公开(公告)号：US08035071B2

公开(公告)日：2011-10-11

申请号：US12116241

申请日：2008-05-07

申请人： Masami Makuuchi ,  Ritsurou Orihashi ,  Masayoshi Takahashi ,  Wen Li ,  Kengo Imagawa ,  Takahiro Jingu

发明人： Masami Makuuchi ,  Ritsurou Orihashi ,  Masayoshi Takahashi ,  Wen Li ,  Kengo Imagawa ,  Takahiro Jingu

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2201/1241

摘要： The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.

摘要翻译： 检测部具有：减法模块，用于当参考电压产生模块向检测系统施加参考电压时，从检测系统的数据计算校正数据; 用于保持校正数据的数据保持模块; 用于对检测数据进行校正的加法模块; 比较模块，用于将检测数据与切换数据进行比较; 以及选择器，用于根据比较模块的输出来切换包括经过校正的数据的检测系统的数据。

公开(公告)号：US20130286387A1

公开(公告)日：2013-10-31

申请号：US13996613

申请日：2011-11-25

申请人： Masami Makuuchi ,  Takahiro Jingu

发明人： Masami Makuuchi ,  Takahiro Jingu

IPC分类号： G01N21/95

CPC分类号： G01N21/9501

摘要： When the intensity of scattering light from a defect on a sample becomes very low according to the diameter of the defect, the dark noise from a sensor device itself accounts which a large proportion of the detected signal outputted from the sensor and thus it is difficult to detect minute defects. Furthermore, since a laser light source is pulsed into oscillation, pulse components from the laser light source are superimposed on the detected signal outputted from the sensor, and therefore it is difficult to detect defects with high accuracy. The present invention is a defect inspection device having irradiation means which producing pulsed operation and irradiating a surface of a sample with a laser beam, detection means which detecting scattering light generated at the surface of the sample in response to the irradiation provided by the irradiation means, and a processing portion which generating a delay signal based on the laser beam emitted by the irradiation means and processing the scattering light detected by the detection means using the delay signal.

摘要翻译： 当来自样品的缺陷的散射光的强度根据缺陷的直径变得非常低时，来自传感器装置本身的暗噪声考虑到从传感器输出的检测信号的大部分，因此难以 检测微小缺陷。 此外，由于激光光源被脉冲振荡，所以来自激光光源的脉冲成分叠加在从传感器输出的检测信号上，因此难以高精度地检测出缺陷。 本发明是一种具有产生脉冲操作并用激光束照射样品表面的照射装置的检测装置，检测装置响应于由照射装置提供的照射而检测在样品表面产生的散射光 以及处理部，其基于由照射装置发射的激光束产生延迟信号，并使用延迟信号处理由检测装置检测到的散射光。

公开(公告)号：US07990529B2

公开(公告)日：2011-08-02

申请号：US12266663

申请日：2008-11-07

申请人： Masami Makuuchi ,  Ritsuro Orihashi ,  Takahiro Jingu

发明人： Masami Makuuchi ,  Ritsuro Orihashi ,  Takahiro Jingu

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/8851 ,  G01N21/94

摘要： In a foreign matter inspection apparatus for a semiconductor wafer, a PMT which detects reflection light, an amplifier which amplifies a signal detected by the PMT and in which response characteristics of amplification are controlled by a control signal, an A/D converter which converts the signal amplified by the amplifier into a predetermined code and outputs the code, a control circuit which generates a control signal based on information of the semiconductor wafer having a correlation with the reflection light, and a data processing circuit which detects a foreign matter on the semiconductor wafer based on the code output from the A/D converter are provided.

摘要翻译： 在半导体晶片的异物检查装置中，检测反射光的PMT，放大由PMT检测出的信号的放大器，其中由控制信号控制放大的响应特性的放大器，A / D转换器 信号由放大器放大成预定码并输出该代码;基于与反射光相关的半导体晶片的信息产生控制信号的控制电路;以及检测半导体上的异物的数据处理电路 提供了基于A / D转换器的代码输出的晶片。

公开(公告)号：US08908171B2

公开(公告)日：2014-12-09

申请号：US13996613

申请日：2011-11-25

申请人： Masami Makuuchi ,  Takahiro Jingu

发明人： Masami Makuuchi ,  Takahiro Jingu

IPC分类号： G01N21/00 ,  G01N21/95

CPC分类号： G01N21/9501

摘要： When the intensity of scattering light from a defect on a sample becomes very low according to the diameter of the defect, the dark noise from a sensor device itself accounts which a large proportion of the detected signal outputted from the sensor and thus it is difficult to detect minute defects. Furthermore, since a laser light source is pulsed into oscillation, pulse components from the laser light source are superimposed on the detected signal outputted from the sensor, and therefore it is difficult to detect defects with high accuracy. The present invention is a defect inspection device having irradiation means which producing pulsed operation and irradiating a surface of a sample with a laser beam, detection means which detecting scattering light generated at the surface of the sample in response to the irradiation provided by the irradiation means, and a processing portion which generating a delay signal based on the laser beam emitted by the irradiation means and processing the scattering light detected by the detection means using the delay signal.

