- 专利标题: System and method to control slip-stick stages
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申请号: US16784987申请日: 2020-02-07
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公开(公告)号: US11418133B2公开(公告)日: 2022-08-16
- 发明人: Salim Ibrir
- 申请人: King Fahd University of Petroleum and Minerals
- 申请人地址: SA Dhahran
- 专利权人: King Fahd University of Petroleum and Minerals
- 当前专利权人: King Fahd University of Petroleum and Minerals
- 当前专利权人地址: SA Dhahran
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H02N2/00
- IPC分类号: H02N2/00 ; H01L41/04 ; H02N2/02
摘要:
A system to control slip-stick stages that includes a slip-stick stage including an actuator and a processor coupled to the actuator to obtain a frequency, a number of measurement samples, and a voltage; determine a time period based on the number of measurement samples and the frequency; sample a displacement of the actuator during the time period. The system functions to calculate an error value based on the displacement and a reference position; determine a step value based on the error value and a modulation protocol. The modulation protocol includes a proportional modulation protocol or a proportional-integral modulation protocol to generate a control signal based on the step value, the frequency and the voltage based on an integral of a function of voltage and a Heaviside function according to a direction specified by a sign of the step value; and transmit the control signal to the actuator.
公开/授权文献
- US20210257935A1 SLIP-STICK STAGE CONTOL 公开/授权日:2021-08-19
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