Invention Grant
- Patent Title: Driver of sample holder for electron microscope and stage comprising same
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Application No.: US16177213Application Date: 2018-10-31
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Publication No.: US11069506B2Publication Date: 2021-07-20
- Inventor: Sang-Chul Lee , Jongman Jeong , Jin-Gyu Kim , Cheolsu Han
- Applicant: Korea Basic Science Institute
- Applicant Address: KR Yuseong-gu Daejeon
- Assignee: Korea Basic Science Institute
- Current Assignee: Korea Basic Science Institute
- Current Assignee Address: KR Yuseong-gu Daejeon
- Agent Todd B. Alder
- Priority: KR10-2016-0138158 20161024
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; G02B21/24
Abstract:
A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially connected to the sample holder and allow the sample holder to have translational degrees of freedom in three directions and rotational degrees of freedom in at least two directions.
Public/Granted literature
- US20190066970A1 DRIVER OF SAMPLE HOLDER FOR ELECTRON MICROSCOPE AND STAGE COMPRISING SAME Public/Granted day:2019-02-28
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