Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
    1.
    发明申请
    Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors 有权
    用于在高g范围加速度传感器中实现最大化,双向和对称阻尼的质量

    公开(公告)号:US20110041608A1

    公开(公告)日:2011-02-24

    申请号:US12806415

    申请日:2010-08-12

    IPC分类号: G01C19/56

    摘要: A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G-range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies.

    摘要翻译: 提出了一种新的高G范围阻尼加速度传感器,其具有针对最大化,双向和对称阻尼优化的检测质量,以适应​​超过数千G的加速度范围。 为了实现最大的双向和对称阻尼,高G范围加速度传感器被设计为在最大化其表面积的同时在检验质量中具有最小量的质量。 这种高G范围阻尼加速度传感器可以应用于在相当高的频率下需要阻尼(或抑制振铃)的任何应用。

    Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
    2.
    发明授权
    Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors 有权
    用于在高g范围加速度传感器中实现最大化,双向和对称阻尼的质量

    公开(公告)号:US08191420B2

    公开(公告)日:2012-06-05

    申请号:US12806415

    申请日:2010-08-12

    IPC分类号: G01P15/08 G01P15/10 G01P15/12

    摘要: A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G-range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies.

    摘要翻译: 提出了一种新的高G范围阻尼加速度传感器,其具有针对最大化,双向和对称阻尼优化的检测质量,以适应​​超过数千G的加速度范围。 为了实现最大的双向和对称阻尼,高G范围加速度传感器被设计为在最大化其表面积的同时在检验质量中具有最小量的质量。 这种高G范围阻尼加速度传感器可以应用于在相当高的频率下需要阻尼(或抑制振铃)的任何应用。

    Low-G MEMS acceleration switch
    3.
    发明授权
    Low-G MEMS acceleration switch 有权
    低G MEMS加速开关

    公开(公告)号:US08779534B2

    公开(公告)日:2014-07-15

    申请号:US13289993

    申请日:2011-11-04

    申请人: Tom Kwa

    发明人: Tom Kwa

    IPC分类号: H01H50/10

    摘要: A motion-sensitive low-G MEMS acceleration switch, which is a MEMS switch that closes at low-g acceleration (e.g., sensitive to no more than 10 Gs), is proposed. Specifically, the low-G MEMS acceleration switch has a base, a sensor wafer with one or more proofmasses, an open circuit that includes two fixed electrodes, and a contact plate. During acceleration, one or more of the proofmasses move towards the base and connects the two fixed electrodes together, resulting in a closing of the circuit that detects the acceleration. Sensitivity to low-G acceleration is achieved by proper dimensioning of the proofmasses and one or more springs used to support the proofmasses in the switch.

    摘要翻译: 提出了一种运动敏感的低G MEMS加速度开关,其是以低g加速度(例如,不超过10G)敏感地闭合的MEMS开关。 具体地说,低G MEMS加速开关具有基座,具有一个或多个校准的传感器晶片,包括两个固定电极的开路和接触板。 在加速期间,一个或多个校对物向基座移动,并将两个固定电极连接在一起,导致检测加速度的电路闭合。 通过适当的尺寸标定和一个或多个弹簧用于支撑开关中的校样,实现对低G加速度的敏感性。

    Multi-layer device
    4.
    发明授权
    Multi-layer device 有权
    多层设备

    公开(公告)号:US07696083B2

    公开(公告)日:2010-04-13

    申请号:US11373520

    申请日:2006-03-10

    IPC分类号: H01L21/4763

    摘要: A multi-layer device is provided for connecting to an electrical unit enclosed within the multi-layer device. A first wafer has a first outer terminal and a second outer terminal with etch pits. A first insulator has a first surface bonded to the first wafer and a first inner terminal located on an opposing second surface. A second wafer has a first surface bonded to the second surface of the first insulating layer and includes a pillar electrically connected to the first wafer. A second insulator has a first surface bonded to a second surface of the second wafer and a second inner terminal located on the first surface of the second insulator. The first outer terminal is electrically connected to the first inner terminal, and the second outer terminal is electrically connected to the second inner terminal. The first and second outer terminals are adapted for connecting to an electrical unit. A reinforcement is positioned adjacent to at least one of the first and second outer and, inner terminals to provide for reinforcement of the at least one of the first and second outer and inner terminals.

