公开(公告)号：US11742176B2

公开(公告)日：2023-08-29

申请号：US17536288

申请日：2021-11-29

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yoshiki Oyama

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/265 ,  H01J2237/2802

Abstract: A transmission electron microscope includes a control unit that: determines an excitation amount of a second illumination system lens based on an excitation amount of first illumination system lens such that the second illumination system lens satisfies a first optical condition; and determines a control amount of a first deflector and a control amount of a second deflector based on the excitation amount of the second illumination system lens such that the first deflector and the second deflector satisfy a second optical condition. The first optical condition is for a convergence angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed, and the second optical condition is for an illuminating position of the electron beam and an illuminating angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed.

公开(公告)号：US20220172924A1

公开(公告)日：2022-06-02

申请号：US17536288

申请日：2021-11-29

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yoshiki Oyama

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/26

Abstract: A transmission electron microscope includes a control unit that: determines an excitation amount of a second illumination system lens based on an excitation amount of first illumination system lens such that the second illumination system lens satisfies a first optical condition; and determines a control amount of a first deflector and a control amount of a second deflector based on the excitation amount of the second illumination system lens such that the first deflector and the second deflector satisfy a second optical condition. The first optical condition is for a convergence angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed, and the second optical condition is for an illuminating position of the electron beam and an illuminating angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed.