公开(公告)号：US20230417684A1

公开(公告)日：2023-12-28

申请号：US18154679

申请日：2023-01-13

申请人： Lasertec Corporation

发明人： Jun SAKUMA ,  Ryotaro MORI

IPC分类号： G01N21/956

CPC分类号： G01N21/956 ,  G01N2201/0636

摘要： A light-source apparatus, an inspection apparatus, and an adjustment method capable of facilitating the adjustment of the temperature of a BBO crystal are provided. A light-source apparatus according to the present disclosure includes a first light source configured to generate visible light, a first external resonator including a plurality of optical mirrors, a BBO crystal disposed in the first external resonator, capable of generating UV light in a wavelength range of 233 nm to 236 nm, the UV light being a second harmonic of the visible light, a one- or two-dimensional semiconductor sensor disposed near a far-field image plane formed through an optical element provided on an optical path of the UV light, and a calculation unit configured to calculate a representative position of a light intensity distribution detected by the semiconductor sensor.