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10 条记录 (耗时 0.056 秒)

    Scanning electron microscope
    1.
    发明申请
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US20050145791A1

    公开(公告)日：2005-07-07

    申请号：US11000522

    申请日：2004-12-01

    申请人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    发明人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    IPC分类号： H01J37/22 ,  G01N23/225 ,  G21K7/00 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/22

    摘要： In a scanning electron microscope, slimming is reduced by reducing a frame count. As the frame count is reduced, the amount of detected secondary electrons decreases, so that a probe current amount is increased to emit an increased amount of detected secondary electrons. A primary electron beam is scanned on a sample, a histogram is created, and the histogram is second-order differentiated to calculate a level of halftone at which a sample image changes in contrast, and to calculate the probe current amount. By adjusting the frame count suitable for the calculated probe current amount, and the contrast suitable for the sample image, the slimming of the sample is limited, and a highly visible sample image is generated for length measurement.

    摘要翻译： 在扫描电子显微镜中，通过减少帧计数来减少减肥。 当帧数减少时，检测到的二次电子的量减少，使得探针电流量增加以发射检测到的二次电子的量增加。 在样品上扫描初级电子束，创建直方图，并将直方图进行二阶微分，以计算样本图像在对比度下变化的半色调水平，并计算探头电流量。 通过调整适合于计算出的探针电流量的帧数和适用于样本图像的对比度，限制了样本的减肥，并且为长度测量产生高度可见的样本图像。

    Scanning electron microscope
    2.
    发明申请
    Scanning electron microscope 有权

    公开(公告)号：US20060108527A1

    公开(公告)日：2006-05-25

    申请号：US11324311

    申请日：2006-01-04

    申请人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    发明人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    IPC分类号： G21K7/00

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/22

    摘要： In a scanning electron microscope, slimming is reduced by reducing a frame count. As the frame count is reduced, the amount of detected secondary electrons decreases, so that a probe current amount is increased to emit an increased amount of detected secondary electrons. A primary electron beam is scanned on a sample, a histogram is created, and the histogram is second-order differentiated to calculate a level of halftone at which a sample image changes in contrast, and to calculate the probe current amount. By adjusting the frame count suitable for the calculated probe current amount, and the contrast suitable for the sample image, the slimming of the sample is limited, and a highly visible sample image is generated for length measurement.

    Scanning electron microscope
    3.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US07375329B2

    公开(公告)日：2008-05-20

    申请号：US11324311

    申请日：2006-01-04

    申请人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    发明人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    IPC分类号： H01J37/26 ,  G01B11/00 ,  G06K9/00

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/22

    摘要： In a scanning electron microscope, slimming is reduced by reducing a frame count. As the frame count is reduced, the amount of detected secondary electrons decreases, so that a probe current amount is increased to emit an increased amount of detected secondary electrons. A primary electron beam is scanned on a sample, a histogram is created, and the histogram is second-order differentiated to calculate a level of halftone at which a sample image changes in contrast, and to calculate the probe current amount. By adjusting the frame count suitable for the calculated probe current amount, and the contrast suitable for the sample image, the slimming of the sample is limited, and a highly visible sample image is generated for length measurement.

    摘要翻译： 在扫描电子显微镜中，通过减少帧计数来减少减肥。 当帧数减少时，检测到的二次电子的量减少，使得探针电流量增加以发射检测到的二次电子的量增加。 在样品上扫描初级电子束，创建直方图，并将直方图进行二阶微分，以计算样本图像在对比度下变化的半色调水平，并计算探头电流量。 通过调整适合于计算出的探针电流量的帧数和适用于样本图像的对比度，限制了样本的减肥，并且为长度测量产生高度可见的样本图像。

    Scanning electron microscope
    4.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US06995370B2

    公开(公告)日：2006-02-07

    申请号：US11000522

    申请日：2004-12-01

    申请人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    发明人： Masashi Fujita ,  Hiroki Kawada ,  Satoru Iwama

    IPC分类号： G21K7/00 ,  G06K9/00 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/22

    摘要： In a scanning electron microscope, slimming is reduced by reducing a frame count. As the frame count is reduced, the amount of detected secondary electrons decreases, so that a probe current amount is increased to emit an increased amount of detected secondary electrons. A primary electron beam is scanned on a sample, a histogram is created, and the histogram is second-order differentiated to calculate a level of halftone at which a sample image changes in contrast, and to calculate the probe current amount. By adjusting the frame count suitable for the calculated probe current amount, and the contrast suitable for the sample image, the slimming of the sample is limited, and a highly visible sample image is generated for length measurement.

    摘要翻译： 在扫描电子显微镜中，通过减少帧计数来减少减肥。 当帧数减少时，检测到的二次电子的量减少，使得探针电流量增加以发射检测到的二次电子的量增加。 在样品上扫描初级电子束，创建直方图，并将直方图进行二阶微分，以计算样本图像在对比度下变化的半色调水平，并计算探头电流量。 通过调整适合于计算出的探针电流量的帧数和适用于样本图像的对比度，限制了样本的减肥，并且为长度测量产生高度可见的样本图像。

    Observation Method With Electron Beam
    5.
    发明申请
    Observation Method With Electron Beam 有权
    电子束观测方法

    公开(公告)号：US20080265160A1

    公开(公告)日：2008-10-30

    申请号：US11871687

    申请日：2007-10-12

    申请人： Yuki OJIMA ,  Satoru Iwama ,  Akira Ikegami

    发明人： Yuki OJIMA ,  Satoru Iwama ,  Akira Ikegami

    IPC分类号： G01N23/04

    CPC分类号： G01N23/04

    摘要： For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a range to be observed is stabilized by pre-charging a range on which to irradiate a beam of electrons while changing the range on a step-by-step basis.

    摘要翻译： 为了重复观察高纵横比的接触孔的底部，通过预充电一个范围来稳定要观察的图案和要观察的范围附近的静电电荷的电位 其在逐步改变范围的同时照射电子束。

    Observation method with electron beam
    7.
    发明授权
    Observation method with electron beam 有权
    电子束观测方法

    公开(公告)号：US07723681B2

    公开(公告)日：2010-05-25

    申请号：US11871687

    申请日：2007-10-12

    申请人： Yuki Ojima ,  Satoru Iwama ,  Akira Ikegami

    发明人： Yuki Ojima ,  Satoru Iwama ,  Akira Ikegami

    IPC分类号： G01N23/04

    CPC分类号： G01N23/04

    摘要： For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a range to be observed is stabilized by pre-charging a range on which to irradiate a beam of electrons while changing the range on a step-by-step basis.

    摘要翻译： 为了重复观察高纵横比的接触孔的底部，通过预充电一个范围来稳定要观察的图案和要观察的范围附近的静电电荷的电位 其在逐步改变范围的同时照射电子束。