公开(公告)号：US3699334A

公开(公告)日：1972-10-17

申请号：US3699334D

申请日：1969-06-16

Applicant: KOLLSMAN INSTR CORP

Inventor： COHEN MURRAY F ,  TARASEVICH MICHAEL

IPC: H01J37/02 ,  H01J37/30 ,  H01J37/304 ,  H01J37/28

CPC classification number: H01J37/3005 ,  G05B2219/42251 ,  G05B2219/43147 ,  H01J37/026 ,  H01J37/304

Abstract: A process and apparatus for controllably eroding the surface of hard materials such as fused quartz, glass, metals and ceramics by the bombardment of the positive ions. Focused argon ions accelerated by potentials of up to 120,000 volts and with a constant beam current are controlled in direction to cause surface erosion of a workpiece to accuracies of up to one-one hundredth of a wavelength of green light. The workpiece is moved at a controlled rate in combination with the control of the beam direction to obtain a controlled erosion pattern over the surface of the workpiece. In another embodiment, an intensity modulated beam current is used. An electron beam is directed at the workpiece in a pattern which surrounds the ion beam to prevent the building up of a positive charge on the work surface. The progress of the erosion is observed and measured by an interferometer system. The movement of the ion beam and workpiece can follow a programmed automatic sequence.

Abstract translation: 用于通过轰击正离子可控地侵蚀诸如熔融石英，玻璃，金属和陶瓷的硬质材料的表面的方法和装置。 通过高达120,000伏特的电压加速并且具有恒定的束电流的聚焦的氩离子被控制在使得工件的表面侵蚀的精确度达到绿光波长的百分之一点的方向上。 工件以受控的速度与光束方向的控制相结合地移动，以在工件的表面上获得受控的侵蚀图案。 在另一实施例中，使用强度调制束电流。 电子束以围绕离子束的图案指向工件，以防止在工作表面上积累正电荷。 通过干涉仪系统观察和测量侵蚀的进展。 离子束和工件的移动可以遵循编程的自动序列。