with a flexible operating member having a free end capable of bending inward. An oblique guide surface is formed on at least one of the main body and the cap such that the cap can be separated from the main body by pressing the operating member inward.

Abstract translation: PCT No.PCT / JP96 / 01711 Sec。 371日期1997年2月21日 102（e）1997年2月21日PCT PCT 1996年6月20日PCT公布。 出版物WO97 / 00780 日期1997年1月9日将帽安装在诸如书写工具，涂料涂抹器，化妆涂抹器或容器的主体的接合部分上。 帽的内壁设置有具有能够向内弯曲的自由端的柔性操作构件。 在主体和盖中的至少一个上形成倾斜的引导表面，使得帽可以通过向内按压操作构件而与主体分离。

公开(公告)号：US5467758A

公开(公告)日：1995-11-21

申请号：US290084

申请日：1994-08-15

Applicant: Norio Moriyama ,  Noboru Sugiura

Inventor： Norio Moriyama ,  Noboru Sugiura

IPC: F02P7/03 ,  F02P3/02 ,  F02P15/00 ,  H01L23/36 ,  H01T13/44 ,  F02P7/02

CPC classification number: H01T13/44 ,  F02P3/02 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265

Abstract: In order to mount a power transistor chip, a multilayered member formed by fixing a molybdenum plate to a copper base is flattened by eliminating its deformation in the member caused by heated fixing through elastic working, it is possible to prevent cracking in a power transistor chip or a solder layer caused by the deformation. Especially, it is possible to improve the reliability of an electronic distributing type ignition device mounted on an engine block formed in a unit of an ignition controller and an ignition coil.

Abstract translation: 为了安装功率晶体管芯片，通过消除由于通过弹性加工的加热固定而导致的构件的变形，将钼板固定到铜基底上形成的多层构件被平坦化，可以防止功率晶体管芯片中的开裂 或由变形引起的焊料层。 特别地，可以提高安装在由点火控制器和点火线圈组成的发动机缸体上的电子配线式点火装置的可靠性。

公开(公告)号：US5284124A

公开(公告)日：1994-02-08

申请号：US950703

申请日：1992-09-25

Applicant: Norio Moriyama ,  Noboru Sugiura ,  Noriyoshi Urushiwara

Inventor： Norio Moriyama ,  Noboru Sugiura ,  Noriyoshi Urushiwara

IPC: F02P3/045 ,  F02B1/04 ,  F02P3/05 ,  F02P3/055 ,  F02P11/00 ,  F02P15/08 ,  F02P3/12

CPC classification number: F02P15/08 ,  F02P3/051 ,  F02P3/0552 ,  F02B1/04

Abstract: An ignition system of electronic distribution type for an internal combustion engine with which merits of sharing circuits and elements can be expected with satisfactory result, in which wires of a GND line will not be disconnected by fusion even under a condition of abnormal power supply, and in which the engine will not be stalled even in a mode of simultaneously igniting two cylinders, thus enabling the limp-form traveling and made start-up with simultaneous ignition of two cylinders. To this end, power transistors 20 through 25 for power supply control and feedback control circuits 30 through 35 for limiting currents are respectively provided to control ignition coils 4 through 9 in one-to-one relation. A total of two systems of resistance devices 17a, 17b for detecting currents are provided with each resistance device operating a respective group of three cylinders. The feedback control circuits and the resistance devices for detecting currents are formed on a thick-film circuit board 60. Wires 50a, 50b used for connection between a GND portion on the thickfilm circuit board and an external GND terminal 50 are provided in the same number, i.e., two, as the number of resistance devices. The sequence of power distribution to the cylinders is determined, taking into account the fact that the resistance devices for detecting currents are each allocated to a respective group of three cylinders.

Abstract translation: 具有可以预期共享电路和元件的优点的用于内燃机的电子分配型点火系统具有令人满意的结果，即使在异常供电的情况下，也不会通过熔接将GND线的电线断开，并且 即使在同时点燃两个气缸的情况下发动机也不会停止，从而使得能够同时点燃两个气缸的跛行式行驶和起动。 为此，分别提供用于电源控制的功率晶体管20至25和用于限制电流的反馈控制电路30至35，以一对一的关系控制点火线圈4至9。 设有用于检测电流的两个系统的电阻装置17a，17b，每个电阻装置操作相应的三个气缸组。 用于检测电流的反馈控制电路和用于检测电流的电阻装置形成在厚膜电路板60上。用于连接厚膜电路板上的GND部分和外部GND端子50之间的导线50a，50b以相同的数量提供 ，即两个，作为电阻装置的数量。 考虑到用于检测电流的电阻装置分配给三个气缸的相应组的事实，确定到气缸的功率分配的顺序。

