公开(公告)号：US08263002B1

公开(公告)日：2012-09-11

申请号：US12465043

申请日：2009-05-13

申请人： Lee Chow ,  Oleg Lupan ,  Guangyu Chai

发明人： Lee Chow ,  Oleg Lupan ,  Guangyu Chai

IPC分类号： G01N27/04

CPC分类号： G01N27/127

摘要： The nanofabrication of a hydrogen gas nanosensor device from single straight and branched, tripod shaped ZnO nanorods using in-situ lift-out technique, performed in the chamber of a focused ion beam (FIB) system is disclosed. Self-assembled ZnO branched nanorods have been grown by a cost-effective and fast synthesis route using an aqueous solution deposition method and rapid thermal processing. The properties of the ZnO nanorod structures were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy and micro-Raman spectroscopy. High quality ZnO nanorods were obtained with a 90% success rate for building nanodevices. The fabricated nanosensor can gauge 150 ppm hydrogen gas in the air at room temperature. The nanosensor has selectivity for other gases such as oxygen, methane, carbon monoxide and liquid propane gas. The ZnO nanorod sensors of the present invention also operate at low power of less than 5 microwatts.

摘要翻译： 公开了在聚焦离子束（FIB）系统的腔室中使用原位提取技术从单个直的和分支的三脚架形ZnO纳米棒对氢气纳米传感器装置的纳米制造。 通过使用水溶液沉积法和快速热处理，通过成本有效且快速的合成路线生长自组装的ZnO支化纳米棒。 通过X射线衍射，扫描电子显微镜，能量色散X射线光谱，透射电子显微镜和微拉曼光谱分析ZnO纳米棒结构的性质。 获得了高质量的ZnO纳米棒，其建筑纳米装置的成功率为90％。 制造的纳米传感器可以在室温下测量空气中的150 ppm氢气。 纳米传感器对其他气体如氧气，甲烷，一氧化碳和液体丙烷气体具有选择性。 本发明的ZnO纳米棒传感器也以小于5微瓦的低功率工作。

公开(公告)号：US07750297B1

公开(公告)日：2010-07-06

申请号：US11716258

申请日：2007-03-09

申请人： Lee Chow ,  Guangyu Chai ,  Thomas Schenkel

发明人： Lee Chow ,  Guangyu Chai ,  Thomas Schenkel

IPC分类号： H01J37/26 ,  G21K5/04

CPC分类号： G21K1/025 ,  G21K1/02 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/84 ,  Y10S977/842 ,  Y10S977/849

摘要： Apparatus, methods, systems and devices for fabricating individual CNT collimators. Micron size fiber coated CNT samples are synthesized with chemical vapor deposition method and then the individual CNT collimators are fabricated with focused ion beam technique. Unfocused electron beams are successfully propagated through the CNT collimators. The CNT nano-collimators are used for applications including single ion implantation and in high-energy physics, and allow rapid, reliable testing of the transmission of CNT arrays for transport of molecules.

摘要翻译： 用于制造单个CNT准直仪的装置，方法，系统和装置。 用化学气相沉积法合成微米尺寸纤维涂层的CNT样品，然后用聚焦离子束技术制造单个CNT准直仪。 未聚焦的电子束通过CNT准直器成功传播。 CNT纳米准直器用于包括单离子注入和高能物理学的应用，并且可以快速，可靠地测试CNT阵列传输分子的传输。

公开(公告)号：US07879308B1

公开(公告)日：2011-02-01

申请号：US11098247

申请日：2005-04-04

申请人： Leo Chow ,  Guangyu Chai

发明人： Leo Chow ,  Guangyu Chai

IPC分类号： D01F9/12

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B32/162 ,  C01B32/168 ,  C01B2202/06 ,  C01B2202/36 ,  H01J1/304 ,  H01J2201/30469 ,  Y10S977/742 ,  Y10S977/745 ,  Y10S977/752 ,  Y10S977/842 ,  Y10S977/843 ,  Y10S977/847 ,  Y10S977/89 ,  Y10S977/891 ,  Y10S977/939

摘要： A multi-wall carbon nanotube field emitter and method of producing the same is disclosed. The multi-wall carbon nanotube field emitter comprises a nanotube having a diameter between approximately 1 nanometer and approximately 100 nanometers with an integrally attached outer layer of graphitic material that is approximately 1 micrometer to approximately 10 micrometers in diameter attached to an etched tip of a wire. The tip of the wire is etched to form a tip and a slot is fabricated in the tip for alignment and attachment of the carbon nanotube. A focus ion beam is used to weld the nanotube to the tungsten tip for electron field emission applications.

摘要翻译： 公开了一种多壁碳纳米管场发射体及其制造方法。 多壁碳纳米管场发射器包括直径在大约1纳米到大约100纳米之间的纳米管，具有整体连接的石墨材料外层，其直径约1微米到约10微米，附着到线的蚀刻尖端 。 电线的尖端被蚀刻以形成尖端，并且在尖端中制造槽以对准和附着碳纳米管。 使用聚焦离子束将纳米管焊接到钨尖端用于电子场发射应用。