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1.发明申请公开(公告)号：US20190197374A1
公开(公告)日：2019-06-27
申请号：US16120467
申请日：2018-09-04
Applicant: Industrial Technology Research Institute
Inventor： Shau-Yin Tseng , Chien-Hung Lin , Yu-Sheng Lee , Yung-Chao Chen , Chih-Wei Hsu
CPC classification number: G06K15/4045 , G06K15/1836 , G06K15/1849 , H04N1/32251
Abstract: A method and a system for digital direct imaging, an image generating method and an electronic device are provided. The method for digital direct imaging includes: obtaining a first image of a first format; converting the first image into a second image of a second format, wherein the second image includes a contour description; generating a correction parameter according to at least one mark on a substrate; correcting the second image according to the contour description and the correction parameter; and performing a rasterization operation on the corrected second image and imaging the second image processed by the rasterization operation on the substrate by an exposure device.
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公开(公告)号：US10100410B2
公开(公告)日：2018-10-16
申请号：US15229136
申请日：2016-08-05
Applicant: Industrial Technology Research Institute
Inventor： Yu-Lin Hsu , Kuo-Hsin Huang , Chien-Hung Lin , Pang-Min Shih , Chao-Feng Sung
Abstract: A film thickness monitoring system is provided. The film thickness monitoring system includes a source, a valve, and a chamber. The source is configured to provide a deposition material. The valve is connected to the source. The chamber includes a manifold, a quartz crystal microbalance, and a pressure sensor. The manifold is connected to the valve and has at least one first nozzle and at least one second nozzle. The quartz crystal microbalance is disposed opposite to the at least one second nozzle. The deposition material is adapted to be deposited on the quartz crystal microbalance through the at least one second nozzle, and the quartz crystal microbalance includes a shutter facing the at least one second nozzle. The pressure sensor is disposed in the manifold. A method for monitoring a film thickness deposition process is also provided.
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公开(公告)号：US20180150219A1
公开(公告)日：2018-05-31
申请号：US15394710
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yung-Chao Chen , Chien-Hung Lin , Chih-Wei Hsu , Yu-Sheng Lee
CPC classification number: G06F3/061 , G06F3/0644 , G06F3/0655 , G06F3/0685 , G06F3/0688 , G06F12/0638 , G06F2212/205
Abstract: A data accessing system, a data accessing apparatus, and a method for accessing data are provided. A memory controller accesses a target data according to an access command, wherein the access command includes an access information, and the memory controller obtains an access rule corresponding to a data attribute of the target data according to the access information and performs an access operation for the access information in a hybrid memory according to the access rule.
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公开(公告)号：US20180037996A1
公开(公告)日：2018-02-08
申请号：US15229136
申请日：2016-08-05
Applicant: Industrial Technology Research Institute
Inventor： Yu-Lin Hsu , Kuo-Hsin Huang , Chien-Hung Lin , Pang-Min Shih , Chao-Feng Sung
CPC classification number: C23C16/52 , C23C14/54 , C23C14/546 , G01N29/12 , G01N2291/0237 , G01N2291/0256 , G01N2291/02854 , G01N2291/2697
Abstract: A film thickness monitoring system is provided. The film thickness monitoring system includes a source, a valve, and a chamber. The source is configured to provide a deposition material. The valve is connected to the source. The chamber includes a manifold, a quartz crystal microbalance, and a pressure sensor. The manifold is connected to the valve and has at least one first nozzle and at least one second nozzle. The quartz crystal microbalance is disposed opposite to the at least one second nozzle. The deposition material is adapted to be deposited on the quartz crystal microbalance through the at least one second nozzle, and the quartz crystal microbalance includes a shutter facing the at least one second nozzle. The pressure sensor is disposed in the manifold. A method for monitoring a film thickness deposition process is also provided.
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公开(公告)号：US10895007B2
公开(公告)日：2021-01-19
申请号：US15841300
申请日：2017-12-14
Applicant: Industrial Technology Research Institute
Inventor： Yu-Lin Hsu , Chien-Hung Lin , Kuo-Hsin Huang , Chao-Feng Sung , Chih-Ming Lai , Hung-Yi Chang
Abstract: An evaporation apparatus including a material source, a chamber, a passageway, and a heating component is provided. The material source is configured to provide a deposition material. The chamber includes a manifold. The passageway is configured to be connected to the material source and the manifold. The heating component is disposed in at least a portion of the passageway and configured to heat the deposition material. A calibration method of the evaporation apparatus is also provided.
