公开(公告)号：US08333008B1

公开(公告)日：2012-12-18

申请号：US11192591

申请日：2005-07-29

申请人： Kyusik Sin ,  Lei Wang ,  Yingjian Chen

发明人： Kyusik Sin ,  Lei Wang ,  Yingjian Chen

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for fabricating a perpendicular magnetic recording head, and the head so formed, are described. The method includes depositing an underlayer directly on an insulating layer. The underlayer preferably includes at least one of a nonferromagnetic metal, silicon oxide, and silicon nitride. A pole layer, which has a pole removal rate, is provided on the underlayer. The method and system further include forming a perpendicular magnetic recording pole from the pole layer. The perpendicular magnetic recording pole has a top and a bottom that is narrower than the top. The process of forming the perpendicular magnetic recording pole further includes removing a portion of the pole layer such that a pole removal rate for the pole layer is less than or substantially equal to a removal rate of the underlayer during the removing step.

摘要翻译： 描述了用于制造垂直磁记录头和如此形成的头的方法和系统。 该方法包括直接在绝缘层上沉积底层。 底层优选包括非铁磁金属，氧化硅和氮化硅中的至少一种。 在底层上提供具有极去除率的极层。 该方法和系统还包括从极层形成垂直磁记录极。 垂直磁记录极具有比顶部窄的顶部和底部。 形成垂直磁记录极的过程还包括去除极层的一部分，使得极层的极去除率小于或基本上等于在去除步骤期间底层的去除速率。

公开(公告)号：US08424192B1

公开(公告)日：2013-04-23

申请号：US11199281

申请日：2005-08-08

申请人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.

摘要翻译： 公开了一种在记录头上制造磁极的方法和系统。 该方法和系统包括溅射至少一个铁磁层并在铁磁层上制造硬掩模。 该方法和系统还包括限定极点并在极上沉积写入间隙。 极的一部分被封装在绝缘体中。

公开(公告)号：US07289303B1

公开(公告)日：2007-10-30

申请号：US09828635

申请日：2001-04-05

申请人： Kyusik Sin ,  Ningjia Zhu ,  Yingjian Chen

发明人： Kyusik Sin ,  Ningjia Zhu ,  Yingjian Chen

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  B82Y25/00 ,  G01R33/093 ,  H01F10/3272 ,  Y10T428/1107 ,  Y10T428/1121 ,  Y10T428/1143

摘要： Magnetoresistive (MR) sensors are disclosed having mechanisms for reducing edge effects such as Barkhausen noise. The sensors include a pinned layer and a free layer with an exchange coupling layer adjoining the free layer, and a ferromagnetic layer having a fixed magnetic moment adjoining the exchange coupling layer. The exchange coupling layer and ferromagnetic layer form a synthetic antiferromagnetic structure with part of the free layer, providing bias that reduces magnetic instabilities at edges of the free layer. Such synthetic antiferromagnetic structures can provide a stronger bias than conventional antiferromagnetic layers, as well as a more exactly defined track width than conventional hard magnetic bias layers. The synthetic antiferromagnetic structures can also provide protection for the free layer during processing, in contrast with the trimming of conventional antiferromagnetic layers that exposes if not removes part of the free layer.

摘要翻译： 公开了具有减小诸如巴克豪森噪声等边缘效应的机构的磁阻（MR）传感器。 传感器包括钉扎层和具有邻接自由层的交换耦合层的自由层，以及具有与交换耦合层邻接的固定磁矩的铁磁层。 交换耦合层和铁磁层形成具有部分自由层的合成反铁磁结构，提供降低自由层边缘的磁性不稳定性的偏压。 这种合成反铁磁结构可以提供比常规反铁磁层更强的偏压，以及比常规硬磁偏置层更精确地定义的轨道宽度。 合成反铁磁性结构也可以在加工过程中为自由层提供保护，与如果不除去部分自由层的常规反铁磁层的修整相反。

公开(公告)号：US08455119B1

公开(公告)日：2013-06-04

申请号：US13118218

申请日：2011-05-27

申请人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

发明人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/66

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3967 ,  G11B2005/3996 ,  Y10T428/12465

摘要： A magnetic disk includes a substrate, a soft magnetic underlayer disposed over the substrate, and a media layer disposed over the underlayer. The underlayer includes a plurality of magnetic layers each containing FeCoN having an atomic concentration of iron that is greater than an atomic concentration of cobalt, and has an atomic concentration of nitrogen that is less than the atomic concentration of cobalt. The atomic concentration of nitrogen is less than eight percent. The underlayer includes a plurality of nonmagnetic layers that are interleaved with the magnetic layers. Each of the nonmagnetic layers has a thickness that is less than one-tenth that of an adjoining layer of the magnetic layers. The media layer contains a magnetically hard material having an easy axis of magnetization oriented substantially perpendicular to both the media layer and the underlayer.

摘要翻译： 磁盘包括衬底，设置在衬底上的软磁性底层，以及设置在衬底上的介质层。 底层包括多个磁性层，每个磁性层含有铁原子浓度大于钴的原子浓度的FeCoN，并且其原子浓度小于钴的原子浓度。 原子浓度低于8％。 底层包括与磁性层交错的多个非磁性层。 每个非磁性层的厚度小于磁性层相邻层的十分之一。 介质层包含磁性硬的材料，其易磁化轴定向成基本垂直于介质层和底层。

公开(公告)号：US08018677B1

公开(公告)日：2011-09-13

申请号：US11923043

申请日：2007-10-24

申请人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

发明人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.

