公开(公告)号：US20220119943A1

公开(公告)日：2022-04-21

申请号：US17117111

申请日：2020-12-10

Applicant: Industrial Technology Research Institute

Inventor： Kuan-Chou Chen ,  Ching-Chiun Wang ,  Chih-Yung Huang ,  Muh-Wang Liang ,  Yi-Jiun Lin

IPC: C23C16/455 ,  C23C16/46

Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.

公开(公告)号：US20200154555A1

公开(公告)日：2020-05-14

申请号：US16223044

申请日：2018-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chih-Yung Huang ,  Kuan-Chou Chen ,  Shih-Chin Lin ,  Yi-Jiun Lin ,  Ching-Chiun Wang

IPC: H05H1/00 ,  H05H1/24 ,  H04N5/247 ,  G06T7/246

Abstract: A flow field visualization device includes a chamber, a power supply, at least one pair of electrodes, and at least two high-speed cameras. The power supply outputs a voltage for plasma generation, and the pair of electrodes is disposed in the chamber. The pair of electrodes includes a first electrode and a second electrode. The first electrode has a plurality of first tips, the second electrode has a plurality of second tips, and the first tips and the second tips are aligned with each other. The pair of electrodes generates a periodically densely distributed plasma by exciting a gas in the chamber through the voltage from the power supply. The high-speed cameras are disposed outside the chamber and are positioned in different directions corresponding to the pair of electrodes in order to capture images of different dimensions.

公开(公告)号：US20140068923A1

公开(公告)日：2014-03-13

申请号：US14083451

申请日：2013-11-19

Applicant: Industrial Technology Research Institute

Inventor： Kuan-Chou Chen ,  Pei-Shan Wu ,  Sheng-Lang Lee ,  Chia-Ming Chen ,  Fu-Ching Tung ,  Jyh-Jone Lee ,  Wan-Sung Lin ,  Kuan-Han Chen

IPC: H01L21/68

CPC classification number: H01L21/68 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68771 ,  Y10T29/49998

Abstract: A rotary positioning apparatus includes a fixing base, a rotation mechanism, two driving modules and a carrier. The rotation mechanism is disposed on the fixing base, the first driving module is disposed on the fixing base and coupled to the rotation mechanism to drive the rotation mechanism rotating around a first rotation axis relatively to the fixing base. The carrier has plural accommodating slots on a circular-arc surface thereof and is pivoted to the rotation mechanism through a second rotation axis passing through the curvature center of the circular-arc surface and perpendicular to the first rotation axis, on which the curvature center is located. The second driving module is disposed on the rotation mechanism and coupled to the carrier to drive the carrier rotating around the second rotation axis relatively to the rotation mechanism. An automatic pick-and-place system and an operation method using the rotary positioning apparatus are also provided.

Abstract translation: 旋转定位装置包括固定基座，旋转机构，两个驱动模块和载体。 旋转机构设置在固定基座上，第一驱动模块设置在固定基座上并且联接到旋转机构，以驱动围绕相对于固定基座的第一旋转轴线旋转的旋转机构。 载体在其圆弧表面上具有多个容纳槽，并且通过穿过圆弧表面的弯曲中心并垂直于第一旋转轴线的第二旋转轴线枢转到旋转机构，曲率中心为 位于。 第二驱动模块设置在旋转机构上并且联接到载体上以相对于旋转机构驱动围绕第二旋转轴线旋转的载体。 还提供了一种使用旋转定位装置的自动拾放系统和操作方法。

公开(公告)号：US20210132104A1

公开(公告)日：2021-05-06

申请号：US16701073

申请日：2019-12-02

Applicant: Industrial Technology Research Institute

Inventor： Chih-Yung Huang ,  Yao-Hsien Liu ,  Kuan-Chou Chen ,  Yi-Jiun Lin ,  Shih-Chin Lin ,  Ching-Chiun Wang

IPC: G01P13/00

Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.

公开(公告)号：US20140059836A1

公开(公告)日：2014-03-06

申请号：US13711631

申请日：2012-12-12

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Pei-Shan Wu ,  Kuan-Chou Chen ,  Sheng-Lang Lee ,  Fu-Ching Tung ,  Chia-Ming Chen

IPC: H01L21/68

CPC classification number: H01L21/68 ,  C23C14/505 ,  H01L21/68764 ,  H01L21/68771 ,  Y10T29/49998

Abstract: A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.

