METHOD OF MANUFACTURING AN INTEGRATED SEMICONDUCTOR SUBSTRATE STRUCTURE
    1.
    发明申请
    METHOD OF MANUFACTURING AN INTEGRATED SEMICONDUCTOR SUBSTRATE STRUCTURE 有权
    制造集成半导体衬底结构的方法

    公开(公告)号:US20110108850A1

    公开(公告)日:2011-05-12

    申请号:US12914930

    申请日:2010-10-28

    IPC分类号: H01L27/085 H01L21/8232

    摘要: An integrated semiconductor substrate structure is disclosed. In one aspect, the structure includes a substrate, a GaN-heterostructure and a semiconductor substrate layer. The GaN heterostructure is present in a first device area for definition of GaN-based devices, and is covered at least partially with a protection layer. The semiconductor substrate layer is present in a second device area for definition of CMOS devices. At least one of the GaN heterostructure and the semiconductor substrate layer is provided in at least one trench in the substrate, so that the GaN heterostructure and the semiconductor substrate layer are laterally juxtaposed.

    摘要翻译: 公开了一种集成半导体衬底结构。 一方面,该结构包括衬底,GaN异质结构和半导体衬底层。 GaN异质结构存在于用于GaN基器件的定义的第一器件区域中,并且至少部分地被保护层覆盖。 半导体衬底层存在于用于CMOS器件定义的第二器件区域中。 至少GaN基异质结构和半导体衬底层中的至少一个设置在衬底中的至少一个沟槽中,使得GaN异质结构和半导体衬底层横向并置。