HIGH FREQUENCY CAPACITOR AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20220328253A1

    公开(公告)日:2022-10-13

    申请号:US17709338

    申请日:2022-03-30

    Abstract: The present invention provides a method for manufacturing a high frequency capacitor, including preparing a substrate for formation of the capacitor, forming a dielectric layer at an upper surface of the substrate, forming an upper electrode at an upper surface of the dielectric layer, and removing a portion of a lower surface of the substrate, to expose a lower surface of the dielectric layer, and forming a lower electrode at the lower surface of the dielectric layer. The high frequency capacitor includes a dielectric layer having a uniform surface, a thick upper electrode, and a thick lower electrode and, as such, exhibits high quality factor (Q) even at a high frequency.

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