公开(公告)号：US20210074567A1

公开(公告)日：2021-03-11

申请号：US17013213

申请日：2020-09-04

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/67

Abstract: A teaching substrate is loaded into a load port of an equipment front-end module (EFEM) of a fabrication or inspection tool. The EFEM includes a substrate-handling robot. The teaching substrate includes a plurality of sensors and one or more wireless transceivers. The tool includes a plurality of stations. With the teaching substrate in the EFEM, the substrate-handling robot moves along an initial route and sensor data are wirelessly received from the teaching substrate. Based at least in part on the sensor data, a modified route distinct from the initial route is determined. The substrate-handling robot moves along the modified route, handling the teaching substrate. Based at least in part on the sensor data, positions of the plurality of stations are determined.

公开(公告)号：US20240170318A1

公开(公告)日：2024-05-23

申请号：US18424421

申请日：2024-01-26

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/681 ,  H01L21/67259 ,  H01L21/68707

Abstract: A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras.

公开(公告)号：US20240353686A1

公开(公告)日：2024-10-24

申请号：US18633983

申请日：2024-04-12

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Amir Aizen ,  Assaf Hacohen ,  Stanislav Stepanov ,  Sylvi Haendel ,  Ilia Lutsker

IPC: G02B27/09 ,  G02B27/10 ,  H01S3/00

CPC classification number: G02B27/0944 ,  G02B27/0905 ,  G02B27/0994 ,  G02B27/1086 ,  H01S3/005

Abstract: A light source includes one or more deflection mirrors to deflect a laser beam at varying angles and diffractive optics to diffract the deflected laser beam. The light source also includes a multi-mode fiber to transmit the diffracted laser beam and a plurality of lenses, disposed between the diffractive optics and the multi-mode fiber, to provide the diffracted laser beam to the multi-mode fiber.

公开(公告)号：US11908722B2

公开(公告)日：2024-02-20

申请号：US17013213

申请日：2020-09-04

Applicant: KLA Corporation

Inventor： Avner Safrani ,  Shai Mark ,  Amir Aizen ,  Maor Arbit

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67259 ,  H01L21/68707

Abstract: A teaching substrate is loaded into a load port of an equipment front-end module (EFEM) of a fabrication or inspection tool. The EFEM includes a substrate-handling robot. The teaching substrate includes a plurality of sensors and one or more wireless transceivers. The tool includes a plurality of stations. With the teaching substrate in the EFEM, the substrate-handling robot moves along an initial route and sensor data are wirelessly received from the teaching substrate. Based at least in part on the sensor data, a modified route distinct from the initial route is determined. The substrate-handling robot moves along the modified route, handling the teaching substrate. Based at least in part on the sensor data, positions of the plurality of stations are determined.