Method for calibrating accelerometer sensitivity

    公开(公告)号:US20060005603A1

    公开(公告)日:2006-01-12

    申请号:US10887290

    申请日:2004-07-08

    IPC分类号: G01P21/00

    CPC分类号: G01P21/00 G01P15/125

    摘要: A method for calibrating the sensitivity of a micromachined differential-capacitor accelerometer without applying mechanical stimulation, such as shaking. The accelerometer is fabricated with dimensional control structures so that a dimensional relationship is set-up among operational features of the device. The method includes measuring the resonant frequency of a movable mass and measuring the change in the output signal of the accelerometer as the mass is displaced by electrostatic means. The sensitivity of the accelerometer is then calculated.