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176 条记录 (耗时 0.025 秒)

    Decoupled multi-disk gyroscope
    1.
    发明授权
    Decoupled multi-disk gyroscope 有权
    去耦多盘陀螺仪

    公开(公告)号：US06443008B1

    公开(公告)日：2002-09-03

    申请号：US09507583

    申请日：2000-02-19

    申请人： Karsten Funk ,  Markus Lutz ,  Wilhelm Frey

    发明人： Karsten Funk ,  Markus Lutz ,  Wilhelm Frey

    IPC分类号： G01P904

    CPC分类号： G01C19/5712

    摘要： A gyroscope system including multiple rotating or oscillating disks filters out disturbance acceleration inputs such as vibrations or jarring while detecting and measuring external angular velocity. The gyroscope disks are decoupled from a substrate to decrease the impact of external vibrations on the gyroscope operation. The gyroscope disks are rotated in opposite directions or oscillated out of phase to decrease the impact of disturbance vibrations and jarring while more accurately measuring external angular velocities applied to the system.

    摘要翻译： 包括多个旋转或振荡盘的陀螺仪系统在检测和测量外部角速度的同时过滤出诸如振动或振动的扰动加速度输入。 陀螺仪盘与基板脱耦，以减少外部振动对陀螺仪操作的影响。 陀螺仪盘相反方向旋转或振荡异相以减少干扰振动和振动的冲击，同时更准确地测量施加到系统的外部角速度。

    Integrated adjustable capacitor
    5.
    发明授权
    Integrated adjustable capacitor 有权
    集成可调电容器

    公开(公告)号：US06448604B1

    公开(公告)日：2002-09-10

    申请号：US09659932

    申请日：2000-09-12

    申请人： Karsten Funk ,  Markus Lutz ,  Detlef Clawin

    发明人： Karsten Funk ,  Markus Lutz ,  Detlef Clawin

    IPC分类号： H01L2972

    CPC分类号： H01L28/40 ,  H01G5/18 ,  H01L27/0629

    摘要： An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.

    摘要翻译： 提供了一种用于制造这种装置的集成可调电容器装置和方法。 可调电容器包括底层电极，介电腔，上电极和用于从电介质腔去除牺牲材料的蚀刻腔。 由于epi多晶硅和单晶硅的外延沉积，器件的表面相对平坦。 可调电容器系统能够进行CMOS工艺，而不需要额外的步骤覆盖电容器器件来保护电容器，然后在CMOS工艺之后移除覆盖层。

    Integrated adjustable capacitor
    7.
    发明授权
    Integrated adjustable capacitor 有权

    公开(公告)号：US06524923B2

    公开(公告)日：2003-02-25

    申请号：US10145020

    申请日：2002-05-14

    申请人： Karsten Funk ,  Markus Lutz ,  Detlef Clawin

    发明人： Karsten Funk ,  Markus Lutz ,  Detlef Clawin

    IPC分类号： H01L2120

    CPC分类号： H01L28/40 ,  H01G5/18 ,  H01L27/0629

    摘要： An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.

    Micromechanical rotational rate sensor
    8.
    发明申请
    Micromechanical rotational rate sensor 有权
    微机电转速传感器

    公开(公告)号：US20060107738A1

    公开(公告)日：2006-05-25

    申请号：US11328755

    申请日：2006-01-09

    申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

    发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

    IPC分类号： G01P15/08

    CPC分类号： G01C19/5747

    摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

    摘要翻译： 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

    Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor
    9.
    发明授权
    Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor 有权
    用于利用第二振荡器和转速传感器调谐第一振荡器的方法和装置

    公开(公告)号：US06654424B1

    公开(公告)日：2003-11-25

    申请号：US09520250

    申请日：2000-03-07

    申请人： Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

    发明人： Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

    IPC分类号： H04L2500

    CPC分类号： H03J7/02 ,  G01C19/56

    摘要： In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

    摘要翻译： 在用第二振荡器调谐第一振荡器的方法和装置中，由第二振荡器的相应频移和/或相移信号产生第一振荡器的响应信号。 根据各个响应信号的差异，第一振荡器被调谐到第二振荡器。 对于幅度校正，通过将输出信号除以响应信号的和来形成商。 根据本发明的方法和装置在旋转速率传感器中特别有用。 本发明还包括旋转速率传感器，其包括用于从第一和第二振荡器的振荡确定转速的装置和用于利用第二振荡器调谐第一振荡器的装置。

    Anti-stiction technique for electromechanical systems and electromechanical device employing same
    10.
    发明申请
    Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权
    机电系统的抗静电技术和采用该机电系统的机电装置

    公开(公告)号：US20090065928A1

    公开(公告)日：2009-03-12

    申请号：US12264774

    申请日：2008-11-04

    申请人： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    发明人： Markus Lutz ,  Aaron Partidge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    IPC分类号： H01L23/12

    CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

    摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

    摘要翻译： 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。