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公开(公告)号：US20220119943A1
公开(公告)日：2022-04-21
申请号：US17117111
申请日：2020-12-10
Applicant: Industrial Technology Research Institute
Inventor： Kuan-Chou Chen , Ching-Chiun Wang , Chih-Yung Huang , Muh-Wang Liang , Yi-Jiun Lin
IPC: C23C16/455 , C23C16/46
Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.
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公开(公告)号：US20200154555A1
公开(公告)日：2020-05-14
申请号：US16223044
申请日：2018-12-17
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Kuan-Chou Chen , Shih-Chin Lin , Yi-Jiun Lin , Ching-Chiun Wang
Abstract: A flow field visualization device includes a chamber, a power supply, at least one pair of electrodes, and at least two high-speed cameras. The power supply outputs a voltage for plasma generation, and the pair of electrodes is disposed in the chamber. The pair of electrodes includes a first electrode and a second electrode. The first electrode has a plurality of first tips, the second electrode has a plurality of second tips, and the first tips and the second tips are aligned with each other. The pair of electrodes generates a periodically densely distributed plasma by exciting a gas in the chamber through the voltage from the power supply. The high-speed cameras are disposed outside the chamber and are positioned in different directions corresponding to the pair of electrodes in order to capture images of different dimensions.
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公开(公告)号：US20210132104A1
公开(公告)日：2021-05-06
申请号：US16701073
申请日：2019-12-02
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Yao-Hsien Liu , Kuan-Chou Chen , Yi-Jiun Lin , Shih-Chin Lin , Ching-Chiun Wang
IPC: G01P13/00
Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.
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Patent Agency Ranking
公开(公告)号：US10591216B2
公开(公告)日：2020-03-17
申请号：US15831181
申请日：2017-12-04
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Fu-Ching Tung , Muh-Wang Liang , Jung-Chen Chien , Yi-Jiun Lin
Abstract: A solidifying device is for solidifying a substrate which includes a middle and two side portions. The thermostability of the middle portion is greater than that of the side portions. The solidifying device includes a housing, a heating member, a temperature control air-floating member and a conveyor. The housing defines a working space. The heating member is in the working space. The substrate has a heat receiving surface facing the heating member. The temperature control air-floating member is in the working space and below the heating member. The conveyor is for transporting the substrate into the working space and between the temperature control air-floating member and the heating member. The heating member is for providing heat to the substrate. The temperature control air-floating member is for supplying air towards the substrate to allow the substrate to float in the working space and form a high-temperature and two low-temperature areas.
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公开(公告)号：US20190101333A1
公开(公告)日：2019-04-04
申请号：US15831181
申请日：2017-12-04
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Fu-Ching Tung , Muh-Wang Liang , Jung-Chen Chien , Yi-Jiun Lin
CPC classification number: F27D9/00 , F26B17/00 , F27B9/14 , F27B9/3005 , F27B21/06 , F27D11/12 , F27D2009/0081 , F27D2019/0006
Abstract: A solidifying device is for solidifying a substrate which includes a middle and two side portions. The thermostability of the middle portion is greater than that of the side portions. The solidifying device includes a housing, a heating member, a temperature control air-floating member and a conveyor. The housing defines a working space. The heating member is in the working space. The substrate has a heat receiving surface facing the heating member. The temperature control air-floating member is in the working space and below the heating member. The conveyor is for transporting the substrate into the working space and between the temperature control air-floating member and the heating member. The heating member is for providing heat to the substrate. The temperature control air-floating member is for supplying air towards the substrate to allow the substrate to float in the working space and form a high-temperature and two low-temperature areas.
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公开(公告)号：US11680316B2
公开(公告)日：2023-06-20
申请号：US17117111
申请日：2020-12-10
Applicant: Industrial Technology Research Institute
Inventor： Kuan-Chou Chen , Ching-Chiun Wang , Chih-Yung Huang , Muh-Wang Liang , Yi-Jiun Lin
IPC: C23C16/44 , C23C16/455 , C23C16/46
CPC classification number: C23C16/4401 , C23C16/4558 , C23C16/45504 , C23C16/45517 , C23C16/45519 , C23C16/45591 , C23C16/46
Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.
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公开(公告)号：US11320449B2
公开(公告)日：2022-05-03
申请号：US16701073
申请日：2019-12-02
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Yao-Hsien Liu , Kuan-Chou Chen , Yi-Jiun Lin , Shih-Chin Lin , Ching-Chiun Wang
IPC: G01P13/00
Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.
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公开(公告)号：US20230178643A1
公开(公告)日：2023-06-08
申请号：US17561633
申请日：2021-12-23
Applicant: Industrial Technology Research Institute
Inventor： Shih-Chin Lin , Ching-Chiun Wang , Jwu-Sheng Hu , Yi Chang , Yi-Jiun Lin
IPC: H01L29/778 , H01L29/15 , H01L29/20 , H01L29/205
CPC classification number: H01L29/7785 , H01L29/155 , H01L29/2003 , H01L29/205
Abstract: A high electron mobility transistor (HEMT) device includes at least an AlN nucleation layer, a superlattice composite layer, a GaN electron transport layer, and an AlGaN barrier layer. The superlattice composite layer is disposed on the AlN nucleation layer, and the superlattice composite layer includes a plurality of AlN films and a plurality of GaN films stacked alternately to reduce device stress. The GaN electron transport layer is disposed on the superlattice composite layer, and the AlGaN barrier layer is disposed on the GaN electron transport layer.
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