公开(公告)号：US06746887B1

公开(公告)日：2004-06-08

申请号：US09784088

申请日：2001-02-16

申请人： Kyo-Ho Moon ,  Soon-Sung Yoo

发明人： Kyo-Ho Moon ,  Soon-Sung Yoo

IPC分类号： H01L2100

CPC分类号： G02F1/1368 ,  G02F2001/136236

摘要： A method of fabricating an array substrate for use in an LCD device which can be used in a four-, five- or six-mask process includes simultaneously etching layers formed over gate and data pads. When performing a photolithography process, photoresist remains over the data pad and acts as an etch stopper. And thus, while etching the layers over the gate pad, the layers over the data pad are etched without any damage to the data pad and without overetching the data pad. Therefore, defects caused by the resistance between the data pad and the data pad electrode do not occur, and pixel defects in the LCD device are prevented. Moreover, the manufacturing yield increases when this method is used.

摘要翻译： 制造可用于四，五或六掩模工艺的LCD装置中使用的阵列基板的方法包括同时蚀刻形成在栅极和数据焊盘上的层。 当进行光刻工艺时，光致抗蚀剂保留在数据焊盘上，并用作蚀刻停止层。 因此，当在栅极焊盘上蚀刻层时，在数据焊盘上的层被蚀刻而不会对数据焊盘造成任何损坏，而不会过蚀刻数据焊盘。 因此，不会发生由数据焊盘和数据焊盘电极之间的电阻引起的缺陷，并且防止了LCD器件中的像素缺陷。 此外，当使用该方法时，制造产量增加。

公开(公告)号：US06943859B2

公开(公告)日：2005-09-13

申请号：US09784087

申请日：2001-02-16

申请人： Soon-Sung Yoo ,  Kyo-Ho Moon

发明人： Soon-Sung Yoo ,  Kyo-Ho Moon

IPC分类号： G02F1/136 ,  G02F1/1362 ,  G02F1/1343 ,  G02F1/1345

CPC分类号： G02F1/13458 ,  G02F1/136286

摘要： A liquid crystal display device, and a method of fabricating that device, including a substrate with a thin film transistor having gate, source, and drain electrodes. A pixel electrode electrically connects to the drain electrode, and a data line electrically connects to the source electrode. A first insulating layer, a pure amorphous silicon layer, and a doped amorphous silicon layer are sequentially layered under the data line. A data pad is formed at one end of the data line. A gate line electrically connects to the gate electrode. A gate pad electrode at one end of the gate line is formed through the first insulating layer and connects to the gate line.

摘要翻译： 一种液晶显示装置及其制造方法，该装置包括具有栅极，源极和漏极的薄膜晶体管的基板。 像素电极与漏电极电连接，数据线与源电极电连接。 在数据线之下顺序层叠第一绝缘层，纯非晶硅层和掺杂的非晶硅层。 在数据线的一端形成数据焊盘。 栅极线电连接到栅电极。 栅极线的一端的栅极焊盘电极通过第一绝缘层形成并连接到栅极线。

公开(公告)号：US06654091B2

公开(公告)日：2003-11-25

申请号：US10246673

申请日：2002-09-19

申请人： Soon-Sung Yoo ,  Kyo-Ho Moon

发明人： Soon-Sung Yoo ,  Kyo-Ho Moon

IPC分类号： G02F11343

CPC分类号： G02F1/13458 ,  G02F1/136286

摘要： A liquid crystal display device, and a method of fabricating that device, including a substrate with a thin film transistor having gate, source, and drain electrodes. A pixel electrode electrically connects to the drain electrode, and a data line electrically connects to the source electrode. A first insulating layer, a pure amorphous silicon layer, and a doped amorphous silicon layer are sequentially layered under the data line. A data pad is formed at one end of the data line. A gate line electrically connects to the gate electrode. A gate pad electrode at one end of the gate line is formed through the first insulating layer and connects to the gate line.

