公开(公告)号：US09030668B2

公开(公告)日：2015-05-12

申请号：US13794353

申请日：2013-03-11

申请人： Nikon Corporation

发明人： Eric Peter Goodwin ,  Daniel G. Smith

IPC分类号： G01B9/02 ,  G01B11/14 ,  G01B11/06 ,  G03F9/00

CPC分类号： G01B11/14 ,  G01B11/0608 ,  G01B2210/56 ,  G03F9/7049 ,  G03F9/7088

摘要： Fringe patterns at first and second spatial frequencies are projected onto a work piece surface and a reference surface, respectively. An image of the projected fringe patterns is obtained and a measurement signal associated with work piece displacements and a reference signal are obtained based on the first and second spatial frequencies. The image of the projected fringe patterns can exhibit substantial or complete overlap of the fringe patterns at the first and second spatial frequencies, and the overlapping patterns can be separated based on the spatial frequencies. Fringe pattern shifts at one or both of the first and second spatial frequencies can be used to adjust a pattern transfer system to permit accurate pattern transfer.

摘要翻译： 在第一和第二空间频率处的边缘图案分别投影到工件表面和参考表面上。 获得投影条纹图案的图像，并且基于第一和第二空间频率获得与工件位移相关联的测量信号和参考信号。 投影条纹图案的图像可以在第一和第二空间频率处显示条纹图案的实质或完全重叠，并且可以基于空间频率来分离重叠图案。 在第一和第二空间频率中的一个或两个处的边缘图案移位可用于调整图案转印系统以允许精确的图案转印。

公开(公告)号：US20140063491A1

公开(公告)日：2014-03-06

申请号：US14010375

申请日：2013-08-26

申请人： Nikon Corporation

发明人： Daniel G. Smith ,  W. Thomas Novak

IPC分类号： G01J1/00

CPC分类号： G01J1/00 ,  G01S7/481 ,  G01S7/497

摘要： Boresight and other pointing errors are detected based on a monitor beam formed by diverting a portion of a probe beam. The monitor beam is directed to a position sensitive photodetector, and the optical power received at the position sensitive photodetector is used to estimate or correct such pointing errors.

摘要翻译： 基于通过转移探测光束的一部分而形成的监视光束来检测视轴和其他指向误差。 监视器光束被引导到位置敏感光电检测器，并且在位置敏感光电检测器处接收的光功率用于估计或校正这种指向误差。

公开(公告)号：US20140063481A1

公开(公告)日：2014-03-06

申请号：US13830169

申请日：2013-03-14

申请人： NIKON CORPORATION

发明人： Daniel G. Smith

IPC分类号： G02B17/08 ,  G02B27/28 ,  G01B11/14

CPC分类号： G02B17/0876 ,  G01B11/14 ,  G01S7/4814 ,  G01S17/08 ,  G02B27/283

摘要： Focus assemblies for laser radar are situated to receive a measurement beam that is focused at or in the focus assemblies. In some examples, focus assemblies include a corner cube and a return reflector, and the measurement beam is focused on, at, or within the corner cube or return reflector. A polarizing beam splitter and a quarter wave plate can be situated so that an input measurement beam and an output measurement beam can be separated.

摘要翻译： 用于激光雷达的聚焦组件位于接收聚焦在聚焦组件中或焦点组件中的测量光束。 在一些示例中，聚焦组件包括角立方体和返回反射器，并且测量光束聚焦在角立方体或返回反射器的正上方或内侧。 可以设置偏振分束器和四分之一波片，使得可以分离输入测量光束和输出测量光束。

公开(公告)号：US20130241762A1

公开(公告)日：2013-09-19

申请号：US13840686

申请日：2013-03-15

申请人： NIKON CORPORATION

发明人： Daniel G. Smith ,  Alexander Cooper ,  Eric Peter Goodwin ,  Yuichi Takigawa ,  Alec Robertson

IPC分类号： G02B26/10 ,  G01S13/86 ,  G01B11/24 ,  G01C3/08

CPC分类号： G02B26/10 ,  G01B11/24 ,  G01C3/08 ,  G01S7/4812 ,  G01S7/4817 ,  G01S13/865 ,  G01S17/42 ,  G02B5/122 ,  G02B26/103

摘要： A light beam is scanned, for use in laser radar and other uses, by an optical system of which an example includes a beam-shaping optical system that includes a first movable optical element and a second movable optical element. The first optical element forms and directs an optical beam along a nominal propagation axis from the beam-shaping optical system to a target, and the second optical element includes a respective actuator by which the second optical element is movable relative to the first optical element. A controller is coupled at least to the actuator of the second optical element and is configured to induce motion, by the actuator, of the second optical element to move the optical beam, as incident on the target, relative to the nominal propagation axis.