摘要翻译： 一种用于制造用于磁记录头的磁极的方法和系统。 该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。 至少一个硬掩模在其中具有孔。 该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。 沟槽形成在孔下面。 所述方法和系统还包括沉积至少一种铁磁材料。 极包括沟槽内的铁磁材料的一部分。

公开(公告)号：US07968219B1

公开(公告)日：2011-06-28

申请号：US12033991

申请日：2008-02-20

申请人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

发明人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/66

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3967 ,  G11B2005/3996 ,  Y10T428/12465

摘要： A magnetic disk includes a substrate, a soft magnetic underlayer disposed over the substrate, and a media layer disposed over the underlayer. The underlayer includes a first plurality of layers each containing NiFe having an atomic concentration of iron that is at least about thirty percent. The underlayer further includes a second plurality of layers that is interleaved with the first plurality of layers. The second plurality of layers each contain FeCoN having an atomic concentration of iron that is greater than an atomic concentration of cobalt, and having an atomic concentration of nitrogen that is less than the atomic concentration of cobalt. The atomic concentration of nitrogen is less than eight percent. The media layer contains a magnetically hard material having an easy axis of magnetization oriented substantially perpendicular to both the media layer and the underlayer.

摘要翻译： 磁盘包括衬底，设置在衬底上的软磁性底层，以及设置在衬底上的介质层。 底层包括第一多个层，每个层含有原子浓度为至少约百分之三十的铁的NiFe。 底层还包括与第一多个层交错的第二多个层。 第二多个层各自含有铁原子浓度大于钴的原子浓度并且氮原子浓度小于钴的原子浓度的FeCoN。 原子浓度低于8％。 介质层包含磁性硬的材料，其易磁化轴定向成基本垂直于介质层和底层。

公开(公告)号：US07672080B1

公开(公告)日：2010-03-02

申请号：US11521949

申请日：2006-09-15

申请人： YunJun Tang ,  Kyusik Sin ,  Yingjian Chen

发明人： YunJun Tang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/147 ,  G11B5/1877 ,  G11B5/3116 ,  G11B5/3133

摘要： A writer pole for perpendicular recording and a method of manufacturing the same are provided. The writer pole comprises a laminated structure of a first magnetic layer, a second magnetic layer, and a non-magnetic amorphous metal spacer layer disposed between the first and second magnetic layers. Additional ferromagnetic and non-magnetic layers can be added, in an alternating fashion, to produce other laminated structures. Forming a perpendicular writer element includes forming a first magnetic layer, forming a spacer layer on the first magnetic layer, and forming a second magnetic layer on the spacer layer. Forming the perpendicular writer element can further include trimming the writer pole.

摘要翻译： 提供了用于垂直记录的写入极和其制造方法。 写入极包括设置在第一和第二磁性层之间的第一磁性层，第二磁性层和非磁性非晶金属间隔层的叠层结构。 可以以交替的方式添加额外的铁磁和非磁性层以产生其它层压结构。 形成垂直写入器元件包括形成第一磁性层，在第一磁性层上形成间隔层，以及在间隔层上形成第二磁性层。 形成垂直写入器元件还可以包括修整写入器极。

公开(公告)号：US07444740B1

公开(公告)日：2008-11-04

申请号：US11047401

申请日：2005-01-31

申请人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

发明人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.

摘要翻译： 一种用于制造用于磁记录头的磁极的方法和系统。 该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。 至少一个硬掩模在其中具有孔。 该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。 沟槽形成在孔下面。 所述方法和系统还包括沉积至少一种铁磁材料。 极包括沟槽内的铁磁材料的一部分。

公开(公告)号：US08149536B1

公开(公告)日：2012-04-03

申请号：US11871672

申请日：2007-10-12

申请人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.

摘要翻译： 公开了用于制造垂直磁记录头的方法和系统。 该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。 所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

公开(公告)号：US07354664B1

公开(公告)日：2008-04-08

申请号：US10854119

申请日：2004-05-25

申请人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

发明人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/66

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3967 ,  G11B2005/3996 ,  Y10T428/12465

摘要： A magnetic disk has a soft magnetic underlayer comprising a first layer containing NiFe having a concentration of iron that is at least thirty percent and not more than seventy percent; a second layer that adjoins the first layer and contains FeCoN having a concentration of iron that is greater than the second layer's concentration of cobalt, having a concentration of nitrogen that is less than the second layer's concentration of cobalt and less than three percent; and a third layer containing FeCoNi having a concentration of nickel that is less than eight percent, having a concentration of cobalt that is less than the third layer's concentration of iron and greater than the third layer's concentration of nickel, the third layer adjoining only one of the first and second layers. The first and second layers may be repeated to form a magnetically soft high BS laminate for a disk underlayer.

摘要翻译： 磁盘具有软磁性底层，其包含含有铁浓度为至少百分之三十且不超过百分之七十的NiFe的第一层; 邻接第一层并且含有铁浓度大于第二层的钴浓度的FeCoN的第二层，其具有小于第二层的钴浓度的氮浓度小于3％; 以及第三层，其含有镍浓度小于8％的FeCoNi，其钴浓度小于第三层铁的浓度，大于第三层的镍浓度，第三层仅与 第一层和第二层。 可以重复第一层和第二层以形成用于盘底层的磁软的高B层叠层。