公开(公告)号：US20210074567A1

公开(公告)日：2021-03-11

申请号：US17013213

申请日：2020-09-04

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/67

Abstract: A teaching substrate is loaded into a load port of an equipment front-end module (EFEM) of a fabrication or inspection tool. The EFEM includes a substrate-handling robot. The teaching substrate includes a plurality of sensors and one or more wireless transceivers. The tool includes a plurality of stations. With the teaching substrate in the EFEM, the substrate-handling robot moves along an initial route and sensor data are wirelessly received from the teaching substrate. Based at least in part on the sensor data, a modified route distinct from the initial route is determined. The substrate-handling robot moves along the modified route, handling the teaching substrate. Based at least in part on the sensor data, positions of the plurality of stations are determined.

公开(公告)号：US20240170318A1

公开(公告)日：2024-05-23

申请号：US18424421

申请日：2024-01-26

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/681 ,  H01L21/67259 ,  H01L21/68707

Abstract: A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras.

公开(公告)号：US11908722B2

公开(公告)日：2024-02-20

申请号：US17013213

申请日：2020-09-04

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67259 ,  H01L21/68707

Abstract: A teaching substrate is loaded into a load port of an equipment front-end module (EFEM) of a fabrication or inspection tool. The EFEM includes a substrate-handling robot. The teaching substrate includes a plurality of sensors and one or more wireless transceivers. The tool includes a plurality of stations. With the teaching substrate in the EFEM, the substrate-handling robot moves along an initial route and sensor data are wirelessly received from the teaching substrate. Based at least in part on the sensor data, a modified route distinct from the initial route is determined. The substrate-handling robot moves along the modified route, handling the teaching substrate. Based at least in part on the sensor data, positions of the plurality of stations are determined.