摘要翻译： 通过光学系统扫描光束，用于激光雷达和其它用途，该系统的示例包括包括第一可移动光学元件和第二可移动光学元件的光束整形光学系统。 第一光学元件沿着标称传播轴从光束整形光学系统形成并引导光束到目标，并且第二光学元件包括相应致动器，第二光学元件可以通过该致动器相对于第一光学元件移动。 控制器至少耦合到第二光学元件的致动器，并且被配置为通过致动器引起第二光学元件的运动，以相对于标称传播轴线将入射到靶上的光束移动。

公开(公告)号：US09638799B2

公开(公告)日：2017-05-02

申请号：US13840658

申请日：2013-03-15

申请人： Nikon Corporation ,  Nikon Metrology NV

发明人： Eric Peter Goodwin ,  Daniel G. Smith ,  Alexander Cooper ,  Mina A. Rezk ,  Anthony R. Slotwinski ,  Thomas M. Hedges

IPC分类号： G01S17/10 ,  G02B26/10 ,  G01S17/32 ,  G01S7/481 ,  G01S7/491 ,  G01S17/66

CPC分类号： G01S17/102 ,  G01S7/4812 ,  G01S7/4817 ,  G01S7/4818 ,  G01S7/4917 ,  G01S17/325 ,  G01S17/66 ,  G02B26/101 ,  G02B26/108

摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

公开(公告)号：US20150015896A1

公开(公告)日：2015-01-15

申请号：US14462910

申请日：2014-08-19

申请人： Nikon Corporation

发明人： Michael Sogard ,  Daniel G. Smith ,  David M. Williamson

IPC分类号： G01B11/14

CPC分类号： G01B11/14 ,  G01B11/026 ,  G01B21/045 ,  G03F7/00

摘要： An exemplary method involves, in a system comprising a tool that performs a task on a workpiece, a method for determining displacement of the workpiece relative to the tool. Respective displacements of loci of at least a region of the workpiece are mapped using a Goos-Hänchen-insensitive (GH-insensitive) displacement sensor to produce a first set of physical displacement data for the region. Also mapped are respective displacements, from the tool, of the loci using a GH sensitive sensor to produce a second set of optical displacement data for the region. Goodness of fit (GOF) is determined of the second set of data with the first set. According to the GOF, respective GH-correction (GHC) coefficients are determined for at least one locus of the region. When measuring displacement of the at least one locus in the region relative to the tool, the respective GHC coefficient is applied to the measured displacement to reduce an error that otherwise would be present in the measured displacement due to a GH effect.

摘要翻译： 一种示例性方法涉及在包括在工件上执行任务的工具的系统中的一种用于确定工件相对于工具的位移的方法。 使用Goos-Hänchen不敏感（GH不敏感）位移传感器映射工件的至少一个区域的轨迹的相对位移，以产生该区域的第一组物理位移数据。 还映射了来自使用GH敏感传感器的轨迹的位置的相应位移，以产生该区域的第二组光学位移数据。 第一组数据的第二组数据确定适合度（GOF）。 根据GOF，针对该区域的至少一个轨迹确定各自的GH校正（GHC）系数。 当测量区域中的至少一个轨迹相对于工具的位移时，将相应的GHC系数应用于测量的位移，以减少否则将由于GH效应而在测量的位移中存在的误差。

公开(公告)号：US20150268344A1

公开(公告)日：2015-09-24

申请号：US13841021

申请日：2013-03-15

申请人： NIKON CORPORATION ,  NIKON METROLOGY NV

发明人： Mina A. Rezk ,  Anthony R. Slotwinski ,  Daniel G. Smith ,  Eric Peter Goodwin ,  Alexander Cooper ,  Thomas M. Hedges

