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    Fluid flow measuring and proportional fluid flow control device
    2.
    发明授权
    Fluid flow measuring and proportional fluid flow control device 有权
    流体流量测量和比例流体流量控制装置

    公开(公告)号：US07885773B2

    公开(公告)日：2011-02-08

    申请号：US12253732

    申请日：2008-10-17

    申请人： Christopher Wargo ,  J. Karl Niermeyer ,  Jieh-Hwa Shyu ,  Craig L. Brodeur ,  William Basser

    发明人： Christopher Wargo ,  J. Karl Niermeyer ,  Jieh-Hwa Shyu ,  Craig L. Brodeur ,  William Basser

    IPC分类号： G06F19/00

    CPC分类号： G01F1/44 ,  G01F1/363 ,  G01F1/50 ,  G01F25/0007 ,  G05D7/0635 ,  G06N7/02

    摘要： Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

    摘要翻译： 本文公开的实施例提供了限制性流量测量装置，阀门改进和控制液体流动的信号控制装置和过程，包括用于单液体校准的控制过程。 在一些实施例中，流体流动装置可以使用单个标准校准流体进行校准。 通过流量计的两个压力传感器感测到的压力之间的第一压力差来测量通过流量计的第一流体的流体流量。 通过流量计的第二流体的流体流量通过计算由相同的两个压力传感器感测的压力之间的第二压力差来测量。 基于第一和第二流体的流量，流体密度和计算的压力差之间的关系来确定校准系数。 然后确定并存储每种流体的校准系数与运动粘度之间的关系。

    System and method for controlled mixing of fluids via temperature
    3.
    发明授权
    System and method for controlled mixing of fluids via temperature 失效
    通过温度控制流体混合的系统和方法

    公开(公告)号：US07494265B2

    公开(公告)日：2009-02-24

    申请号：US11386427

    申请日：2006-03-22

    申请人： J. Karl Niermeyer ,  Robert F. McLoughlin ,  Joseph E. Smith

    发明人： J. Karl Niermeyer ,  Robert F. McLoughlin ,  Joseph E. Smith

    IPC分类号： B01F15/04

    CPC分类号： B01F15/0416 ,  B01F2215/0096 ,  G05D11/135 ,  G05D11/16 ,  G05D23/1393 ,  H01L21/67075 ,  Y10T137/0329

    摘要： Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.

    摘要翻译： 本发明的实施例提供了用于混合流体的连续流动生产的系统和方法。 混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。 通常，将两种不同温度的流体流供应到混合器。 可以调节每个输入流体的流速以产生所需流速和温度的混合流体。 例如，质量流量控制器可以调节去离子水的热和冷流的流速，以产生所需流速和温度的去离子水流。

    Disposable fluid separation device and manifold assembly design with easy change-out feature
    4.
    发明授权
    Disposable fluid separation device and manifold assembly design with easy change-out feature 有权
    一次性流体分离装置和歧管组件设计，易于更换

    公开(公告)号：US07378017B2

    公开(公告)日：2008-05-27

    申请号：US11434668

    申请日：2006-05-16

    申请人： Ralph Stankowski ,  J. Karl Niermeyer ,  William Wacks

    发明人： Ralph Stankowski ,  J. Karl Niermeyer ,  William Wacks

    IPC分类号： B01D27/08 ,  B01D35/153 ,  B01D35/30

    CPC分类号： B01D29/606 ,  A61M2209/082 ,  B01D29/96 ,  B01D35/153 ,  B01D2201/40 ,  B01D2201/4023

    摘要： Fluid separation assembly that allows easy and fast change-out even in confined spaces, and also minimizes or eliminates leakage during change-out. A fluid separation unit having a housing containing separation means, the housing having an inlet and an outlet spaced from the inlet, each including a fitting for attachment of the housing to a manifold or other device allowing fluid communication through the separation means to a point of use is provided. The fittings are designed for quick connect/disconnect, and for minimal or no leakage. The fittings may be on opposite ends, with top and bottom fittings of different configurations, thereby ensuring proper installation of the assembly. The particular medium to be separated is not particularly limited, and can include slurries, fluids including water, and pre-loaded chromatography columns.

