公开(公告)号：US11637030B2

公开(公告)日：2023-04-25

申请号：US16900039

申请日：2020-06-12

Applicant: KLA Corporation

Inventor： Yoram Uziel ,  Ulrich Pohlmann ,  Frank Laske ,  Nadav Gutman ,  Ariel Hildesheim ,  Aviv Balan

IPC: H01L21/68 ,  H01L21/687 ,  H01L21/67

Abstract: A first x-y translation stage, a second x-y translation stage, and a chuck are disposed in a chamber. The chuck is situated above and coupled to the second x-y translation stage, which is situated above and coupled to the first x-y translation stage. The chuck is configured to support a substrate and to be translated by the first and second x-y stages in x- and y-directions, which are substantially parallel to a surface of the chuck on which the substrate is to be mounted. A first barrier and a second barrier are also disposed in the chamber. The first barrier is coupled to the first x-y translation stage to separate a first zone of the chamber from a second zone of the chamber. The second barrier is coupled to the second x-y translation stage to separate the first zone of the chamber from a third zone of the chamber.

公开(公告)号：US11209373B2

公开(公告)日：2021-12-28

申请号：US16902640

申请日：2020-06-16

Applicant: KLA Corporation

Inventor： Aviv Balan

IPC: G03B27/58 ,  G01N21/95

Abstract: A second stage is disposed on the first stage. The second stage provides six degrees of freedom. A chuck that holds a workpiece is disposed on the second stage. Actuators that enable movement in three directions are disposed on the second stage. The first stage and the second stage move independent of each other during inspection of the workpiece on the chuck.