公开(公告)号：US20230260953A1

公开(公告)日：2023-08-17

申请号：US18108725

申请日：2023-02-13

Applicant: Kulicke and Soffa Industries, Inc.

Inventor： Matthew B. Wasserman, JR. ,  Thomas J. Colosimo, JR.

IPC: H01L23/00 ,  B01D53/40

CPC classification number: H01L24/75 ,  B01D53/40 ,  H01L24/81 ,  H01L2224/751 ,  H01L2224/759 ,  B01D2258/0216 ,  H01L2224/81203 ,  H01L2224/81986 ,  H01L2224/81908 ,  H01L2224/81065 ,  H01L2924/40

Abstract: A method of monitoring gas byproducts of a bonding system is provided. The method includes: providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts; connecting each of the bonding systems to a monitoring device using a respective gas delivery path; and monitoring a composition of at least a portion of the gas byproducts with the monitoring device.