    摘要翻译： 流体分离组件，即使在狭窄的空间内也可以方便快速地进行切换，并且在切换期间也可最大程度地减少或消除泄漏。 流体分离单元具有容纳分离装置的壳体，所述壳体具有与入口间隔开的入口和出口，每个入口和出口均包括用于将壳体附接到歧管或其它装置的配件，允许通过分离装置的流体连通到 提供使用。 配件设计用于快速连接/断开，并且最小或无泄漏。 配件可以在相对的两端，具有不同配置的顶部和底部配件，从而确保组件的正确安装。 待分离的特定介质没有特别限制，并且可以包括浆液，包括水的流体和预加载的色谱柱。

    System and method for flow monitoring and control
    6.
    发明授权
    System and method for flow monitoring and control 有权
    流量监控系统及方法

    公开(公告)号：US07610117B2

    公开(公告)日：2009-10-27

    申请号：US11229912

    申请日：2005-09-19

    申请人： Craig L. Brodeur ,  Marc Laverdiere ,  Robert F. McLoughlin ,  J. Karl Niermeyer ,  Jieh-Hwa Shyu

    发明人： Craig L. Brodeur ,  Marc Laverdiere ,  Robert F. McLoughlin ,  J. Karl Niermeyer ,  Jieh-Hwa Shyu

    IPC分类号： G06F19/00

    CPC分类号： G01F1/363 ,  G05D7/0635 ,  Y10T137/7761

    摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

    摘要翻译： 本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力 控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。 控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。 控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。 操作模式可以自动切换。

    METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE
    7.
    发明申请
    METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE 失效
    通过温度控制流体混合的方法

    公开(公告)号：US20090116334A1

    公开(公告)日：2009-05-07

    申请号：US12350688

    申请日：2009-01-08

    申请人： J. Karl Niermeyer ,  Robert F. McLoughlin ,  Joseph E. Smith

    发明人： J. Karl Niermeyer ,  Robert F. McLoughlin ,  Joseph E. Smith

    IPC分类号： B01F15/06

    CPC分类号： B01F15/0416 ,  B01F2215/0096 ,  G05D11/135 ,  G05D11/16 ,  G05D23/1393 ,  H01L21/67075 ,  Y10T137/0329

    摘要： Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.

    摘要翻译： 本发明的实施例提供了一种用于混合流体的连续流动生产的方法。 混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。 通常，将两种不同温度的流体流供应到混合器。 可以调节每个输入流体的流速以产生所需流速和温度的混合流体。 例如，质量流量控制器可以调节去离子水的热和冷流的流速，以产生所需流速和温度的去离子水流。

    SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE
    8.
    发明申请
    SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
    化学沉淀和溶解的系统与方法

    公开(公告)号：US20080185044A1

    公开(公告)日：2008-08-07

    申请号：US12024689

    申请日：2008-02-01

    申请人： Michael Clarke ,  Marc Laverdiere ,  Robert F. McLoughlin ,  J. Karl Niermeyer ,  Joseph E. Smith ,  Rosario Mollica

    发明人： Michael Clarke ,  Marc Laverdiere ,  Robert F. McLoughlin ,  J. Karl Niermeyer ,  Joseph E. Smith ,  Rosario Mollica

    IPC分类号： B67D5/56 ,  G05D11/13 ,  B01F15/04

    CPC分类号： B01F5/0685 ,  B01F3/088 ,  G05D11/132 ,  Y10T137/0329

    摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.

    摘要翻译： 本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。 在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。 第一阀打开到第一化学源。 活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。 第一阀关闭，第二阀打开到第二化学源。 活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。 关闭第二个阀门并移动活塞以通过分配口分配流体。