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Patent Agency Ranking
公开(公告)号：US10737581B2
公开(公告)日：2020-08-11
申请号：US16215642
申请日：2018-12-11
Applicant: Industrial Technology Research Institute
Inventor： Chien-Hung Lin , Yu-Sheng Lee , Chih-Wei Hsu , Yung-Chao Chen , Hsien-Ching Hsieh
Abstract: An adaptive power supply system for an unmanned vehicle and an operation method thereof are provided. The adaptive power supply system includes an adaptive power supply, a battery, a sensing circuit, and a power dispatch controller. The output terminal of the adaptive power supply powers the load circuit of the unmanned vehicle. The battery is coupled to the output terminal of the adaptive power supply. The sensing circuit senses the output of the output terminal of the adaptive power supply and the output of the battery. The power dispatch controller controls the output of the output terminal of the adaptive power supply according to the sensing result of the sensing circuit. The power dispatch controller determines whether one or both of the adaptive power supply and the battery power the load circuit by adjusting the output of the adaptive power supply.
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公开(公告)号：US20190366860A1
公开(公告)日：2019-12-05
申请号：US16215642
申请日：2018-12-11
Applicant: Industrial Technology Research Institute
Inventor： Chien-Hung Lin , Yu-Sheng Lee , Chih-Wei Hsu , Yung-Chao Chen , Hsien-Ching Hsieh
Abstract: An adaptive power supply system for an unmanned vehicle and an operation method thereof are provided. The adaptive power supply system includes an adaptive power supply, a battery, a sensing circuit, and a power dispatch controller. The output terminal of the adaptive power supply powers the load circuit of the unmanned vehicle. The battery is coupled to the output terminal of the adaptive power supply. The sensing circuit senses the output of the output terminal of the adaptive power supply and the output of the battery. The power dispatch controller controls the output of the output terminal of the adaptive power supply according to the sensing result of the sensing circuit. The power dispatch controller determines whether one or both of the adaptive power supply and the battery power the load circuit by adjusting the output of the adaptive power supply.
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公开(公告)号：US20180178665A1
公开(公告)日：2018-06-28
申请号：US15820447
申请日：2017-11-22
Applicant: Industrial Technology Research Institute
Inventor： Yung-Chao Chen , Chien-Hung Lin , Yu-Sheng Lee , Tsung-Hsien Chen
CPC classification number: B60L11/1825 , B60L53/16 , B60L53/18 , B60L53/31 , B60L2200/10 , B64C39/024 , B64C2201/027 , B64C2201/042 , B64C2201/108 , B64F1/007 , H02J7/0027 , H02J7/0042 , H02J7/0044 , Y02T10/7005 , Y02T10/7088
Abstract: A charging station is provided herein for being adapted to bear an unmanned vehicle. The charging station includes a platform and a charging mechanism. The charging mechanism is disposed on the platform, and the charging mechanism may be electrically connected to the unmanned vehicle for charging by a movement over the platform. In addition, a charging station module including a plurality of the aforesaid charging stations is also provided.
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9.发明授权公开(公告)号：US10909431B2
公开(公告)日：2021-02-02
申请号：US16120467
申请日：2018-09-04
Applicant: Industrial Technology Research Institute
Inventor： Shau-Yin Tseng , Chien-Hung Lin , Yu-Sheng Lee , Yung-Chao Chen , Chih-Wei Hsu
Abstract: A method and a system for digital direct imaging, an image generating method and an electronic device are provided. The method for digital direct imaging includes: obtaining a first image of a first format; converting the first image into a second image of a second format, wherein the second image includes a contour description; generating a correction parameter according to at least one mark on a substrate; correcting the second image according to the contour description and the correction parameter; and performing a rasterization operation on the corrected second image and imaging the second image processed by the rasterization operation on the substrate by an exposure device.
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公开(公告)号：US20190127843A1
公开(公告)日：2019-05-02
申请号：US15841300
申请日：2017-12-14
Applicant: Industrial Technology Research Institute
Inventor： Yu-Lin Hsu , Chien-Hung Lin , Kuo-Hsin Huang , Chao-Feng Sung , Chih-Ming Lai , Hung-Yi Chang
Abstract: An evaporation apparatus including a material source, a chamber, a passageway, and a heating component is provided. The material source is configured to provide a deposition material. The chamber includes a manifold. The passageway is configured to be connected to the material source and the manifold. The heating component is disposed in at least a portion of the passageway and configured to heat the deposition material. A calibration method of the evaporation apparatus is also provided.
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