Optical modulator
    1.
    发明授权

    公开(公告)号:US10295849B2

    公开(公告)日:2019-05-21

    申请号:US15796170

    申请日:2017-10-27

    Abstract: An optical modulator may include at least one ground electrode. The optical modulator may include at least one signal electrode parallel to the at least one ground electrode. The optical modulator may include at least one waveguide parallel to the at least one ground electrode and the at least one signal electrode. The optical modulator may include a first substrate disposed underneath the at least one ground electrode and the at least one signal electrode relative to a surface of the optical modulator. The optical modulator may include a second substrate disposed underneath at least a portion of the first substrate relative to the surface of the optical modulator. The optical modulator may include a floating conductor disposed between the first substrate and the second substrate.

    Wafer prober to facilitate testing of a wafer using nanosecond pulses

    公开(公告)号:US11181572B2

    公开(公告)日:2021-11-23

    申请号:US16917124

    申请日:2020-06-30

    Abstract: A wafer testing system may comprise a chuck, a wafer carrier, a cathode plate, and a probe card. The chuck may be configured to hold the wafer carrier. The wafer carrier may be configured to hold a wafer on a surface of the wafer carrier, wherein the surface of the wafer carrier comprises one or more contact features protruding from the surface of the wafer carrier. The cathode plate may be configured to provide an electrical connection between the wafer carrier and the probe card, wherein a portion of a surface of the cathode plate is configured to be disposed on the one or more contact features of the wafer carrier. The probe card may be configured to test, using one or more probes associated with the probe card, the wafer when the wafer is on the surface of the wafer carrier.

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