公开(公告)号：US20030223103A1

公开(公告)日：2003-12-04

申请号：US10437290

申请日：2003-05-14

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Euisik Yoon ,  Jun-Bo Yoon ,  Hyung-Kew Lee ,  Ji-Hyuk Kim

IPC: G02B026/00

CPC classification number: G02B26/0841

Abstract: Disclosed is a micromirror actuator with the degrees of freedom of two axes operated by an electrostatic force. The micromirror actuator comprises: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that upper surfaces of the upper columns are located at higher positions than upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns. In the micromirror actuator, the micromirror is elevated to a desired height by means of two upper columns, and the dimensions of its structure are reduced by locating torsion bars under the micromirror. Further, the micromirror actuator allows the micromirror to be selectively tilted centering on two torsion bars depending on electrodes to which voltage is applied, thus being used as a three-dimensional optical switch.

Abstract translation: 公开了具有通过静电力操作的两个轴的自由度的微镜致动器。 微反射镜致动器包括：在其上形成有绝缘层的基板; 两个下列彼此间隔开指定距离，并形成在绝缘层上; 延伸在下列的上表面上的第一扭杆; 形成为使得第一和第二扭杆彼此正交的第二扭杆; 四个电极，每个设置在由绝缘层上形成的第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面更高的位置处; 以及位于上列的上表面上的微镜，使得微反射镜由上列支撑。 在微镜致动器中，微镜通过两个上柱升高到所需的高度，并且通过在微反射镜下方定位扭杆来减小其结构的尺寸。 此外，微镜致动器允许微镜根据施加电压的电极以两个扭杆为中心选择性地倾斜，因此被用作三维光开关。

公开(公告)号：US20030048244A1

公开(公告)日：2003-03-13

申请号：US10105281

申请日：2002-03-26

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Koeng Su Lim ,  Jun-Bo Yoon ,  Jin-Wan Jeon

IPC: G09G003/34

CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: Disclosed are a micromirror device made in a simple structure using interdigitated cantilevers and having two stable rotational states, and applications thereof. The micromirror device comprises: (a) a substrate; (b) at least two protruded support posts arranged protrudedly in two columns of left and right sides on the substrate and apart by a predetermined interval from each other; (c) multiple cantilevers formed in parallel with the substrate, each having one end attached at the upper end portion of the respective protruded support posts and made in a thin strip having an elastic restoring force, wherein the cantilevers adjacent to each other are arranged to be parallel and interdigitated; (d) mirror support posts coupled to upper portions of the other ends of the cantilevers; (e) a mirror attached on upper portions of the whole mirror support posts and supported by the mirror support posts; and (f) two electrodes formed at left and right sides on the substrate, for providing an electrostatic force to the mirror, wherein the micromirror device reflects light incident into the mirror in different directions from each other by using an electrostatic force due to a voltage applied between the electrodes and the mirror, and the elastic restoring force of the cantilevers. The micromirror device can drive the mirror in two directions and adjust a rotational angle of the mirror using the electrostatic force due to a potential difference between the electrodes and the mirror for reflecting incident light, and the elastic restoring force of the cantilevers.

Abstract translation: 公开了以简单结构制造的微反射镜装置，其使用交叉悬臂并具有两个稳定的旋转状态及其应用。 所述微镜器件包括：（a）衬底; （b）至少两个突出的支撑柱，其突出地设置在基板的左右两列中，彼此隔开预定的间隔; （c）与基板平行地形成的多个悬臂，每个悬臂与相应的突出的支柱的上端部连接，并且制成具有弹性恢复力的薄带，其中彼此相邻的悬臂布置成 平行和交叉; （d）耦合到悬臂的另一端的上部的镜支撑柱; （e）镜子，其安装在整个反射镜支撑柱的上部并由镜支撑柱支撑; 和（f）在基板上的左右两侧形成的两个电极，用于向反射镜提供静电力，其中微反射镜装置通过使用由于电压而产生的静电力使彼此不同方向的入射到反射镜中的光反射 施加在电极和反射镜之间，以及悬臂的弹性恢复力。 微镜装置可以在两个方向上驱动反射镜，并且由于电极和用于反射入射光的反射镜之间的电位差以及悬臂的弹性恢复力，使用静电力来调整反射镜的旋转角度。

公开(公告)号：US20030015936A1

公开(公告)日：2003-01-23

申请号：US10194013

申请日：2002-07-15

Applicant: Korea Advanced Institute of Science And Technology

Inventor： Euisik Yoon ,  Jun-Bo Yoon ,  Hyung-Kew Lee

IPC: H02N001/00

CPC classification number: H02N1/008 ,  H02N1/006

Abstract: Disclosed is an electrostatic actuator. A multi-layered auxiliary electrode is further arranged between main electrode and actuating body, and positive charge or negative charge is applied to main electrode, respective auxiliary electrodes, and actuating body such that electrostatic attractive force is generated between auxiliary electrodes adjacent to the main electrode, between adjacent auxiliary electrodes, and between auxiliary electrodes adjacent to the actuating body. According to the invention, distance between the induced charges is shortened, so that electrostatic attractive force therebetween increases, thereby capable of maintaining an actuating range equal to or larger than the conventional electrostatic actuator. The electrostatic actuator according to the present invention can be applied to various MEMS devices, such as an optical switch in which a mirror is formed in the actuator, a radio frequency (RF) switch, or a variable electrostatic capacitor, or the like.

Abstract translation: 公开了一种静电致动器。 在主电极和致动体之间还配置有多层辅助电极，并且对主电极，各辅助电极和致动体施加正电荷或负电荷，使得在与主电极相邻的辅助电极之间产生静电吸引力 ，在相邻的辅助电极之间，以及在与致动体相邻的辅助电极之间。 根据本发明，感应电荷之间的距离缩短，使得其间的静电吸引力增加，从而能够维持等于或大于常规静电致动器的致动范围。 根据本发明的静电致动器可以应用于诸如在致动器中形成反射镜的光开关，射频（RF）开关或可变静电电容器等的各种MEMS器件。