公开(公告)号：US20040108461A1

公开(公告)日：2004-06-10

申请号：US10310613

申请日：2002-12-05

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Pradip Mitra

IPC: G01J005/02 ,  H01L025/00

CPC classification number: G01J3/36 ,  G01J3/26 ,  G01J5/10 ,  G01J5/60 ,  H01L31/101 ,  H01L31/1035

Abstract: A multi-spectral photodetector for detecting two or more different bands of infrared radiation is described. The photodetector includes a diffractive resonant optical cavity that resonates at the two or more infrared radiation bands of interest. By detecting infrared radiation at two or more discrete applied biases and by generating a spectral response curve for the photodetector at each of these biases, the response to each of the individual bands of infrared radiation can be calculated. The response to each band of infrared radiation can be found by deconvolving the response at each bias. The photodetector finds many uses including military and medical imaging applications and can cover a broad portion of the infrared spectrum.

Abstract translation: 描述了用于检测两个或更多个不同的红外线辐射带的多光谱光电检测器。 光电检测器包括在感兴趣的两个或更多个红外辐射带处共振的衍射谐振光学腔。 通过在两个或更多个离散施加的偏压下检测红外辐射，并且通过在这些偏压中的每一个处产生光电检测器的光谱响应曲线，可以计算对每个红外辐射的各个带的响应。 通过在每个偏压下解卷积反应可以发现对每个红外辐射带的响应。 光电探测器发现了许多用途，包括军事和医学成像应用，并且可以覆盖广泛的红外光谱。

公开(公告)号：US20020148963A1

公开(公告)日：2002-10-17

申请号：US09836036

申请日：2001-04-17

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Lewis T. Claiborne ,  Pradip Mitra

IPC: G03G005/16

CPC classification number: H01L27/14649 ,  H01L27/14625 ,  H01L31/02327 ,  H01L31/0296 ,  H01L31/035281 ,  Y02E10/50

Abstract: A diffraction grating coupled infrared photodetector for providing high performance detection of infrared radiation is described. The photodetector includes a three-dimensional diffractive resonant optical cavity formed by a diffraction grating that resonates over a range of infrared radiation wavelengths. By placing a limited number of p/n junctions throughout the photodetector, the photodetector thermal noise is reduced due to the reduction in junction area. By retaining signal response and reducing the noise, the sensitivity increases at a given operating temperature when compared to traditional photovoltaic and photoconductive infrared photodetectors up to the background limit. The photodetector device design can be used with a number of semiconductor material systems, can form one- and two-dimensional focal plane arrays, and can readily be tuned for operation in the long wavelength infrared and the very long wavelength infrared where sensitivity and noise improvements are most significant.

Abstract translation: 描述了用于提供红外辐射的高性能检测的衍射光栅耦合红外光电检测器。 光电检测器包括由在一定范围的红外辐射波长上谐振的衍射光栅形成的三维衍射谐振光学腔。 通过在整个光电检测器中放置有限数量的p / n结，由于接合面积的减少，光电检测器的热噪声被降低。 通过保持信号响应和降低噪声，与传统的光电和光电导红外光电探测器相比，在给定的工作温度下，灵敏度提高到背景极限。 光电检测器件的设计可以与许多半导体材料系统一起使用，可以形成一维和二维焦平面阵列，并且可以容易地调整为在长波长红外线和非常长波长的红外线中操作，其中灵敏度和噪声改善 是最重要的。

公开(公告)号：US20030011840A1

公开(公告)日：2003-01-16

申请号：US09903330

申请日：2001-07-11

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Pradip Mitra

IPC: H04J014/02

CPC classification number: H01S3/2383 ,  H04J14/02

Abstract: An array of diffraction grating coupled infrared photodetectors is coupled to corresponding high-speed amplifiers for creating a multiple channel high speed receiver for an optical communication system. Each photodetector includes a three-dimensional diffractive resonant optical cavity formed by a diffraction grating that resonates over a narrow range of wavelengths. By creating different resonant optical cavities, the receiver detects each optical channel individually, thereby simplifying receiver design. The receiver finds ready application in systems based upon high power CO2 lasers and semiconductor lasers such as quantum cascade lasers allowing extremely long line of sight communication, such as between satellites. Other applications include ship to ship or ground to missile communications. These applications will benefit from increased jamming resistance and security.