    摘要翻译: 提供多层设备用于连接到封装在多层设备内的电气单元。 第一晶片具有第一外部端子和具有蚀刻凹坑的第二外部端子。 第一绝缘体具有接合到第一晶片的第一表面和位于相对的第二表面上的第一内部端子。 第二晶片具有接合到第一绝缘层的第二表面的第一表面,并且包括电连接到第一晶片的柱。 第二绝缘体具有接合到第二晶片的第二表面的第一表面和位于第二绝缘体的第一表面上的第二内部端子。 第一外部端子电连接到第一内部端子,并且第二外部端子电连接到第二内部端子。 第一和第二外部端子适于连接到电气单元。 加强件邻近第一和第二外部和内部端子中的至少一个定位,以提供第一和第二外部端子和内部端子中的至少一个的加强。

    Weatherized direct-mount absolute pressure sensor
    7.
    发明授权
    Weatherized direct-mount absolute pressure sensor 有权
    减压直接安装绝对压力传感器

    公开(公告)号:US08371160B2

    公开(公告)日:2013-02-12

    申请号:US12639665

    申请日:2009-12-16

    IPC分类号: G01M9/00

    摘要: A piezoresistive sensor assembly is provided that has a flex circuit having at least one air flow aperture formed therein. A sensor die is coupled to an absolute support and the flex circuit. The sensor die has a diaphragm that deflects in response to air flow that flows through the air flow aperture and is incident on the diaphragm. The sensor die includes one or more gages positioned on or in the diaphragm.

    摘要翻译: 提供一种压阻传感器组件,其具有形成在其中的至少一个气流孔的柔性电路。 传感器管芯耦合到绝对支架和柔性电路。 传感器模具具有响应于流过空气流通孔并入射在隔膜上的空气流而偏转的隔膜。 传感器模具包括位于隔膜上或隔膜中的一个或多个计量器。

    Weatherized direct-mount absolute pressure sensor
    8.
    发明申请
    Weatherized direct-mount absolute pressure sensor 有权
    减压直接安装绝对压力传感器

    公开(公告)号:US20110138900A1

    公开(公告)日:2011-06-16

    申请号:US12639665

    申请日:2009-12-16

    IPC分类号: G01M9/06

    摘要: A piezoresistive sensor assembly is provided that has a flex circuit having at least one air flow aperture formed therein. A sensor die is coupled to an absolute support and the flex circuit. The sensor die has a diaphragm that deflects in response to air flow that flows through the air flow aperture and is incident on the diaphragm. The sensor die includes one or more gages positioned on or in the diaphragm.

    摘要翻译: 提供一种压阻传感器组件,其具有形成在其中的至少一个气流孔的柔性电路。 传感器管芯耦合到绝对支架和柔性电路。 传感器模具具有响应于流过空气流通孔并入射在隔膜上的空气流而偏转的隔膜。 传感器模具包括位于隔膜上或隔膜中的一个或多个计量器。

    Multi-layer device
    9.
    发明申请
    Multi-layer device 有权
    多层设备

    公开(公告)号:US20070212818A1

    公开(公告)日:2007-09-13

    申请号:US11373520

    申请日:2006-03-10

    IPC分类号: H01L21/00

    摘要: A multi-layer device is provided for connecting to an electrical unit enclosed within the multi-layer device. A first wafer has a first outer terminal and a second outer terminal with etch pits. A first insulator has a first surface bonded to the first wafer and a first inner terminal located on an opposing second surface. A second wafer has a first surface bonded to the second surface of the first insulating layer and includes a pillar electrically connected to the first wafer. A second insulator has a first surface bonded to a second surface of the second wafer and a second inner terminal located on the first surface of the second insulator. The first outer terminal is electrically connected to the first inner terminal, and the second outer terminal is electrically connected to the second inner terminal. The first and second outer terminals are adapted for connecting to an electrical unit. A reinforcement is positioned adjacent to at least one of the first and second outer and, inner terminals to provide for reinforcement of the at least one of the first and second outer and inner terminals.

    摘要翻译: 提供多层设备用于连接到封装在多层设备内的电气单元。 第一晶片具有第一外部端子和具有蚀刻凹坑的第二外部端子。 第一绝缘体具有接合到第一晶片的第一表面和位于相对的第二表面上的第一内部端子。 第二晶片具有接合到第一绝缘层的第二表面的第一表面,并且包括电连接到第一晶片的柱。 第二绝缘体具有接合到第二晶片的第二表面的第一表面和位于第二绝缘体的第一表面上的第二内部端子。 第一外部端子电连接到第一内部端子,并且第二外部端子电连接到第二内部端子。 第一和第二外部端子适于连接到电气单元。 加强件邻近第一和第二外部和内部端子中的至少一个定位,以提供第一和第二外部端子和内部端子中的至少一个的加强。