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    On-the fly laser beam path dithering for enhancing throughput
    2.
    发明授权
    On-the fly laser beam path dithering for enhancing throughput 有权
    用于增强吞吐量的飞行激光束路径抖动

    公开(公告)号：US08497450B2

    公开(公告)日：2013-07-30

    申请号：US11925562

    申请日：2007-10-26

    申请人： Kelly Bruland ,  Mark Unrath ,  Stephen Swaringen ,  Ho Wai Lo ,  Clint Vandergiessen ,  Keith Grant

    发明人： Kelly Bruland ,  Mark Unrath ,  Stephen Swaringen ,  Ho Wai Lo ,  Clint Vandergiessen ,  Keith Grant

    IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/16

    CPC分类号： G02B26/101

    摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.

    摘要翻译： 基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。 传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

    ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT
    6.
    发明申请
    ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT 有权
    在飞行激光光束路径加强增强

    公开(公告)号：US20080093349A1

    公开(公告)日：2008-04-24

    申请号：US11925562

    申请日：2007-10-26

    申请人： Kelly Bruland ,  Mark Unrath ,  Stephen Swaringen ,  Ho Lo ,  Clint Vandergiessen ,  Keith Grant

    发明人： Kelly Bruland ,  Mark Unrath ,  Stephen Swaringen ,  Ho Lo ,  Clint Vandergiessen ,  Keith Grant

    IPC分类号： B23K26/38

    CPC分类号： G02B26/101

    摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.

    摘要翻译： 基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。 传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

    DECOUPLED, MULTIPLE STAGE POSITIONING SYSTEM
    9.
    发明申请
    DECOUPLED, MULTIPLE STAGE POSITIONING SYSTEM 有权
    解码，多级定位系统

    公开(公告)号：US20080196631A1

    公开(公告)日：2008-08-21

    申请号：US11676937

    申请日：2007-02-20

    申请人： Mark T. Kosmowski ,  Kelly Bruland

    发明人： Mark T. Kosmowski ,  Kelly Bruland

    IPC分类号： A47B9/00 ,  H01L21/00

    CPC分类号： H01L21/68785 ,  B23K26/02 ,  B23K26/082 ,  B23K26/083 ,  B23K26/0869 ,  B23K2101/40 ,  H01L21/68

    摘要： A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.

    摘要翻译： 分裂轴台架构被实现为能够以高速和加速度的振动和热稳定材料输送的多级定位系统。 分裂轴设计使位于分离的平行平面中的两个垂直轴分离舞台运动。 用作花岗岩或其他石板或陶瓷材料或铸铁的形状的尺寸稳定的基材用作下层和上层的基材。 衬底被精确地切割（“研磨”），使得其上部和下部表面部分是平的并且彼此平行。