Barrier film
    3.
    发明授权

    公开(公告)号:US12006575B2

    公开(公告)日:2024-06-11

    申请号:US17286880

    申请日:2019-10-22

    Applicant: LG CHEM, LTD.

    Abstract: Provided is a barrier film comprising a base layer, and an inorganic layer including Si, N, and O, and including a first region and a second region, which have different elemental contents (atomic %) of Si, N, and O from each other as measured by XPS, wherein the film has a water vapor transmission rate of 5.0×10−4 g/m2·day or less as measured under conditions of a temperature of 38° C. and 100% relative humidity after being stored at 85° C. and 85% relative humidity conditions for 250 hours, or wherein the inorganic layer has a compactness expressed through an etching rate of 0.17 nm/s in the thickness direction for an Ar ion etching condition to etch Ta2O5 at a rate of 0.09 nm/s. The barrier film has excellent barrier properties and optical properties and can be used for electronic products that are sensitive to moisture and the like.

    Barrier film
    4.
    发明授权

    公开(公告)号:US12098258B2

    公开(公告)日:2024-09-24

    申请号:US17285189

    申请日:2019-10-22

    Applicant: LG CHEM, LTD.

    Abstract: Provided is a barrier film, comprising:



    a base layer; and
    an inorganic layer including a first region and a second region, which have different elemental contents (atomic %) of Si, N, and O from each other as measured by XPS, and having a compactness expressed through an etching rate of 0.17 nm/s or less in the thickness direction for an Ar ion etching condition to etch Ta2O5 at a rate of 0.09 nm/s,
    wherein the second region has a higher elemental content of N than that of the first region,
    the first region has a thickness of 50 nm or more, and
    the ratio (d1/d2) of the thickness (d1) of the first region to the thickness (d2) of the second region is 2 or less,
    the barrier film having excellent barrier properties and optical properties.




    The barrier film can be used for electronic products sensitive to moisture or the like.

    Barrier film
    7.
    发明授权

    公开(公告)号:US11458703B2

    公开(公告)日:2022-10-04

    申请号:US16767541

    申请日:2018-11-28

    Applicant: LG CHEM, LTD.

    Abstract: Provided is a barrier film that includes a base layer (A), and a barrier layer (B) located on one side of the base layer and including one or more cured layers of polysilazane layers having a surface (S) of a concavo-convex structure formed by protruding particles, the barrier film having excellent barrier properties against the external environment, and excellent optical properties. The barrier film can be used for an electronic product sensitive to moisture.

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