Abstract translation: 衍射光栅耦合的红外光电检测器的阵列被耦合到相应的高速放大器，用于为光通信系统创建多通道高速接收器。 每个光电检测器包括由在窄波长范围上谐振的衍射光栅形成的三维衍射谐振光学腔。 通过创建不同的谐振光学腔，接收器分别检测每个光信道，从而简化了接收机设计。 接收机在基于高功率CO2激光器和半导体激光器（例如量子级联激光器）的系统中找到可用的应用，允许非常长的视距通信，例如在卫星之间。 其他应用包括船舶运输或地面进行导弹通信。 这些应用将受益于增加的抗干扰性和安全性。

公开(公告)号：US20040108564A1

公开(公告)日：2004-06-10

申请号：US10310246

申请日：2002-12-05

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Pradip Mitra

IPC: H01L031/00

CPC classification number: H01L27/14652 ,  H01L27/14649 ,  H01L31/0304 ,  Y02E10/544

Abstract: A multi-spectral super-pixel photodetector for detecting four or more different bands of infrared radiation is described. The super-pixel photodetector includes two or more sub-pixel photodetectors, each of which includes a diffractive resonant optical cavity that resonates at two or more infrared radiation bands of interest. By detecting infrared radiation at two or more different applied biases and by generating a spectral response curve for each of the sub-pixel photodetectors at each of these biases, the response to each of the individual bands of infrared radiation can be calculated. The response to each band of infrared radiation can be found by deconvolving the response at each bias. The super-pixel photodetector finds use in military and medical imaging applications and can cover a broad portion of the infrared spectrum.

Abstract translation: 描述了用于检测四个或更多个不同的红外辐射带的多光谱超像素光电检测器。 超像素光电检测器包括两个或更多个子像素光电检测器，每个子像素光电检测器包括在感兴趣的两个或更多个红外辐射带处共振的衍射谐振光学腔。 通过在两个或更多个不同的施加偏压下检测红外辐射，并且通过在每个这些偏压下产生每个子像素光电检测器的光谱响应曲线，可以计算对每个红外辐射的各个带的响应。 通过在每个偏压下解卷积反应可以发现对每个红外辐射带的响应。 超像素光电探测器用于军事和医学成像应用，可以覆盖广泛的红外光谱。

公开(公告)号：US20030071221A1

公开(公告)日：2003-04-17

申请号：US09976559

申请日：2001-10-12

Applicant: LOCKHEED MARTIN CORPORATION

Inventor： Pradip Mitra

IPC: G01T001/24

CPC classification number: H01L31/02966 ,  H01L31/1185 ,  H01L31/1832

Abstract: The described embodiments of the present invention include a method for forming a radiation detector, including the steps of: forming a radiation absorption layer on a substrate; forming a wider bandgap layer on the radiation absorption layer; forming a passivation layer on the wider bandgap layer; forming a doping layer on the passivation layer; patterning the doping layer; driving dopant from the patterned doping layer into the junction layer and the radiation absorption layer to form a doped region; patterning the passivation layer to expose the doped region; and forming an electrical contact to the doped region. Another described embodiment of the present invention is a radiation detector. This embodiment includes a radiation absorption layer formed on a substrate and a wider bandgap layer formed on the radiation absorption layer. This embodiment further includes a passivation layer formed on the junction layer; a patterned doping layer formed on the passivation layer and a doped region formed by driving dopant from the patterned doping layer into the junction layer and the radiation absorption layer and an electrical contact formed through a via in the passivation layer to provide electrical contact with the doped region.

Abstract translation: 本发明描述的实施例包括一种形成辐射探测器的方法，包括以下步骤：在衬底上形成辐射吸收层; 在辐射吸收层上形成更宽的带隙层; 在更宽的带隙层上形成钝化层; 在钝化层上形成掺杂层; 图案化掺杂层; 将掺杂剂从所述图案化掺杂层驱动到所述结层和所述辐射吸收层中以形成掺杂区域; 图案化钝化层以暴露掺杂区域; 以及形成与所述掺杂区域的电接触。 本发明的另一个描述的实施例是放射线检测器。 该实施例包括形成在基板上的辐射吸收层和形成在辐射吸收层上的较宽带隙层。 该实施例还包括形成在接合层上的钝化层; 形成在钝化层上的图案化掺杂层和通过将掺杂剂从图案化掺杂层驱动到结层和辐射吸收层和通过钝化层中的通孔形成的电接触形成的掺杂区域，以提供与掺杂 地区。