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公开(公告)号：US11237196B2
公开(公告)日：2022-02-01
申请号：US17041106
申请日：2018-12-17
发明人： Daiki Morimitsu
摘要： A resistance measurement device for measuring sheet resistance of an electrically conductive film that is long in one direction includes a probe unit disposed to face the electrically conductive film; a scanning unit that allows the probe unit to scan in a cross direction crossing the one direction over both a conveyance region and a non-conveyance region of the electrically conductive film; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the probe unit. The arithmetic unit has a memory that memorizes a reference voltage measured in the non-conveyance region, and corrects, based on the reference voltage, an actual voltage measured by allowing the probe unit to scan in the cross direction in the conveyance region.
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公开(公告)号：US20210102982A1
公开(公告)日：2021-04-08
申请号：US17041106
申请日：2018-12-17
发明人： Daiki Morimitsu
摘要： A resistance measurement device for measuring sheet resistance of an electrically conductive film that is long in one direction includes a probe unit disposed to face the electrically conductive film; a scanning unit that allows the probe unit to scan in a cross direction crossing the one direction over both a conveyance region and a non-conveyance region of the electrically conductive film; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the probe unit. The arithmetic unit has a memory that memorizes a reference voltage measured in the non-conveyance region, and corrects, based on the reference voltage, an actual voltage measured by allowing the probe unit to scan in the cross direction in the conveyance region.
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公开(公告)号：US20210108308A1
公开(公告)日：2021-04-15
申请号：US17041089
申请日：2018-12-17
摘要： A film manufacturing apparatus includes a lamination unit that laminates a first layer at one side in a thickness direction of a long-length substrate film to produce a one-sided laminated film, and that laminates a second layer at the other side in the thickness direction of the one-sided laminated film to produce a double-sided laminated film; a conveyance unit; a marking unit; a measurement unit; a detection unit, disposed at an upstream side in the conveyance direction of the measurement unit; and an arithmetic unit that obtains physical properties of the first layer and the second layer based on the physical property at a first position in the one-sided laminated film and the physical property at a second position in the double-sided laminated film. The arithmetic unit defines, with a mark as a reference, a position substantially the same as the first position to be the second position.
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公开(公告)号：US20210011065A1
公开(公告)日：2021-01-14
申请号：US17041155
申请日：2018-12-17
发明人： Daiki Morimitsu
摘要： A resistance measurement device for measuring sheet resistance of an electrically conductive film being long in one direction includes two probes disposed to face each other in spaced apart relation so as to allow the electrically conductive film to be interposed therebetween without contacting with the electrically conductive film; a scanning unit that allows the two probes to scan in a cross direction crossing the one direction; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the two probes. The arithmetic unit includes a memory that memorizes a reference voltage measured by allowing the two probes to scan in the cross direction without interposing the electrically conductive film between the probes. The arithmetic unit corrects an actual voltage by allowing the two probes to scan in the cross direction with the electrically conductive film being interposed between the probes.
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公开(公告)号：US11789053B2
公开(公告)日：2023-10-17
申请号：US17041155
申请日：2018-12-17
发明人： Daiki Morimitsu
CPC分类号： G01R27/08 , C23C14/54 , G01R35/00 , G01R31/002
摘要： A resistance measurement device for measuring sheet resistance of an electrically conductive film being long in one direction includes two probes disposed to face each other in spaced apart relation so as to allow the electrically conductive film to be interposed therebetween without contacting with the electrically conductive film; a scanning unit that allows the two probes to scan in a cross direction crossing the one direction; and an arithmetic unit that calculates a sheet resistance of the electrically conductive film based on a voltage measured by the two probes. The arithmetic unit includes a memory that memorizes a reference voltage measured by allowing the two probes to scan in the cross direction without interposing the electrically conductive film between the probes. The arithmetic unit corrects an actual voltage by allowing the two probes to scan in the cross direction with the electrically conductive film being interposed between the probes.
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公开(公告)号：US11384424B2
公开(公告)日：2022-07-12
申请号：US17041089
申请日：2018-12-17
IPC分类号： C23C14/56 , C23C14/52 , C23C14/34 , C23C14/54 , G01R27/02 , H01B5/14 , H01J37/32 , H01J37/34
摘要： A film manufacturing apparatus includes a lamination unit that laminates a first layer at one side in a thickness direction of a long-length substrate film to produce a one-sided laminated film, and that laminates a second layer at the other side in the thickness direction of the one-sided laminated film to produce a double-sided laminated film; a conveyance unit; a marking unit; a measurement unit; a detection unit, disposed at an upstream side in the conveyance direction of the measurement unit; and an arithmetic unit that obtains physical properties of the first layer and the second layer based on the physical property at a first position in the one-sided laminated film and the physical property at a second position in the double-sided laminated film. The arithmetic unit defines, with a mark as a reference, a position substantially the same as the first position to be the second position.
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