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公开(公告)号：US6111981A
公开(公告)日：2000-08-29
申请号：US130522
申请日：1998-08-07
申请人： Koji Tsubusaki , Hiroshi Motoki , Fumio Komatsu
发明人： Koji Tsubusaki , Hiroshi Motoki , Fumio Komatsu
CPC分类号： G06T7/0081 , G06K9/0014 , G06K2209/19 , G06T2207/10061 , G06T2207/30148
摘要： Analog image data a SEM are converted into digital data, and are processed by a spatial filtering processing, histogram processing, threshold value setting, three-valued image data processing, noise reduction and the like. Area of a pattern in the three-valued image data is calculated by a labelling and calculation processing, and a pattern is sequentially detected by comparing the area of the pattern with a reference area value. The comparison and detection of the same or similar patterns repeated in the SEM image are performed by using the area of the pattern, and are not performed by a shape of the pattern, thereby resulting a precise detection at high speed by using a microprocessor. Since it is possible to perform a pattern recognition from the area value even though the pattern does not have a characteristic, it is possible to precisely detect and recognize a pattern image in high speed.
摘要翻译： 模拟图像数据，SEM被转换为数字数据，并通过空间滤波处理，直方图处理，阈值设置，三值图像数据处理，降噪等处理。 通过标记和计算处理计算三值图像数据中的图案的面积，并且通过将图案的面积与参考面积值进行比较来顺序地检测图案。 通过使用图案的区域来进行SEM图像中重复的相同或相似图案的比较和检测，并且不通过图案的形状进行，从而通过使用微处理器高速精确地检测。 由于即使图案不具有特征，也可以从区域值执行图案识别，因此可以高速精确地检测和识别图案图像。
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公开(公告)号：US5434409A
公开(公告)日：1995-07-18
申请号：US154349
申请日：1993-11-18
申请人： Koji Tsubusaki
发明人： Koji Tsubusaki
CPC分类号： G01B15/00 , G01B15/04 , H01J2237/2816
摘要： Line profile data obtained by scanning a circuit pattern with an electron beam is smoothing-differential so as to obtain a pair of approximate edge positions of the circuit pattern. Positions apart from the pair of approximate edge positions by a predetermined number of picture elements are referred to as start point and end point of automatic measuring algorithm. The automatic measuring algorithm is performed for the line profile data between the start point and the end point so as to detect precise edge positions of the circuit pattern.
摘要翻译： 通过用电子束扫描电路图案获得的线轮廓数据是平滑差分，以便获得电路图案的一对近似边缘位置。 称为起始点和自动测量算法的结束点，将距离该对近似边缘位置的位置除以预定数量的图像元素。 对起始点和终点之间的线轮廓数据执行自动测量算法，以检测电路图案的精确边缘位置。
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公开(公告)号：US5887080A
公开(公告)日：1999-03-23
申请号：US379962
申请日：1995-01-27
申请人： Koji Tsubusaki , Hiroshi Motoki , Fumio Komatsu
发明人： Koji Tsubusaki , Hiroshi Motoki , Fumio Komatsu
IPC分类号： G01B11/24 , G03F1/84 , G03F1/86 , G06K9/00 , G06T1/00 , G06T5/00 , G06T5/20 , G06T7/60 , G06K9/38
CPC分类号： G06T7/0081 , G06K9/0014 , G06K2209/19 , G06T2207/10061 , G06T2207/30148
摘要： Analog image data a SEM are converted into digital data, and are processed by a spatial filtering processing, histogram processing, threshold value setting, three-valued image data processing, noise reduction and the like. Area of a pattern in the three-valued image data is calculated by a labelling and calculation processing, and a pattern is sequentially detected by comparing the area of the pattern with a reference area value. The comparison and detection of the same or similar patterns repeated in the SEM image are performed by using the area of the pattern, and are not performed by a shape of the pattern, thereby resulting a precise detection at high speed by using a microprocessor. Since it is possible to perform a pattern recognition from the area value even though the pattern does not have a characteristic, it is possible to precisely detect and recognize a pattern image in high speed.
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公开(公告)号：US5555319A
公开(公告)日：1996-09-10
申请号：US237169
申请日：1994-05-03
申请人： Koji Tsubusaki , Fumio Komatsu
发明人： Koji Tsubusaki , Fumio Komatsu
CPC分类号： G06K9/4604
摘要： A critical dimension measuring equipment includes a filtering circuit for inputting image data from a SEM and performs spatial filtering processing of the image data, a histogram processing circuit implements histogram processing of the image data, a threshold value detection circuit obtains a threshold value based on a discriminant criteria method, a three-value conversion processing circuits implements three-value conversion of the image data based on the threshold value, a first calculation circuit obtains the area and perimeter of the bottom section of the pattern based on this data, a second calculation circuit obtains the diameters of the patterns based on this data, and a critical shape recognition circuit decide whether the pattern is circular or elliptical based on the critical diameter, calculates the diameter of the circle based on the area if the pattern is circular, and calculating the major axis and the minor axis of the ellipse based on the area and the perimeter if the pattern is elliptical.
摘要翻译： 临界尺寸测量设备包括一个滤波电路，用于从SEM输入图像数据，并执行图像数据的空间滤波处理，直方图处理电路实现图像数据的直方图处理，阈值检测电路基于 判别标准方法，三值转换处理电路基于阈值实现图像数据的三值转换，第一计算电路基于该数据获得图案的底部区域和周长，第二计算 电路基于该数据获得图案的直径，并且临界形状识别电路基于临界直径决定图案是圆形还是椭圆形，如果图案为圆形则基于面积计算圆的直径，并计算 椭圆的长轴和短轴基于面积和周长 图案是椭圆形
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