公开(公告)号：US10785394B2

公开(公告)日：2020-09-22

申请号：US15207364

申请日：2016-07-11

Applicant: KLA-Tencor Corporation

Inventor： Jeremy Nesbitt ,  Joshua Knight ,  Timothy Russin ,  Vadim Palshin ,  Suneet Luniya ,  Kevin Lai ,  Mike Murugan ,  Mark Bailey

IPC: H04N5/225 ,  G01N21/956 ,  G01N21/95 ,  G01M11/08

Abstract: An inspection system may include an optical component configured to deliver inspection light to a subject and a detector configured to obtain an image of the subject based on the inspection light delivered to the subject. The inspection system may also include a processor in communication with the optical component and the detector. The processor may be configured to: measure an aberration of the optical component based on the image of the subject obtained by the detector; and adjust the optical component to compensate for a change in the aberration.