摘要翻译： 一种液晶显示装置及其制造方法，该装置包括具有栅极，源极和漏极的薄膜晶体管的基板。 像素电极与漏电极电连接，数据线与源电极电连接。 在数据线之下顺序层叠第一绝缘层，纯非晶硅层和掺杂非晶硅层。 在数据线的一端形成数据焊盘。 栅极线电连接到栅电极。 栅极线的一端的栅极焊盘电极通过第一绝缘层形成并连接到栅极线。

公开(公告)号：US06788357B2

公开(公告)日：2004-09-07

申请号：US09984257

申请日：2001-10-29

申请人： Kyo-Ho Moon

发明人： Kyo-Ho Moon

IPC分类号： G02F1136

CPC分类号： G02F1/136213 ,  H01L27/1255

摘要： An array substrate for a liquid crystal display device includes a substrate, a plurality of thin film transistors formed on the substrate, each thin film transistor includes a gate electrode, a first gate insulation layer, a second gate insulation layer, an active layer, an ohmic contact layer, a source electrode and a drain electrode, a plurality of gate lines, a plurality of data lines disposed orthogonal to the plurality of gate lines, a plurality of pixel electrodes disposed at pixel regions defined by intersections of the plurality of gate lines and the plurality of data lines, each pixel electrode electrically contacting each drain electrode of the plurality of thin film transistors, and a plurality of storage capacitors each including a portion of each gate line as a first capacitor electrode, the first gate insulation layer as a dielectric layer, and a capacitor electrode electrically communicating with each pixel electrode and functioning as a second capacitor electrode with a portion of each pixel electrode.

摘要翻译： 液晶显示装置用阵列基板包括基板，形成在基板上的多个薄膜晶体管，各薄膜晶体管包括栅电极，第一栅极绝缘层，第二栅极绝缘层，有源层， 欧姆接触层，源电极和漏电极，多条栅极线，与多条栅极线正交设置的多条数据线，多个像素电极，设置在由多条栅极线 并且多个数据线，每个像素电极与多个薄膜晶体管的每个漏电极电接触，以及多个存储电容器，每个存储电容器包括每个栅极线的一部分作为第一电容器电极，第一栅极绝缘层为 电介质层和与每个像素电极电连通并用作第二电容器电极的电容器电极 每个像素电极的部分。

公开(公告)号：US08748892B2

公开(公告)日：2014-06-10

申请号：US12576591

申请日：2009-10-09

申请人： Yong-Soo Cho ,  Kyo-Ho Moon ,  Hoon Choi

发明人： Yong-Soo Cho ,  Kyo-Ho Moon ,  Hoon Choi

IPC分类号： H01L31/00 ,  H01L29/04 ,  H01L29/10 ,  H01L21/00 ,  H01L21/84

CPC分类号： H01L29/4908 ,  H01L27/1214 ,  H01L29/78648

摘要： The present invention relates to a thin-film transistor in a liquid crystal display device and a method of fabricating the same, and the thin-film transistor may be configured by including a first gate electrode formed on an insulating substrate; a first gate insulation film formed on the insulating substrate including the first gate electrode; an active layer formed on the first gate insulation film; source/drain electrodes formed on the active layer and arranged at both sides of the first gate electrode; a second gate insulation film formed on the active layer and the first gate insulation film including the source/drain electrodes and provided with a contact hole for exposing part of the drain electrode; a second gate electrode overlapped with the first gate electrode on the second gate insulation film; and a pixel electrode electrically connected to the drain electrode through the contact hole.

摘要翻译： 液晶显示装置中的薄膜晶体管及其制造方法技术领域本发明涉及液晶显示装置中的薄膜晶体管及其制造方法，薄膜晶体管可以通过包括形成在绝缘基板上的第一栅电极构成， 形成在包括所述第一栅极的所述绝缘基板上的第一栅极绝缘膜; 形成在第一栅极绝缘膜上的有源层; 源极/漏电极，形成在有源层上，并布置在第一栅电极的两侧; 形成在所述有源层上的第二栅极绝缘膜和包括所述源极/漏极的所述第一栅极绝缘膜，并且设置有用于使所述漏极的一部分露出的接触孔; 在所述第二栅极绝缘膜上与所述第一栅电极重叠的第二栅电极; 以及通过接触孔与漏电极电连接的像素电极。

公开(公告)号：US08237163B2

公开(公告)日：2012-08-07

申请号：US12640613

申请日：2009-12-17

申请人： Kyo-Ho Moon ,  Byung-Yong Ahn ,  Hee-Kyoung Choi ,  Chul-Tae Kim ,  Sung-Wook Hong ,  Seung-Woo Jeong ,  Yong-Soo Cho

