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    Microactuator for precisely aligning an optical fiber and an associated fabrication method
    2.
    发明授权
    Microactuator for precisely aligning an optical fiber and an associated fabrication method 失效
    用于精确对准光纤的微致动器和相关的制造方法

    公开(公告)号：US5870518A

    公开(公告)日：1999-02-09

    申请号：US916089

    申请日：1997-08-21

    申请人： John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

    发明人： John M. Haake ,  Vijayakumar R. Dhuler ,  Robert L. Wood

    IPC分类号： G02B6/38 ,  G02B6/42 ,  G02B6/36

    CPC分类号： G02B6/4226 ,  G02B6/3803

    摘要： A microactuator for precisely aligning an optical fiber with an optical device and an associated method of fabrication thereof. The microactuator includes a carrier positioned on a base for holding the optical fiber. An alignment frame positioned on the carrier remotely from the optical fiber is adapted to engage the base and the carrier. The carrier is movable relative to the base and the alignment frame. At least one actuator has a beam for engaging the alignment frame and a pad affixed to the carrier. The beam and pad move relative to each other when the actuator is actuated. The actuator is positioned on the carrier so that the beam engages and applies a force to the alignment frame in a predetermined direction when the actuator is actuated. This causes the pad to apply an opposite force to the carrier causing the carrier to move in a direction opposite the predetermined direction for controllably positioning the carrier relative to the base and precisely aligning the optical fiber with the optical device.

    摘要翻译： 一种用于将光纤与光学装置精确对准的微致动器及其制造方法。 微致动器包括位于基座上用于保持光纤的载体。 定位在远离光纤的载体上的对准框架适于接合基座和载体。 托架可相对于基座和对准框架移动。 至少一个致动器具有用于接合对准框架的梁和固定到托架的垫。 当致动器被致动时，梁和垫相对于彼此移动。 致动器定位在载体上，使得当致动器致动时，梁在预定方向上接合并向对准框架施加力。 这使得焊盘对载体施加相反的力，导致载体在与预定方向相反的方向上移动，以便相对于底座可控地定位载体，并将光纤与光学装置精确对准。

    Thermal arched beam microelectromechanical actuators
    3.
    发明授权
    Thermal arched beam microelectromechanical actuators 失效
    热拱形梁微机电执行机构

    公开(公告)号：US5909078A

    公开(公告)日：1999-06-01

    申请号：US767192

    申请日：1996-12-16

    申请人： Robert L. Wood ,  Vijayakumar R. Dhuler

    发明人： Robert L. Wood ,  Vijayakumar R. Dhuler

    IPC分类号： B81B3/00 ,  F03G7/06 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H02N11/00 ,  F01L1/00 ,  H01G7/00

    CPC分类号： F03G7/06 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

    摘要： Microelectromechanical actuators include at least one arched beam which extends between spaced apart supports on a microelectronic substrate. The arched beams are arched in a predetermined direction and expand upon application of heat thereto. A coupler mechanically couples the plurality of arched beams between the spaced apart supports. Heat is applied to at least one of the arched beams to cause further arching as a result of thermal expansion thereof, and thereby cause displacement of the coupler along the predetermined direction. Internal heating of the arched beams by passing current through the arched beams may be used. External heating sources may also be used. The coupler may be attached to a capacitor plate to provide capacitive sensors such as flow sensors. The coupler may also be attached to a valve plate to provide microvalves. Compensating arched beams may be used to provide ambient temperature insensitivity.

    摘要翻译： 微机电致动器包括至少一个拱形梁，其在微电子衬底上的间隔开的支撑件之间延伸。 拱形梁在预定方向上拱形并且在施加热量时膨胀。 耦合器在间隔开的支撑件之间机械耦合多个拱形梁。 对至少一个拱形梁施加热量，由于其热膨胀而导致进一步的拱起，从而引起联接器沿着预定方向的位移。 可以使用通过拱形梁使电流通过拱形梁的内部加热。 也可以使用外部加热源。 耦合器可以附接到电容器板以提供诸如流量传感器的电容式传感器。 联接器还可以附接到阀板以提供微型阀。 补偿拱形梁可用于提供环境温度不敏感性。

    Microelectromechanical actuators including driven arched beams for mechanical advantage
    6.
    发明授权
    Microelectromechanical actuators including driven arched beams for mechanical advantage 失效
    微机电致动器包括驱动的拱形梁，用于机械优点

    公开(公告)号：US06360539B1

    公开(公告)日：2002-03-26

    申请号：US09542672

    申请日：2000-04-05

    申请人： Edward A. Hill ,  Vijayakumar R. Dhuler ,  Allen B. Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

    发明人： Edward A. Hill ,  Vijayakumar R. Dhuler ,  Allen B. Cowen ,  Ramaswamy Mahadevan ,  Robert L. Wood

    IPC分类号： F01B2910

    CPC分类号： H01H1/0036 ,  H01H61/02 ,  H01H2061/006

    摘要： Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.

    摘要翻译： 微机电致动器包括衬底，衬底上的间隔开的支撑件和在间隔开的支撑件之间延伸的热拱形梁，并且在其加热时进一步拱形地沿着衬底运动。 一个或多个被驱动的弓形梁联接到热拱形梁。 被驱动的拱形梁的端部相对于彼此移动，以响应于热拱形梁的进一步拱形来改变被驱动的弓形梁的拱形，以便驱动的拱形梁的运动。 被驱动的弓形梁还包括在其端部之间的中间部分处的致动元件，其中相应的致动元件机械地联接到相关联的被驱动的弓形梁以与其一起运动，并且与剩余的被驱动的弓形梁机械地分离以便独立运动 其中。

    MEMS variable optical attenuator
    8.
    发明授权
    MEMS variable optical attenuator 失效
    MEMS可变光衰减器

    公开(公告)号：US06275320B1

    公开(公告)日：2001-08-14

    申请号：US09405789

    申请日：1999-09-27

    申请人： Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    发明人： Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    IPC分类号： G02B2600

    CPC分类号： G02B26/0841 ,  B81B3/0054 ,  B81B2201/038 ,  B81B2201/047 ,  G02B6/266

    摘要： A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.

    摘要翻译： 提供了一种能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。 可变光衰减器能够衰减其光轴平行且垂直于衬底的光束。 另外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。 在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。 另外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。 该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。 热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。 在激活时，热双压电晶片截取光束的路径并提供所需的光衰减水平。 本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。