公开(公告)号：US20220307990A1

公开(公告)日：2022-09-29

申请号：US17339531

申请日：2021-06-04

Applicant: KLA Corporation

Inventor： John Charles Robinson ,  Stilian Pandev ,  Shifang Li ,  Mike Von Den Hoff ,  Justin Lach ,  Barry Saville ,  David W. Price ,  Robert J. Rathert ,  Chet V. Lenox ,  Thomas Groos ,  Oreste Donzella

IPC: G01N21/95 ,  G01N21/55 ,  G06N20/00 ,  G01B11/27

Abstract: A die screening system may receive die-resolved metrology data for a population of dies on one or more samples from the one or more in-line metrology tools after one or more fabrication steps, where the die-resolved metrology data includes images generated using one or more measurement configurations of the one or more in-line metrology tools. In this way, the die-resolved metrology data provides many measurement channels per die, where a particular measurement channel includes data from a particular pixel of a particular image. The controller may then generate screening data for the population of dies from the die-resolved metrology data, where the screening data includes a subset of the plurality of measurement channels of the die-resolved metrology data, and screen the plurality of dies into two or more disposition classes including at least outlier dies based on variability in the screening data.

公开(公告)号：US20230236132A1

公开(公告)日：2023-07-27

申请号：US17732212

申请日：2022-04-28

Applicant: KLA Corporation

Inventor： David W. Price ,  Robert J. Rathert ,  Chet V. Lenox ,  Oreste Donzella ,  Justin Lach ,  John Robinson

IPC: G01N21/88 ,  H01L21/66 ,  G01N21/95 ,  G03F7/20

CPC classification number: G01N21/8851 ,  H01L22/12 ,  G01N21/9501 ,  H01L22/14 ,  G03F7/7065 ,  G01N2021/8854

Abstract: Systems and methods for determining a diagnosis of a screening system are disclosed. Such systems and methods include identifying defect results based on inline characterization tool data, identifying electrical test results based on electrical test data, generating one or more correlation metrics based on the defect results and the electrical test results, and determining at least one diagnosis of the screening system based on the one or more correlation metrics, the diagnosis corresponding to a performance of the screening system.

公开(公告)号：US20220196723A1

公开(公告)日：2022-06-23

申请号：US17321263

申请日：2021-05-14

Applicant: KLA Corporation

Inventor： David W. Price ,  Robert J. Rathert ,  Chet V. Lenox ,  Kara L. Sherman ,  Teng Song Lim ,  Thomas Groos ,  Mike Von Den Hoff ,  Oreste Donzella ,  Narayani Narasimhan ,  Barry Saville ,  Justin Lach ,  John Robinson

IPC: G01R31/26 ,  H01L21/66

Abstract: Automatically identifying defect-based test coverage gaps in semiconductor devices includes determining a plurality of apparent killer defects on one or more semiconductor devices with a plurality of semiconductor dies based on characterization measurements of the one or more semiconductor devices acquired by one or more semiconductor fabrication subsystems, determining at least one semiconductor die which passes at least one test based on test measurements acquired by one or more test tool subsystems, correlate the characterization measurements with the test measurements to determine at least one apparent killer defect on the at least one semiconductor die which passes the at least one test, and determining one or more gap areas on the one or more semiconductor devices for defect-based test coverage based on the at least one apparent killer defect on the at least one semiconductor die which passes the at least one test.