公开(公告)号：US10166400B2

公开(公告)日：2019-01-01

申请号：US14538154

申请日：2014-11-11

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Keon Jae Lee ,  Myung Hwan Byun ,  Kwi Il Park ,  Geon Tae Hwang ,  Chang Kyu Chung

IPC: A61N1/00 ,  B32B38/00 ,  H01L41/08 ,  A61N1/378 ,  B32B38/10 ,  A61N1/36 ,  H01L41/113 ,  H01L41/312 ,  B82Y40/00 ,  A61N1/375 ,  A61N1/05

Abstract: Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer.Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution.