Invention Application
- Patent Title: LASER ION SOURCE
- Patent Title (中): 激光源
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Application No.: US13777237Application Date: 2013-02-26
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Publication No.: US20130221234A1Publication Date: 2013-08-29
- Inventor: Akiko KAKUTANI , Kazuo HAYASHI , Akihiro OSANAI , Kiyokazu SATO , Takeshi YOSHIYUKI , Tsutomu KURUSU
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Priority: JP2012-043816 20120229
- Main IPC: H01J27/24
- IPC: H01J27/24

Abstract:
According to one embodiment, there is provided a laser ion source. The laser ion source includes a vacuum chamber which is vacuum-exhausted and in which a target is transported and set, a valve which is opened when the target is transported into the vacuum chamber and is closed except for the transportation, a target supply chamber which holds the target to be movable, and a transportation unit which transports to the vacuum chamber the target held on the target supply chamber while opening the valve after the target supply chamber is vacuum-exhausted while closing the valve.
Public/Granted literature
- US09251991B2 Laser ion source Public/Granted day:2016-02-02
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