公开(公告)号：US20040012460A1

公开(公告)日：2004-01-22

申请号：US10342350

申请日：2003-01-15

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Il-Joo Cho ,  Kwang-Seok Yun ,  Euisik Yoon

IPC: H01H051/22

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: Disclosed is a micromirror actuator having a two-axis freedom and actuated by an electromagnetic force and fabrication method thereof. The micromirror actuator includes a substrate, a frame configured to be connected with the substrate, a micromirror configured to be connected with the frame, first and second torsion bars connecting the substrate with the frame, third and fourth torsion bars connecting the frame with the micromirror, four interdigitated cantilevers configured to be connected to the substrate, four connecting bars connecting the four interdigitated cantilevers with the frame, interconnection lines formed on the four interdigitated cantilevers and the micromirror, and first and second magnets installed outside the substrate. since the micromirror actuator of the present invention can be actuated around two axes by electromagnetic force generated by electromagnetic field applied from outside, it is possible to obtain large force and large rotational angle. In addition, the micromirror actuator has a mechanically robust structure endurable against external impact, and is operable at a low voltage of 5V or loss. Further, it is possible to obtain a flat mirror surface sine the upper silicon layer of the SOI substrate is used as the mirror surface.

Abstract translation: 公开了一种具有双轴自由度并由电磁力驱动的微镜致动器及其制造方法。 微镜致动器包括基板，被配置为与基板连接的框架，构造成与框架连接的微镜，将基板与框架连接的第一和第二扭杆，将框架与微镜连接的第三和第四扭杆 配置为连接到基板的四个交叉悬臂，连接四个交叉悬臂与框架的四个连接杆，形成在四个叉指悬臂和微镜上的互连线，以及安装在基板外部的第一和第二磁体。 由于通过从外部施加的电磁场产生的电磁力可以使本发明的微镜致动器绕两个轴致动，所以可以获得大的力和大的旋转角度。 此外，微镜致动器具有耐外部冲击的机械坚固结构，并且可在5V或低损耗的低电压下操作。 此外，可以获得使用SOI衬底的上硅层作为镜面的平面镜面正弦。

公开(公告)号：US20030015936A1

公开(公告)日：2003-01-23

申请号：US10194013

申请日：2002-07-15

Applicant: Korea Advanced Institute of Science And Technology

Inventor： Euisik Yoon ,  Jun-Bo Yoon ,  Hyung-Kew Lee

IPC: H02N001/00

CPC classification number: H02N1/008 ,  H02N1/006

Abstract: Disclosed is an electrostatic actuator. A multi-layered auxiliary electrode is further arranged between main electrode and actuating body, and positive charge or negative charge is applied to main electrode, respective auxiliary electrodes, and actuating body such that electrostatic attractive force is generated between auxiliary electrodes adjacent to the main electrode, between adjacent auxiliary electrodes, and between auxiliary electrodes adjacent to the actuating body. According to the invention, distance between the induced charges is shortened, so that electrostatic attractive force therebetween increases, thereby capable of maintaining an actuating range equal to or larger than the conventional electrostatic actuator. The electrostatic actuator according to the present invention can be applied to various MEMS devices, such as an optical switch in which a mirror is formed in the actuator, a radio frequency (RF) switch, or a variable electrostatic capacitor, or the like.

Abstract translation: 公开了一种静电致动器。 在主电极和致动体之间还配置有多层辅助电极，并且对主电极，各辅助电极和致动体施加正电荷或负电荷，使得在与主电极相邻的辅助电极之间产生静电吸引力 ，在相邻的辅助电极之间，以及在与致动体相邻的辅助电极之间。 根据本发明，感应电荷之间的距离缩短，使得其间的静电吸引力增加，从而能够维持等于或大于常规静电致动器的致动范围。 根据本发明的静电致动器可以应用于诸如在致动器中形成反射镜的光开关，射频（RF）开关或可变静电电容器等的各种MEMS器件。

公开(公告)号：US20020114715A1

公开(公告)日：2002-08-22

申请号：US10051082

申请日：2002-01-22

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Euisik Yoon ,  Kwang-Seok Yun

IPC: F04B017/00

CPC classification number: F04B43/06 ,  F04B17/00 ,  F04B43/043

Abstract: The present invention relates to a micropump which is driven by movement of a liquid drop based upon continuous electrowetting actuation. The continuous electrowetting means a phenomenon that the liquid drop moves as the surface tension of the liquid drop is electrically varied in succession. When a tube in which electrolyte and a liquid metal drop are inserted is applied with voltage having periodically changing polarity via metal electrodes, the surface tension of the liquid metal is varied so that the liquid metal drop reciprocates in the tube generating pressure or force, which is used as a driving force of the micropump. The micropump is operated in a low voltage and consumes a small amount of electric power.