摘要翻译： 当来自样品的缺陷的散射光的强度根据缺陷的直径变得非常低时，来自传感器装置本身的暗噪声考虑到从传感器输出的检测信号的大部分，因此难以 检测微小缺陷。 此外，由于激光光源被脉冲振荡，所以来自激光光源的脉冲成分叠加在从传感器输出的检测信号上，因此难以高精度地检测出缺陷。 本发明是一种具有产生脉冲操作并用激光束照射样品表面的照射装置的检测装置，检测装置响应于由照射装置提供的照射而检测在样品表面产生的散射光 以及处理部，其基于由照射装置发射的激光束产生延迟信号，并使用延迟信号处理由检测装置检测到的散射光。

公开(公告)号：US20080278717A1

公开(公告)日：2008-11-13

申请号：US12116241

申请日：2008-05-07

申请人： Masami Makuuchi ,  Ritsurou Orihashi ,  Masayoshi Takahashi ,  Wen Li ,  Kengo Imagawa ,  Takahiro Jingu

发明人： Masami Makuuchi ,  Ritsurou Orihashi ,  Masayoshi Takahashi ,  Wen Li ,  Kengo Imagawa ,  Takahiro Jingu

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2201/1241

摘要： The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.

摘要翻译： 检测部具有：减法模块，用于当参考电压产生模块向检测系统施加参考电压时，从检测系统的数据计算校正数据; 用于保持校正数据的数据保持模块; 用于对检测数据进行校正的加法模块; 比较模块，用于将检测数据与切换数据进行比较; 以及选择器，用于根据比较模块的输出来切换包括经过校正的数据的检测系统的数据。

公开(公告)号：US20120313650A1

公开(公告)日：2012-12-13

申请号：US13580273

申请日：2010-12-01

申请人： Hiroshi Kawaguchi ,  Minori Noguchi ,  Kenji Aiko ,  Masami Makuuchi

发明人： Hiroshi Kawaguchi ,  Minori Noguchi ,  Kenji Aiko ,  Masami Makuuchi

IPC分类号： G01R27/26

CPC分类号： H01M10/04 ,  H01M4/04 ,  H01M4/13 ,  H01M10/0409 ,  H01M10/052 ,  H01M10/058

摘要： An inspection device for detecting small foreign bodies is provided with a first electrode and a second electrode disposed on either side of the inspection target, a power source connected to the aforementioned first electrode, a conveyance speed control unit for controlling the conveyance speed of the aforementioned inspection target, a current detection unit which, connected to the aforementioned second electrode, detects currents generated by changes in the static capacitance formed between the aforementioned first electrode and the aforementioned second electrode, and a defect detection unit which detects defects on the basis of the aforementioned current. Furthermore, the aforementioned second electrode rotates in the direction opposite of the conveyance direction of the aforementioned inspection target. Furthermore, the aforementioned power source includes a DC or an AC power source.

摘要翻译： 用于检测小异物的检查装置设置有设置在检查对象的两侧的第一电极和第二电极，连接到上述第一电极的电源，用于控制上述第一电极的输送速度的输送速度控制单元 检测对象，连接到上述第二电极的电流检测单元，检测由上述第一电极和上述第二电极之间形成的静电电容的变化而产生的电流;以及缺陷检测单元，其基于 上述电流。 此外，上述第二电极沿与上述检查对象的输送方向相反的方向旋转。 此外，上述电源包括DC或AC电源。

公开(公告)号：US20100033862A1

公开(公告)日：2010-02-11

申请号：US12503901

申请日：2009-07-16

申请人： Masayoshi TAKAHASHI ,  Masami Makuuchi ,  Shinji Homma ,  Yoshihiro Sakurai

发明人： Masayoshi TAKAHASHI ,  Masami Makuuchi ,  Shinji Homma ,  Yoshihiro Sakurai

IPC分类号： G11B27/36

CPC分类号： G11B20/1816 ,  G11B5/455 ,  G11B5/4555 ,  G11B2020/1281 ,  G11B2220/2516

摘要： The present invention provides a technique for converting burst data to digital data, applying FFT operation to 2n (n is an integer) pieces of digital data in response to any start signal synchronized with a sector signal, applying a window function centered around data corresponding to a frequency of a burst data signal component before the FFT operation, and performing head positioning based on a result as the detected value of the burst data.

摘要翻译： 本发明提供了一种用于将突发数据转换为数字数据的技术，响应于与扇区信号同步的任何起始信号将FFT运算应用于2n（n为整数）数字数据，应用以对应于 在FFT操作之前的突发数据信号分量的频率，并且基于结果执行头位置定位作为突发数据的检测值。

公开(公告)号：US07358953B2

公开(公告)日：2008-04-15

申请号：US10714943

申请日：2003-11-18

申请人： Masami Makuuchi ,  Kengo Imagawa ,  Norio Chujo ,  Ritsuro Orihashi ,  Yoshitomo Arai ,  Atsushi Obuchi

发明人： Masami Makuuchi ,  Kengo Imagawa ,  Norio Chujo ,  Ritsuro Orihashi ,  Yoshitomo Arai ,  Atsushi Obuchi

IPC分类号： G09G3/36

CPC分类号： G09G3/006 ,  G09G3/3648 ,  G09G5/006 ,  G09G5/39 ,  G09G2310/027 ,  Y10S345/904

摘要： A semiconductor device having a liquid crystal driving circuit is disclosed. The driving circuit includes a digital functional unit and an analog functional unit. The digital functional unit is comprised of a display controller and a display data storage RAM, while the analog functional unit is made up of a gradation voltage generating circuit and a gradation voltage selecting circuit. The digital and analog function units are functionally divided from each other and testing of the digital function and testing of the analog function unit are performed in an overlapping manner independently from each other.

摘要翻译： 公开了一种具有液晶驱动电路的半导体器件。 驱动电路包括数字功能单元和模拟功能单元。 数字功能单元包括显示控制器和显示数据存储RAM，而模拟功能单元由灰度电压产生电路和灰度电压选择电路组成。 数字和模拟功能单元在功能上彼此划分，并且以彼此独立的重叠方式执行数字功能的测试和模拟功能单元的测试。

公开(公告)号：US07132997B2

公开(公告)日：2006-11-07

申请号：US10695864

申请日：2003-10-30

申请人： Kouichi Uesaka ,  Masami Makuuchi ,  Kenichi Shinbo

发明人： Kouichi Uesaka ,  Masami Makuuchi ,  Kenichi Shinbo

IPC分类号： H01Q21/00 ,  H01Q11/12

CPC分类号： H01Q9/0421 ,  H01Q9/045

摘要： Multiple monopole antennas or loop antennas for generating electromagnetic fields whose phases become opposite to the phase of an electromagnetic field that the conventional single monopole antenna or loop antenna generates are located in proximity to the conventional single monopole antenna or loop antenna such that the components of the electromagnetic field in directions other than a probe-desired direction will be cancelled out.

摘要翻译： 用于产生电磁场的多个单极天线或环形天线，其相位与常规单极天线或环形天线产生的电磁场的相位相反，位于传统的单个单极天线或环形天线附近，使得 除了探头所需方向以外的方向的电磁场将被抵消。

公开(公告)号：US20050122300A1

公开(公告)日：2005-06-09

申请号：US10981715

申请日：2004-11-05

申请人： Masami Makuuchi ,  Norio Chujo ,  Kengo Imagawa ,  Ritsuro Orihashi ,  Yoshitomo Arai

发明人： Masami Makuuchi ,  Norio Chujo ,  Kengo Imagawa ,  Ritsuro Orihashi ,  Yoshitomo Arai

IPC分类号： G01R31/316 ,  G01R31/28 ,  G02F1/133 ,  G09G3/00 ,  G09G3/20 ,  G09G3/36 ,  H01L21/822 ,  H01L27/04

CPC分类号： G09G3/006 ,  G09G3/3688

摘要： A semiconductor device according to the present invention has a liquid crystal driver circuit, and when gray-scale voltage thereof is tested, the gray-scale voltage (Vx) generated in a gray-scale voltage generator circuit provided therein is compared with reference voltage (e.g., Vx+ΔV) generated for testing the gray-scale voltage and the test result is output as binarized voltage from external terminals of the semiconductor device. This can speed up the gray-scale voltage test even in the case of higher gray scale in the liquid crystal driver circuit or increased number of output terminals of the semiconductor device. Therefore, it becomes possible to reduce the time and cost required for the test.

摘要翻译： 根据本发明的半导体器件具有液晶驱动电路，并且当其灰度电压被测试时，在其中提供的灰度级电压发生器电路中产生的灰度电压（Vx）与参考电压（ 例如，用于测试灰度电压而生成的Vx + DeltaV）和测试结果作为来自半导体器件的外部端子的二值化电压输出。 即使在液晶驱动电路中较高的灰度级或半导体器件的输出端数量增加的情况下，也可以加快灰度电压测试。 因此，可以减少测试所需的时间和成本。