发明人： Kyo-Ho Moon ,  Byung-Yong Ahn ,  Hee-Kyoung Choi ,  Chul-Tae Kim ,  Sung-Wook Hong ,  Seung-Woo Jeong ,  Yong-Soo Cho

IPC分类号： H01L29/04 ,  H01L29/10

CPC分类号： H01L27/12 ,  G02F1/136227 ,  H01L23/53238 ,  H01L27/0248 ,  H01L27/124 ,  H01L27/1288 ,  H01L2924/0002 ,  H01L2924/00

摘要： An array substrate for a display device and its fabrication method are disclosed. The array substrate for a display device includes: a gate wiring and a gate electrode connected to the wiring formed on a substrate; a gate insulating layer formed on the gate electrode; an active layer and a barrier metal layer stacked with the gate insulating layer interposed therebetween on the gate electrode; a data wiring formed on the barrier metal layer and source and electrodes connected to the data wiring; a passivation film formed on the source and drain electrodes and the data wiring and having a contact hole exposing a portion of the drain electrode, the barrier metal layer and the active layer; and a pixel electrode formed on the passivation film and being in contact with the drain electrode and the barrier metal layer including the active layer.

摘要翻译： 公开了一种用于显示装置的阵列基板及其制造方法。 用于显示装置的阵列基板包括：栅极布线和连接到形成在基板上的布线的栅电极; 形成在所述栅电极上的栅极绝缘层; 在栅电极上层叠有栅绝缘层的有源层和阻挡金属层; 形成在阻挡金属层上的数据布线和连接到数据布线的源极和电极; 形成在源极和漏极以及数据布线上的钝化膜，并具有暴露漏电极，阻挡金属层和有源层的一部分的接触孔; 以及形成在所述钝化膜上并与所述漏电极和包含所述有源层的所述势垒金属层接触的像素电极。

公开(公告)号：US06291360B1

公开(公告)日：2001-09-18

申请号：US09265784

申请日：1999-03-10

申请人： Kyo-Ho Moon

发明人： Kyo-Ho Moon

IPC分类号： H01L21302

CPC分类号： H01L21/0274 ,  Y10S438/905 ,  Y10S438/906 ,  Y10S438/963

摘要： The present invention relates to a method of etching a layer on a fabricated thin film transistor in liquid crystal display, which prevents failure of patterns by removing the residues generated from organic material in the air or the remainders of photoresist before patterning a layer. The present invention includes the steps of defining a photoresist pattern on a predetermined region of a layer on substrate, leaving an etch-resistant residue on at least a portion of the layer outside the predetermined region, removing residue by ashing with plasma, patterning the layer with an etchant, where the the photoresist pattern acts as an etch mask.

摘要翻译： 本发明涉及一种在液晶显示器中制造的薄膜晶体管上蚀刻层的方法，其通过在图案化层之前去除空气或光致抗蚀剂中的有机材料产生的残留物来防止图案的故障。 本发明包括以下步骤：在衬底上的层的预定区域上限定光致抗蚀剂图案，在预定区域外部的层的至少一部分上留下抗蚀刻残留物，通过灰浆灰化等离子体去除残留物，图案化层 具有蚀刻剂，其中光致抗蚀剂图案用作蚀刻掩模。

公开(公告)号：US08519399B2

公开(公告)日：2013-08-27

申请号：US13543474

申请日：2012-07-06

申请人： Kyo-Ho Moon ,  Byung-Yong Ahn ,  Hee-Kyoung Choi ,  Chul-Tae Kim ,  Sung-Wook Hong ,  Seung-Woo Jeong ,  Yong-Soo Cho

发明人： Kyo-Ho Moon ,  Byung-Yong Ahn ,  Hee-Kyoung Choi ,  Chul-Tae Kim ,  Sung-Wook Hong ,  Seung-Woo Jeong ,  Yong-Soo Cho

IPC分类号： H01L29/04

CPC分类号： H01L27/12 ,  G02F1/136227 ,  H01L23/53238 ,  H01L27/0248 ,  H01L27/124 ,  H01L27/1288 ,  H01L2924/0002 ,  H01L2924/00

摘要： An array substrate for a display device and its fabrication method are disclosed. The array substrate for a display device includes: a gate wiring and a gate electrode connected to the wiring formed on a substrate; a gate insulating layer formed on the gate electrode; an active layer and a barrier metal layer stacked with the gate insulating layer interposed therebetween on the gate electrode; a data wiring formed on the barrier metal layer and source and electrodes connected to the data wiring; a passivation film formed on the source and drain electrodes and the data wiring and having a contact hole exposing a portion of the drain electrode, the barrier metal layer and the active layer; and a pixel electrode formed on the passivation film and being in contact with the drain electrode and the barrier metal layer including the active layer.

