Abstract:
In a method for making a multilayer board with a cavity, a composite comprising a plurality of dielectric layers and at least one release layer provided therebetween are formed. Then, a part of the composite is removed to form a cavity having a bottom face defined by the release layer. This method facilitates production of multilayer ceramic boards with cavities having high planarity.
Abstract:
A multilayer ceramic substrate three-dimensionally including functional elements is provided. The functional elements, for example, a capacitor element, an inductor element or a resistor element, are prepared using plate-like sintered plates produced by firing ceramic functional material beforehand. These functional elements are included in an unsintered composite laminate. The unsintered composite laminate is provided with green layers for the substrate, restriction layers including sintering-resistant materials, and wiring conductors, and when it is fired, the green layers for substrate are prevented from shrinking in the direction of primary faces due to the function of the restriction layers. Therefore, the unsintered composite laminate can be fired without problems while the functional elements are included, and mutual diffusion does not occur between the functional elements and the green layers for substrate, so that the characteristics of the functional elements can be maintained even after firing.
Abstract:
In a ceramic green-sheet stack to be fired to form a multilayered ceramic substrate having a cavity, a shrinkage-reducing pad is formed along a boundary interface between first ceramic green sheets having an opening for defining a cavity, and second ceramic green sheets having no opening. The shrinkage-reducing pad is exposed on the entire periphery of the inner peripheral surface of the cavity at the bottom end of the inner peripheral surface. The shrinkage-reducing pad contains a glass component, and serves to reduce shrinkage stress produced at the boundary interface between the first and second ceramic green sheets during the firing process.
Abstract:
A method of manufacturing a multilayer ceramic device includes forming first and second glass-ceramic green sheets from a ceramic material containing glass by laminating the material to form a green sheet laminate having a cavity with an open surface at one surface thereof. Then, shrinkage-suppressing layers which are formed with shrinkage-suppressing inorganic material having a higher sintering temperature than the ceramic material are applied over the surfaces of the green sheet laminate. Thus, a composite laminate is obtained. Then, the composite laminate is pressed in the laminating direction such that the bottom portion of the cavity receives the same amount of pressure as the surrounding region of the cavity via an opening. Then, the composite laminate is fired, and the shrinkage-suppressing layers are removed.