Abstract translation: 本发明涉及一种通过基于连续电润湿致动的液滴运动来驱动的微型泵。 连续电润湿是指液滴随着液滴的表面张力依次电性变化而移动的现象。 当其中插入电解质和液态金属液滴的管通过金属电极施加具有周期性变化的极性的电压时，液态金属的表面张力变化，使得液体金属液滴在管中产生压力或力而往复运动，其中 被用作微型泵的驱动力。 微型泵在低电压下工作，消耗少量的电力。

公开(公告)号：US20030223103A1

公开(公告)日：2003-12-04

申请号：US10437290

申请日：2003-05-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Euisik Yoon ,  Jun-Bo Yoon ,  Hyung-Kew Lee ,  Ji-Hyuk Kim

IPC: G02B026/00

CPC classification number: G02B26/0841

Abstract: Disclosed is a micromirror actuator with the degrees of freedom of two axes operated by an electrostatic force. The micromirror actuator comprises: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that upper surfaces of the upper columns are located at higher positions than upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns. In the micromirror actuator, the micromirror is elevated to a desired height by means of two upper columns, and the dimensions of its structure are reduced by locating torsion bars under the micromirror. Further, the micromirror actuator allows the micromirror to be selectively tilted centering on two torsion bars depending on electrodes to which voltage is applied, thus being used as a three-dimensional optical switch.

Abstract translation: 公开了具有通过静电力操作的两个轴的自由度的微镜致动器。 微反射镜致动器包括：在其上形成有绝缘层的基板; 两个下列彼此间隔开指定距离，并形成在绝缘层上; 延伸在下列的上表面上的第一扭杆; 形成为使得第一和第二扭杆彼此正交的第二扭杆; 四个电极，每个设置在由绝缘层上形成的第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面更高的位置处; 以及位于上列的上表面上的微镜，使得微反射镜由上列支撑。 在微镜致动器中，微镜通过两个上柱升高到所需的高度，并且通过在微反射镜下方定位扭杆来减小其结构的尺寸。 此外，微镜致动器允许微镜根据施加电压的电极以两个扭杆为中心选择性地倾斜，因此被用作三维光开关。

公开(公告)号：US20020005752A1

公开(公告)日：2002-01-17

申请号：US09766839

申请日：2001-01-23

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Euisik Yoon ,  Kwang Hyun Lee ,  Hyung Kew Lee

IPC: H03B001/00

CPC classification number: H03H11/0422 ,  G01F1/6845 ,  G01F1/696

Abstract: An electrothermal integrator and audio frequency filter utilizing an electrothermal structure fabricated by way of a micro-machining process. An electrothermal structure is a structure in which there is thermal interaction between its electrical components. It is possible to implement an audio frequency filter by properly integrating electrothermal structures fabricated by micro-machining technology and electrical circuitry, because thermal response is generally slower than electrical response. It is possible to implement a variety of filters by way of forming a Gm-C integrator utilizing an electrothermal structure and using this basic block of Gm-C integrator in general circuitry to form filters.

公开(公告)号：US20040159786A1

公开(公告)日：2004-08-19

申请号：US10777941

申请日：2004-02-12

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Il-Joo Cho ,  Eun-Chul Park ,  Songcheol Hong ,  Euisik Yoon

IPC: G21K007/00 ,  G01N023/00

CPC classification number: G01Q70/16 ,  G01N23/225

Abstract: A probe is provided for an SPM (Scanning Probe Microscope), and a method is provided for fabricating the probe in which a double side alignment process is not required to simplify the fabricating. The probe includes a cantilever; a body supporting the cantilever; and a tip formed at an end of the cantilever, wherein the cantilever, the body and the tip are made of silicon, and boron is diffused into the cantilever and a predetermined area of the body. The method includes steps of: forming a first mask layer on an area of a silicon substrate to be formed with the body and the tip; etching the silicon substrate in a predetermined depth using the first mask layer to form the tip; removing the first mask and forming a second mask layer on an area of the silicon substrate except for an area to be formed with the body and the cantilever; forming a boron-diffused layer by diffusing boron into an area to be formed with the cantilever and a predetermined area of the body using the second mask; removing the second mask layer and forming a third mask layer on the boron-diffused layer; and etching the silicon substrate using the third mask layer to form the body and the cantilever.

Abstract translation: 提供了用于SPM（扫描探针显微镜）的探针，并且提供了一种用于制造探针的方法，其中不需要双侧对准工艺来简化制造。 探头包括悬臂; 支撑悬臂的身体; 以及形成在所述悬臂的端部的尖端，其中所述悬臂，所述主体和所述尖端由硅制成，并且硼扩散到所述悬臂和所述主体的预定区域。 该方法包括以下步骤：在要与主体和尖端形成的硅衬底的区域上形成第一掩模层; 使用第一掩模层以预定深度蚀刻硅衬底以形成尖端; 除去所述第一掩模并在所述硅衬底的除了要与所述主体和所述悬臂形成的区域之外的区域上形成第二掩模层; 通过使用第二掩模将硼扩散到与悬臂形成的区域和身体的预定区域中，形成硼扩散层; 去除所述第二掩模层并在所述硼扩散层上形成第三掩模层; 以及使用所述第三掩模层蚀刻所述硅衬底以形成所述主体和所述悬臂。