IPC分类号： G01S17/32 ,  G01B9/02 ,  G01S7/481

CPC分类号： G01S17/325 ,  G01B9/02007 ,  G01S7/4812 ,  G01S7/4817 ,  G01S7/4818 ,  G01S7/4917 ,  G01S7/497 ,  G01S17/42 ,  G01S17/66

摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

摘要翻译： 激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。 聚焦光学组件包括用于调节测量光束聚焦的角立方体。 基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。 本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。 在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

公开(公告)号：US08842296B2

公开(公告)日：2014-09-23

申请号：US13801415

申请日：2013-03-13

申请人： Nikon Corporation

发明人： Michael Sogard ,  Daniel G. Smith ,  David M. Williamson

IPC分类号： G01B11/14 ,  G01B11/02 ,  G01B21/04 ,  G03F7/00

CPC分类号： G01B11/14 ,  G01B11/026 ,  G01B21/045 ,  G03F7/00

摘要： An exemplary method involves, in a system comprising a tool that performs a task on a workpiece, a method for determining displacement of the workpiece relative to the tool. Respective displacements of loci of at least a region of the workpiece are mapped using a Goos-Hänchen-insensitive (GH-insensitive) displacement sensor to produce a first set of physical displacement data for the region. Also mapped are respective displacements, from the tool, of the loci using a GH sensitive sensor to produce a second set of optical displacement data for the region. Goodness of fit (GOF) is determined of the second set of data with the first set. According to the GOF, respective GH-correction (GHC) coefficients are determined for at least one locus of the region. When measuring displacement of the at least one locus in the region relative to the tool, the respective GHC coefficient is applied to the measured displacement to reduce an error that otherwise would be present in the measured displacement due to a GH effect.

摘要翻译： 一种示例性方法涉及在包括在工件上执行任务的工具的系统中的一种用于确定工件相对于工具的位移的方法。 使用Goos-Hänchen不敏感（GH不敏感）位移传感器映射工件的至少一个区域的轨迹的相对位移，以产生该区域的第一组物理位移数据。 还映射了来自使用GH敏感传感器的轨迹的位置的相应位移，以产生该区域的第二组光学位移数据。 第一组数据的第二组数据确定适合度（GOF）。 根据GOF，针对该区域的至少一个轨迹确定各自的GH校正（GHC）系数。 当测量区域中的至少一个轨迹相对于工具的位移时，将相应的GHC系数应用于测量的位移，以减少否则将由于GH效应而在测量的位移中存在的误差。

公开(公告)号：US20130293900A1

公开(公告)日：2013-11-07

申请号：US13801415

申请日：2013-03-13

申请人： NIKON CORPORATION

发明人： Michael Sogard ,  Daniel G. Smith ,  David M. Williamson

IPC分类号： G01B11/14

CPC分类号： G01B11/14 ,  G01B11/026 ,  G01B21/045 ,  G03F7/00

摘要： An exemplary method involves, in a system comprising a tool that performs a task on a workpiece, a method for determining displacement of the workpiece relative to the tool. Respective displacements of loci of at least a region of the workpiece are mapped using a Goos-Hänchen-insensitive (GH-insensitive) displacement sensor to produce a first set of physical displacement data for the region. Also mapped are respective displacements, from the tool, of the loci using a GH sensitive sensor to produce a second set of optical displacement data for the region. Goodness of fit (GOF) is determined of the second set of data with the first set. According to the GOF, respective GH-correction (GHC) coefficients are determined for at least one locus of the region. When measuring displacement of the at least one locus in the region relative to the tool, the respective GHC coefficient is applied to the measured displacement to reduce an error that otherwise would be present in the measured displacement due to a GH effect.

公开(公告)号：US10180496B2

公开(公告)日：2019-01-15

申请号：US13841115

申请日：2013-03-15

申请人： Nikon Corporation ,  Nikon Metrology NV

发明人： Daniel G. Smith ,  Eric Peter Goodwin ,  Anthony R. Slotwinski ,  Mina A. Rezk ,  Alexander Cooper ,  Thomas M. Hedges

IPC分类号： G01C3/08 ,  G01S17/32 ,  G01S17/66 ,  G01S17/42 ,  G01S7/481 ,  G01S7/497 ,  G01S7/491 ,  G01B9/02

摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.