公开(公告)号：US20190066970A1

公开(公告)日：2019-02-28

申请号：US16177213

申请日：2018-10-31

Applicant: Korea Basic Science Institute

Inventor： Sang-Chul Lee ,  Jongman Jeong ,  Jin-Gyu Kim ,  Cheolsu Han

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/22

Abstract: A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially connected to the sample holder and allow the sample holder to have translational degrees of freedom in three directions and rotational degrees of freedom in at least two directions.

公开(公告)号：US11069506B2

公开(公告)日：2021-07-20

申请号：US16177213

申请日：2018-10-31

Applicant: Korea Basic Science Institute

Inventor： Sang-Chul Lee ,  Jongman Jeong ,  Jin-Gyu Kim ,  Cheolsu Han

IPC: H01J37/20 ,  H01J37/26 ,  G02B21/24

Abstract: A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially connected to the sample holder and allow the sample holder to have translational degrees of freedom in three directions and rotational degrees of freedom in at least two directions.