公开(公告)号：US10739277B2

公开(公告)日：2020-08-11

申请号：US16094547

申请日：2016-04-21

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Yoav Berlatzky ,  Valery Deich ,  Dror Shafir ,  Danny Grossman

IPC: G01N21/956 ,  G01N21/88 ,  G01N21/95 ,  G01B9/02

Abstract: A measurement system is presented for use in metrology measurements on patterned samples. The system comprises: at least one light source device configured to generate broadband light, at least one detection device configured to provide spectral information of detected light, and an optical system. The optical system comprises at least an oblique channel system for directing incident light generated by the light source(s) along an oblique illumination channel onto a measurement plane, on which a sample is to be located, and directing broadband light specularly reflected from the sample along a collection channel to the detection device(s). The optical system further comprises an interferometric unit comprising a beam splitting/combining device and a reference reflector device. The beam splitting/combining device is accommodated in the illumination and collection channels and divides light propagating in the illumination channel into sample and reference light beams propagating in sample and reference paths, and combines reflected reference and sample paths into the collection channel to thereby create a spectral interference pattern on a detection plane.

公开(公告)号：US10161885B2

公开(公告)日：2018-12-25

申请号：US15300768

申请日：2015-04-12

Applicant: Nova Measuring Instruments Ltd.

Inventor： Gilad Barak ,  Danny Grossman ,  Dror Shafir ,  Yoav Berlatzky ,  Yanir Hainick

IPC: G01N21/956 ,  G01N9/02 ,  G01B11/06 ,  G01N21/88 ,  G01B9/02

Abstract: A measurement system for use in measuring parameters of a patterned sample is presented. The system comprises: a broadband light source; an optical system configured as an interferometric system; a detection unit; and a control unit. The interferometric system defines illumination and detection channels having a sample arm and a reference arm comprising a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms; the detection unit comprises a configured and operable for detecting a combined light beam formed by a light beam reflected from said reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by at least two spectral interference signatures. The control unit is configured and operable for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.

公开(公告)号：US11029258B2

公开(公告)日：2021-06-08

申请号：US16231718

申请日：2018-12-24

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Gilad Barak ,  Danny Grossman ,  Dror Shafir ,  Yoav Berlatzky ,  Yanir Hainick

IPC: G01N21/956 ,  G01B9/02 ,  G01B11/06 ,  G01N21/88

Abstract: A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.