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1.发明授权公开(公告)号：US11237090B2
公开(公告)日：2022-02-01
申请号：US16807698
申请日：2020-03-03
Applicant: Infineon Technologies AG
Inventor： Michael Schneider , Alfons Dehe , Manuel Dorfmeister , Christoph Glacer , Ulrich Krumbein , Ulrich Schmid , David Tumpold
IPC: G01N15/06
Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.
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公开(公告)号：US10684163B2
公开(公告)日：2020-06-16
申请号：US15679162
申请日：2017-08-17
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Manuel Dorfmeister , Ulrich Schmid , Michael Schneider
IPC: G01H11/08 , H04R17/02 , H04R31/00 , H01L41/083
Abstract: An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.
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公开(公告)号：US20180052042A1
公开(公告)日：2018-02-22
申请号：US15679162
申请日：2017-08-17
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Manuel Dorfmeister , Ulrich Schmid , Michael Schneider
IPC: G01H11/08 , H01L41/083
Abstract: An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.
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公开(公告)号：US20160353210A1
公开(公告)日：2016-12-01
申请号：US14724224
申请日：2015-05-28
Applicant: Infineon Technologies AG
Inventor： Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Guenter Denifl , Michael Schneider
CPC classification number: B81C1/00158 , B81B3/007 , B81B3/0072 , B81B2201/0257 , B81B2203/0118 , B81B2203/0127 , B81C2201/0167 , B81C2201/0177 , B81C2201/0181 , H04R2201/003
Abstract: A micromechanical structure comprises a substrate and a functional structure arranged at the substrate. The functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure comprises a carbon layer arrangement, wherein a basis material of the carbon layer arrangement is a carbon material.
Abstract translation: 微机械结构包括衬底和布置在衬底上的功能结构。 功能结构包括响应于作用在功能区域上的力而相对于衬底可偏转的功能区域。 功能结构包括碳层布置，其中碳层布置的基础材料是碳材料。
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公开(公告)号：US20180279055A1
公开(公告)日：2018-09-27
申请号：US15928821
申请日：2018-03-22
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Yauheni Belahurau , Manuel Dorfmeister , Christoph Glacer , Manfred Kaltenbacher , Ulrich Schmid , Michael Schneider , David Tumpold
IPC: H04R19/02
CPC classification number: H04R19/02 , H04R1/005 , H04R17/00 , H04R2201/003
Abstract: A microelectromechanical loudspeaker may include: a plurality of elementary loudspeakers each including a drive unit and a diaphragm deflectable by the drive unit, and a controller configured to respectively supply control signals to the drive units. The drive units may be respectively configured to deflect the corresponding diaphragms according to the respective control signals supplied by the controller to generate acoustic waves. The control signal supplied to at least one control unit may have at least one local extremum and a global extremum of a curvature of the control signal with a highest absolute value of the curvature may be located at a position of the control signal preceding a position of the at least one local extremum of the control signal.
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Patent Agency Ranking
公开(公告)号：US20170325025A1
公开(公告)日：2017-11-09
申请号：US15145862
申请日：2016-05-04
Applicant: Infineon Technologies AG
Inventor： Manuel Dorfmeister , Michael Schneider , Manfred Kaltenbacher , Alfons Dehe , Ursula Hedenig , Thomas Grille , Ulrich Schmid
Abstract: Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may include: a substrate; a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm; a controller configured to provide an electrical control signal in response to a digital sound input; wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.
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7.发明申请公开(公告)号：US20200309665A1
公开(公告)日：2020-10-01
申请号：US16807698
申请日：2020-03-03
Applicant: Infineon Technologies AG
Inventor： Michael Schneider , Alfons Dehe , Manuel Dorfmeister , Christoph Glacer , Ulrich Krumbein , Ulrich Schmid , David Tumpold
IPC: G01N15/06
Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.
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公开(公告)号：US10582304B2
公开(公告)日：2020-03-03
申请号：US16186971
申请日：2018-11-12
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Manuel Dorfmeister , Ulrich Schmid , Michael Schneider
Abstract: Diaphragm element arrangements including at least one bistable diaphragm element, which has a first stable state and a second stable state, and corresponding methods are provided. The bistable diaphragm element can be activated above a changeover threshold in order to change over between the first and the second stable state or below the changeover threshold.
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公开(公告)号：US10516943B2
公开(公告)日：2019-12-24
申请号：US15145862
申请日：2016-05-04
Applicant: Infineon Technologies AG
Inventor： Manuel Dorfmeister , Michael Schneider , Manfred Kaltenbacher , Alfons Dehe , Ursula Hedenig , Thomas Grille , Ulrich Schmid
Abstract: Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may include: a substrate; a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm; a controller configured to provide an electrical control signal in response to a digital sound input; wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.
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公开(公告)号：US20190149926A1
公开(公告)日：2019-05-16
申请号：US16186971
申请日：2018-11-12
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Manuel Dorfmeister , Ulrich Schmid , Michael Schneider
CPC classification number: H04R17/10 , H04R3/04 , H04R7/06 , H04R17/00 , H04R23/006 , H04R2201/003
Abstract: Diaphragm element arrangements including at least one bistable diaphragm element, which has a first stable state and a second stable state, and corresponding methods are provided. The bistable diaphragm element can be activated above a changeover threshold in order to change over between the first and the second stable state or below the changeover threshold.
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