System and method to control slip-stick stages

    公开(公告)号:US11418133B2

    公开(公告)日:2022-08-16

    申请号:US16784987

    申请日:2020-02-07

    发明人: Salim Ibrir

    IPC分类号: H02N2/00 H01L41/04 H02N2/02

    摘要: A system to control slip-stick stages that includes a slip-stick stage including an actuator and a processor coupled to the actuator to obtain a frequency, a number of measurement samples, and a voltage; determine a time period based on the number of measurement samples and the frequency; sample a displacement of the actuator during the time period. The system functions to calculate an error value based on the displacement and a reference position; determine a step value based on the error value and a modulation protocol. The modulation protocol includes a proportional modulation protocol or a proportional-integral modulation protocol to generate a control signal based on the step value, the frequency and the voltage based on an integral of a function of voltage and a Heaviside function according to a direction specified by a sign of the step value; and transmit the control signal to the actuator.