公开(公告)号：US4640888A

公开(公告)日：1987-02-03

申请号：US691977

申请日：1985-01-17

Applicant: Yoshio Itoh ,  Hiroshi Ohtsuka ,  Tadashi Nishimuro ,  Norio Moriyama

Inventor： Yoshio Itoh ,  Hiroshi Ohtsuka ,  Tadashi Nishimuro ,  Norio Moriyama

IPC: G03F9/00 ,  H01L21/027 ,  H01L23/544 ,  G03C5/00

CPC classification number: G03F9/7076 ,  G03F9/00 ,  H01L23/544 ,  H01L2223/54453 ,  H01L2924/0002

Abstract: An alignment mark formed on a semiconductor wafer is disclosed. The mark comprises a mark member provided on a base region and a reflection changing portion provided on the mark member. The reflection changing portion has slightly inclined side walls.

Abstract translation: 公开了一种形成在半导体晶片上的对准标记。 标记包括设置在基部区域上的标记构件和设置在标记构件上的反射改变部分。 反射变化部具有稍微倾斜的侧壁。

公开(公告)号：US07312545B2

公开(公告)日：2007-12-25

申请号：US11173002

申请日：2005-07-05

Applicant: Shoji Sasaki ,  Ryoichi Kobayashi ,  Norio Moriyama ,  Hiroshi Ichige

Inventor： Shoji Sasaki ,  Ryoichi Kobayashi ,  Norio Moriyama ,  Hiroshi Ichige

IPC: H02K11/00

CPC classification number: H05K7/1432 ,  B62D5/0406 ,  H02K11/33

Abstract: An electric power steering drive system provided with a motor with its torque pulsation reduced, and a controller characterized by excellent manufacturability.The stator core of a motor is composed of an annular back core and a plurality of teeth created separately from the back core and secured on the inner periphery of the back core. An 8-pole/9-slot, 10-pole/9-slot or 10-pole/12-slot relationship is found between the number of the magnets of a rotor (number of poles) and the number of slots. The diameter of the stator coil is 1.0 mm or more. A motor controller comprises a power module, a conductor module and a control module. The terminal of the power module and the bus bar of the conductor module are connected by welding, whereas the terminal of the power module and terminal of the control module are connected by soldering.

Abstract translation: 具有减小扭矩脉动的电动机的电动助力转向驱动系统，以及制造性优异的控制器。 电动机的定子铁芯由环形后芯和与后芯分开产生并固定在后芯的内周上的多个齿组成。 在转子的磁体数（极数）和插槽数之间发现了8极/ 9槽，10极/ 9槽或10极/ 12槽的关系。 定子线圈的直径为1.0mm以上。 电机控制器包括电源模块，导体模块和控制模块。 电源模块的端子和导体模块的母线通过焊接连接，而电源模块的端子和控制模块的端子通过焊接连接。

公开(公告)号：US5684333A

公开(公告)日：1997-11-04

申请号：US571513

申请日：1995-12-13

Applicant: Norio Moriyama

Inventor： Norio Moriyama

IPC: G03F9/00 ,  H01L21/027 ,  H01L21/301 ,  H01L21/68 ,  H01L23/544 ,  H01F1/03 ,  H01L21/302 ,  H01L29/06

CPC classification number: G03F9/7084 ,  G03F9/7076 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L24/45 ,  H01L24/48 ,  H01L2924/00014 ,  H01L2924/01039 ,  H01L2924/01079 ,  Y10S148/102 ,  Y10S438/975

Abstract: Alignment marks used in different processes are arranged on scribing lines. The scribing lines are used for cutting off individual semiconductor devices formed on a wafer, and the alignment marks have widths which are larger than widths of the scribing lines. The width of areas corresponding to positions where alignment marks are formed are larger so as to accommodate the alignment marks within the areas. A part of the area of a used alignment mark is covered with a new film so that the area is permitted to have a scribing line having a desired width every time a used alignment is generated. A new alignment mark is arranged within other areas where an alignment mark is not formed. In such an arrangement of the alignment marks, the center line of the scribing line is made clear, and the area where the semiconductor devices are formed can be made large.

Abstract translation: 在不同工艺中使用的对准标记布置在划线上。 划线用于切割形成在晶片上的各个半导体器件，并且对准标记的宽度大于划线的宽度。 对应于形成对准标记的位置的区域的宽度较大，以便容纳区域内的对准标记。 使用的对准标记的区域的一部分被新的膜覆盖，使得每次生成使用的对准时允许该区域具有期望宽度的划线。 在未形成对准标记的其他区域内布置新的对准标记。 在对准标记的这种布置中，划线的中心线被清除，并且可以使形成半导体器件的区域变大。