公开(公告)号：US09513230B2

公开(公告)日：2016-12-06

申请号：US14095918

申请日：2013-12-03

Applicant: KLA-Tencor Corporation

Inventor： John Gerling ,  Edward Wagner ,  Mehran Nasser-Ghodsi ,  Garrett Pickard ,  Tomas Plettner ,  Robert Haynes ,  Christopher Sears

IPC: G01N27/82 ,  G01N21/95 ,  G01B7/28 ,  G01B11/24 ,  G01N21/956 ,  G01B7/06 ,  G01B11/06 ,  G01B7/02 ,  G01B21/02 ,  H04N5/225 ,  H04N7/18

CPC classification number: G01N21/9501 ,  G01B7/02 ,  G01B7/102 ,  G01B7/28 ,  G01B11/0608 ,  G01B11/24 ,  G01B21/02 ,  G01N21/956 ,  G01N27/82 ,  H04N5/2251 ,  H04N7/18

Abstract: A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 测量系统被配置为提供工件的目视检查，三维磁场图和高度测量。 一个阶段被配置成将所需的工具上的兴趣点放在所需的测量工具下。 可以独立地或一起使用光场，磁场和高度信息，以便将工件的制造过程中的缺陷相关联。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20140218503A1

公开(公告)日：2014-08-07

申请号：US14095918

申请日：2013-12-03

Applicant: KLA-Tencor Corporation

Inventor： John Gerling ,  Edward Wagner ,  Mehran Nasser-Ghodsi ,  Garrett Pickard ,  Tomas Plettner ,  Robert Haynes ,  Christopher Sears

IPC: G01N21/95 ,  H04N7/18 ,  G01B21/02 ,  H04N5/225 ,  G01N27/82 ,  G01B7/02

CPC classification number: G01N21/9501 ,  G01B7/02 ,  G01B7/102 ,  G01B7/28 ,  G01B11/0608 ,  G01B11/24 ,  G01B21/02 ,  G01N21/956 ,  G01N27/82 ,  H04N5/2251 ,  H04N7/18

Abstract: A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 测量系统被配置为提供工件的目视检查，三维磁场图和高度测量。 一个阶段被配置成将所需的工具上的兴趣点放在所需的测量工具下。 可以独立地或一起使用光场，磁场和高度信息，以便将工件的制造过程中的缺陷相关联。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。