Abstract translation: 提供一种包括固定基座，可旋转齿条，第一驱动模块，载体和第二驱动模块的可旋转定位装置。 旋转齿条通过第一旋转轴线在固定基座上枢转。 第一驱动模块耦合到可旋转的齿条，以驱动相对于固定基座沿着第一旋转轴线旋转的可旋转齿条。 载体在载体的弧形表面上设置有容纳槽，并且载体通过第二旋转轴线枢转在可旋转的齿条上。 第二旋转轴线穿过弧形表面的曲率中心并且垂直于第一旋转轴线。 曲率中心位于第一旋转轴上。 第二驱动模块联接到载体以驱动相对于可旋转齿条沿着第二旋转轴线旋转的载体。

公开(公告)号：US11680316B2

公开(公告)日：2023-06-20

申请号：US17117111

申请日：2020-12-10

Applicant: Industrial Technology Research Institute

Inventor： Kuan-Chou Chen ,  Ching-Chiun Wang ,  Chih-Yung Huang ,  Muh-Wang Liang ,  Yi-Jiun Lin

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/46

CPC classification number: C23C16/4401 ,  C23C16/4558 ,  C23C16/45504 ,  C23C16/45517 ,  C23C16/45519 ,  C23C16/45591 ,  C23C16/46

Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.

公开(公告)号：US11320449B2

公开(公告)日：2022-05-03

申请号：US16701073

申请日：2019-12-02

Applicant: Industrial Technology Research Institute

Inventor： Chih-Yung Huang ,  Yao-Hsien Liu ,  Kuan-Chou Chen ,  Yi-Jiun Lin ,  Shih-Chin Lin ,  Ching-Chiun Wang

IPC: G01P13/00

Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.

公开(公告)号：US09373534B2

公开(公告)日：2016-06-21

申请号：US14083451

申请日：2013-11-19

Applicant: Industrial Technology Research Institute

Inventor： Kuan-Chou Chen ,  Pei-Shan Wu ,  Sheng-Lang Lee ,  Chia-Ming Chen ,  Fu-Ching Tung ,  Jyh-Jone Lee ,  Wan-Sung Lin ,  Kuan-Han Chen

IPC: H01L21/68 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68771 ,  Y10T29/49998

Abstract: A rotary positioning apparatus includes a fixing base, a rotation mechanism, two driving modules and a carrier. The rotation mechanism is disposed on the fixing base, the first driving module is disposed on the fixing base and coupled to the rotation mechanism to drive the rotation mechanism rotating around a first rotation axis relatively to the fixing base. The carrier has plural accommodating slots on a circular-arc surface thereof and is pivoted to the rotation mechanism through a second rotation axis passing through the curvature center of the circular-arc surface and perpendicular to the first rotation axis, on which the curvature center is located. The second driving module is disposed on the rotation mechanism and coupled to the carrier to drive the carrier rotating around the second rotation axis relatively to the rotation mechanism. An automatic pick-and-place system and an operation method using the rotary positioning apparatus are also provided.

Abstract translation: 旋转定位装置包括固定基座，旋转机构，两个驱动模块和载体。 旋转机构设置在固定基座上，第一驱动模块设置在固定基座上并且联接到旋转机构，以驱动围绕相对于固定基座的第一旋转轴线旋转的旋转机构。 载体在其圆弧表面上具有多个容纳槽，并且通过穿过圆弧表面的弯曲中心并垂直于第一旋转轴线的第二旋转轴线枢转到旋转机构，曲率中心为 位于。 第二驱动模块设置在旋转机构上并且联接到载体上以相对于旋转机构驱动围绕第二旋转轴线旋转的载体。 还提供了一种使用旋转定位装置的自动拾放系统和操作方法。

公开(公告)号：US09082801B2

公开(公告)日：2015-07-14

申请号：US13711631

申请日：2012-12-12

Applicant: Industrial Technology Research Institute

Inventor： Pei-Shan Wu ,  Kuan-Chou Chen ,  Sheng-Lang Lee ,  Fu-Ching Tung ,  Chia-Ming Chen

IPC: H01L21/67 ,  H01L21/68 ,  H01L21/687 ,  C23C14/50

CPC classification number: H01L21/68 ,  C23C14/505 ,  H01L21/68764 ,  H01L21/68771 ,  Y10T29/49998

Abstract: A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.

Abstract translation: 提供一种包括固定基座，可旋转齿条，第一驱动模块，载体和第二驱动模块的可旋转定位装置。 旋转齿条通过第一旋转轴线在固定基座上枢转。 第一驱动模块耦合到可旋转的齿条，以驱动相对于固定基座沿着第一旋转轴线旋转的可旋转齿条。 载体在载体的弧形表面上设置有容纳槽，并且载体通过第二旋转轴线枢转在可旋转的齿条上。 第二旋转轴线穿过弧形表面的曲率中心并且垂直于第一旋转轴线。 曲率中心位于第一旋转轴上。 第二驱动模块联接到载体以驱动相对于可旋转齿条沿着第二旋转轴线旋转的载体。