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公开(公告)号：US11774308B2
公开(公告)日：2023-10-03
申请号：US17024228
申请日：2020-09-17
CPC分类号： G01L9/0073 , G01L9/0042 , G01N33/0027
摘要： A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
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公开(公告)号：US10571681B2
公开(公告)日：2020-02-25
申请号：US15682671
申请日：2017-08-22
发明人： Roland Meier , Klemens Pruegl , Bernhard Winkler , Thomas Popp , Raimund Foerg
摘要： Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
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公开(公告)号：US20170371148A1
公开(公告)日：2017-12-28
申请号：US15682671
申请日：2017-08-22
发明人： Roland Meier , Klemens Pruegl , Bernhard Winkler , Thomas Popp , Raimund Foerg
CPC分类号： G02B26/001 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2201/047 , B81C1/00158 , B81C1/00476 , B81C1/00539 , G02B26/007
摘要： Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
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4.发明申请MEMBRANE STRUCTURES FOR MICROELECTROMECHANICAL PIXEL AND DISPLAY DEVICES AND SYSTEMS, AND METHODS FOR FORMING MEMBRANE STRUCTURES AND RELATED DEVICES 有权微电子像素和显示器件和系统的膜结构，以及用于形成膜结构和相关器件的方法公开(公告)号：US20150362722A1
公开(公告)日：2015-12-17
申请号：US14722552
申请日：2015-05-27
发明人： Roland Meier , Klemens Pruegl , Bernhard Winkler , Thomas Popp , Raimund Foerg
CPC分类号： G02B26/001 , B81C1/00158 , B81C1/00539 , G02B26/007
摘要： Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
摘要翻译： 实施例涉及微机电系统（MEMS），更具体地涉及包括用于例如显示装置的像素的膜结构。 在实施例中，膜结构包括在硅衬底上形成的腔上方的单晶硅膜。 膜结构可以包括光干涉结构，其根据膜和衬底之间的可变距离透射或反射不同波长的光。 还公开了相关设备，系统和方法。
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公开(公告)号：US20210003466A1
公开(公告)日：2021-01-07
申请号：US17024228
申请日：2020-09-17
摘要： A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
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公开(公告)号：US09798132B2
公开(公告)日：2017-10-24
申请号：US14722552
申请日：2015-05-27
发明人： Roland Meier , Klemens Pruegl , Bernhard Winkler , Thomas Popp , Raimund Foerg
CPC分类号： G02B26/001 , B81C1/00158 , B81C1/00539 , G02B26/007
摘要： Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed.
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公开(公告)号：US20230251154A1
公开(公告)日：2023-08-10
申请号：US18304989
申请日：2023-04-21
CPC分类号： G01L9/0073 , G01N33/0027 , G01L9/0042
摘要： A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
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公开(公告)号：US10859457B2
公开(公告)日：2020-12-08
申请号：US15808044
申请日：2017-11-09
摘要： A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
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公开(公告)号：US20180136064A1
公开(公告)日：2018-05-17
申请号：US15808044
申请日：2017-11-09
CPC分类号： G01L9/0073 , G01L9/0042 , G01N33/0027
摘要： A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
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