公开(公告)号：US20150377799A1

公开(公告)日：2015-12-31

申请号：US14769170

申请日：2014-02-20

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Gilad BARAK ,  Dror SHAFIR ,  Yanir HAINICK ,  Shahar GOV

IPC: G01N21/956 ,  G01N21/95

CPC classification number: G01N21/956 ,  G01B2210/56 ,  G01N21/9501 ,  G03F7/70625

Abstract: A method and system are presented for use in optical measurements on patterned structures. The method comprises performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure. The measurements include detection of light reflected from said at least part of the at least two different regions comprising interference of at least two complex electric fields reflected from said at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.

Abstract translation: 提出了一种用于图案化结构的光学测量的方法和系统。 该方法包括对具有测量点的结构执行多个光学测量，所述测量点被配置为提供对从至少部分地覆盖结构的至少两个不同区域的照明点反射的光的检测。 所述测量包括从所述至少两个不同区域的所述至少一部分反射的光的检测，包括从所述至少两个不同区域的所述至少一部分反射的至少两个复电场的干涉，并因此指示相位响应 的结构，携带关于结构的属性的信息。

公开(公告)号：US20180128753A1

公开(公告)日：2018-05-10

申请号：US15866768

申请日：2018-01-10

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Gilad BARAK ,  Dror SHAFIR ,  Yanir HAINICK ,  Shahar GOV

IPC: G01N21/956 ,  G01N21/95 ,  G03F7/20

CPC classification number: G01N21/956 ,  G01B2210/56 ,  G01N21/9501 ,  G03F7/70616 ,  G03F7/70625

Abstract: A method and system are presented for use in optical measurements on patterned structures. The method comprises performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure. The measurements include detection of light reflected from said at least part of the at least two different regions comprising interference of at least two complex electric fields reflected from said at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.