公开(公告)号：US20130228698A1

公开(公告)日：2013-09-05

申请号：US13777071

申请日：2013-02-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko KAKUTANI ,  Kiyoshi HASHIMOTO ,  Kiyokazu SATO ,  Akihiro OSANAI ,  Takeshi YOSHIYUKI ,  Tsutomu KURUSU ,  Kazuo HAYASHI

IPC: H01J27/24

CPC classification number: H01J27/24

Abstract: According to one embodiments, an ion source connected with a vacuum-exhausted downstream apparatus is provided. The ion source includes a vacuum chamber which is vacuum-exhausted, a target which is set in the vacuum chamber and generates ions by irradiation of a laser beam, a transportation unit which transports the ions generated by the target to the downstream apparatus, and a vacuum sealing unit which seals the transportation unit so as to separate vacuum-conditions of the vacuum chamber side and the downstream apparatus side before exchanging the target set in the vacuum chamber.

Abstract translation: 根据一个实施例，提供了与真空排出的下游装置连接的离子源。 离子源包括被真空排出的真空室，被设置在真空室中并通过照射激光束产生离子的靶，将由靶产生的离子输送到下游装置的输送单元，以及 真空密封单元，其在更换真空室内的目标组之前密封输送单元以分离真空室侧和下游装置侧的真空条件。

公开(公告)号：US20130161530A1

公开(公告)日：2013-06-27

申请号：US13771584

申请日：2013-02-20

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kazuo HAYASHI ,  Akiko KAKUTANI ,  Akihiro OSANAI ,  Kiyokazu SATO ,  Tsutomu KURUSU ,  Takeshi YOSHIYUKI

IPC: H01J27/02 ,  H01J27/24

CPC classification number: H01J37/08 ,  H01J27/24 ,  H01J2237/022 ,  H01J2237/08 ,  H01J2237/186 ,  H01J2237/31701

Abstract: According to one embodiment, a laser ion source is configured to generate ions by application of a laser beam, the laser ion source including a case to be evacuated, an irradiation box disposed in the case and including a target which generates ions by irradiation of laser light, an ion beam extraction mechanism which electrostatically extracts ions from the irradiation box and guides the ions outside the case as an ion beam, a valve provided to an ion beam outlet of the case, the valve being opened at ion beam emission and being closed at other times, and a shutter provided between the valve and the irradiation box, the shutter being intermittently opened at ion beam emission and being closed at other times.

Abstract translation: 根据一个实施例，激光离子源被配置为通过施加激光束产生离子，激光离子源包括要抽真空的壳体，设置在壳体中的照射盒，并且包括通过照射激光产生离子的靶 光，离子束提取机构，其从照射箱静电提取离子并将离子引导到壳体外部作为离子束;阀设置在壳体的离子束出口处，阀门以离子束发射打开并被封闭 在其他时间，以及设置在阀和照射箱之间的闸门，闸门以离子束发射间歇地打开并且在其它时间被关闭。

公开(公告)号：US20130221234A1

公开(公告)日：2013-08-29

申请号：US13777237

申请日：2013-02-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko KAKUTANI ,  Kazuo HAYASHI ,  Akihiro OSANAI ,  Kiyokazu SATO ,  Takeshi YOSHIYUKI ,  Tsutomu KURUSU

IPC: H01J27/24

CPC classification number: H01J27/24 ,  H01J49/161 ,  H01J49/162 ,  H01J49/164

Abstract: According to one embodiment, there is provided a laser ion source. The laser ion source includes a vacuum chamber which is vacuum-exhausted and in which a target is transported and set, a valve which is opened when the target is transported into the vacuum chamber and is closed except for the transportation, a target supply chamber which holds the target to be movable, and a transportation unit which transports to the vacuum chamber the target held on the target supply chamber while opening the valve after the target supply chamber is vacuum-exhausted while closing the valve.

Abstract translation: 根据一个实施例，提供了一种激光离子源。 激光离子源包括真空室，真空排出，目标物被输送和固定，当靶被输送到真空室中时被打开并且除运输之外是关闭的阀;目标供给室， 保持能够移动的目标;以及运送单元，其在关闭所述阀的同时在所述目标供给室被真空排气之后，在打开所述阀的同时将保持在所述目标供给室上的所述目标物输送到所述真空室。