公开(公告)号：US20220376458A1

公开(公告)日：2022-11-24

申请号：US17664183

申请日：2022-05-19

Applicant: Lasertec Corporation

Inventor： Jun SAKUMA ,  Akihiro ANDO

IPC: H01S3/10 ,  G02F1/355 ,  H01S5/14 ,  H01S3/081 ,  H01S3/108

Abstract: A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.

公开(公告)号：US20150244142A1

公开(公告)日：2015-08-27

申请号：US14626005

申请日：2015-02-19

Applicant: Lasertec Corporation

Inventor： Kiwamu TAKEHISA ,  Jun SAKUMA

IPC: H01S5/00 ,  G01N21/88 ,  G02F1/35

CPC classification number: H01S5/0092 ,  G01N21/8806 ,  G01N21/956 ,  G02F1/353 ,  G02F2001/354 ,  G03F1/84 ,  G03F7/7065 ,  H01S3/1611 ,  H01S3/1618

Abstract: A laser light source device having a simple configuration and an inspection device are provided. A laser light source device 200 according to an exemplary embodiment in accordance with the present invention has a repetition frequency of 1 MHz or higher, and includes fundamental wave generation means 201 for oscillating laser light including a fundamental wave with its center wavelength being included in one of first to fourth wavelength bands, and means 205 for generating a sixth harmonic of pulsed laser light extracted from the fundamental wave generation means 201. The first wavelength band is 1064.326 nm to 1064.511 nm. The second wavelength band is 1064.757 nm to 1064.852 nm. The third wavelength band is 1063.805 nm to 1063.878 nm. Further, the fourth wavelength band is 1063.962 nm to 1064.031 nm.

Abstract translation: 提供具有简单结构的激光光源装置和检查装置。 根据本发明的示例性实施例的激光源装置200具有1MHz或更高的重复频率，并且包括用于振荡包括其中心波长的基波的激光的基波产生装置201， 第一波长带和第四波长带，以及用于产生从基波发生装置201提取的脉冲激光的六次谐波的装置205.第一波长带为1064.326nm至1064.511nm。 第二波长带为1064.757nm至1064.852nm。 第三波长带为1063.805nm至1063.878nm。 此外，第四波长带为1063.962nm至1064.031nm。

公开(公告)号：US20230417684A1

公开(公告)日：2023-12-28

申请号：US18154679

申请日：2023-01-13

Applicant: Lasertec Corporation

Inventor： Jun SAKUMA ,  Ryotaro MORI

IPC: G01N21/956

CPC classification number: G01N21/956 ,  G01N2201/0636

Abstract: A light-source apparatus, an inspection apparatus, and an adjustment method capable of facilitating the adjustment of the temperature of a BBO crystal are provided. A light-source apparatus according to the present disclosure includes a first light source configured to generate visible light, a first external resonator including a plurality of optical mirrors, a BBO crystal disposed in the first external resonator, capable of generating UV light in a wavelength range of 233 nm to 236 nm, the UV light being a second harmonic of the visible light, a one- or two-dimensional semiconductor sensor disposed near a far-field image plane formed through an optical element provided on an optical path of the UV light, and a calculation unit configured to calculate a representative position of a light intensity distribution detected by the semiconductor sensor.

公开(公告)号：US20200089079A1

公开(公告)日：2020-03-19

申请号：US16575122

申请日：2019-09-18

Applicant: Lasertec Corporation

Inventor： Akihiro ANDO ,  Jun SAKUMA

IPC: G02F1/35 ,  G02F1/355 ,  G02F1/37

Abstract: A wavelength conversion apparatus and a wavelength conversion method that can stably output wavelength converted light for a long time are provided. A wavelength conversion apparatus 100 according to an aspect of the present disclosure includes a casing 10, a wavelength conversion element 25 disposed inside the casing 10 and configured to convert a wavelength of incident light and output light with the converted wavelength, a first port 11 that introduces a first gas containing 99.9% or more of a nitrogen gas inside the casing 10, and a second port 12 that introduces a second gas containing 1% or more of an oxygen gas.