摘要翻译： 公开了一种用于显示装置的阵列基板及其制造方法。 用于显示装置的阵列基板包括：栅极布线和连接到形成在基板上的布线的栅电极; 形成在所述栅电极上的栅极绝缘层; 在栅电极上层叠有栅绝缘层的有源层和阻挡金属层; 形成在阻挡金属层上的数据布线和连接到数据布线的源极和电极; 形成在源极和漏极以及数据布线上的钝化膜，并具有暴露漏电极，阻挡金属层和有源层的一部分的接触孔; 以及形成在所述钝化膜上并与所述漏电极和包含所述有源层的所述势垒金属层接触的像素电极。

公开(公告)号：US20120315715A1

公开(公告)日：2012-12-13

申请号：US13332666

申请日：2011-12-21

申请人： Yong-Soo Cho ,  Young-Seok Choi ,  Dong-Hee Kim ,  Kyo-Ho Moon ,  Chul-Tae Kim ,  Kyu-Sun Choi

发明人： Yong-Soo Cho ,  Young-Seok Choi ,  Dong-Hee Kim ,  Kyo-Ho Moon ,  Chul-Tae Kim ,  Kyu-Sun Choi

IPC分类号： H01L33/08

CPC分类号： G02F1/1333 ,  G02F1/1368 ,  G02F2001/134372 ,  H01L27/124 ,  H01L27/1288

摘要： A method of fabricating a fringe field switching (FFS)-liquid crystal display (LCD) device may have the following advantage. An inferior connection between the drain electrode and the pixel electrode may be prevented by preventing formation of a copper compound on the drain electrode, by performing a back channel etching after patterning a pixel electrode, and by performing a wet strip rather than a dry strip. This may result in a direct contact between copper and ITO, thereby reducing the number of mask processes.

摘要翻译： 制造条纹场切换（FFS） - 液晶显示（LCD）装置的方法可以具有以下优点。 可以通过在图案化像素电极之后进行背沟槽蚀刻，并且通过执行湿条而不是干条来防止在漏电极上形成铜化合物的漏电极和像素电极之间的较差连接。 这可能导致铜和ITO之间的直接接触，从而减少掩模过程的数量。

公开(公告)号：US07351621B2

公开(公告)日：2008-04-01

申请号：US10862567

申请日：2004-06-08

申请人： Kyo-Ho Moon

发明人： Kyo-Ho Moon

IPC分类号： H01L21/84

CPC分类号： G02F1/136213 ,  H01L27/1255

摘要： An array substrate for a liquid crystal display device includes a substrate, a plurality of thin film transistors formed on the substrate, each thin film transistor includes a gate electrode, a first gate insulation layer, a second gate insulation layer, an active layer, an ohmic contact layer, a source electrode and a drain electrode, a plurality of gate lines, a plurality of data lines disposed orthogonal to the plurality of gate lines, a plurality of pixel electrodes disposed at pixel regions defined by intersections of the plurality of gate lines and the plurality of data lines, each pixel electrode electrically contacting each drain electrode of the plurality of thin film transistors, and a plurality of storage capacitors each including a portion of each gate line as a first capacitor electrode, the first gate insulation layer as a dielectric layer, and a capacitor electrode electrically communicating with each pixel electrode and functioning as a second capacitor electrode with a portion of each pixel electrode.

摘要翻译： 液晶显示装置用阵列基板包括基板，形成在基板上的多个薄膜晶体管，各薄膜晶体管包括栅电极，第一栅极绝缘层，第二栅极绝缘层，有源层， 欧姆接触层，源电极和漏电极，多条栅极线，与多条栅极线正交设置的多条数据线，多个像素电极，设置在由多条栅极线 并且多个数据线，每个像素电极与多个薄膜晶体管的每个漏电极电接触，以及多个存储电容器，每个存储电容器包括每个栅极线的一部分作为第一电容器电极，第一栅极绝缘层为 电介质层和与每个像素电极电连通并用作第二电容器电极的电容器电极 每个像素电极的部分。